Series KC Self-seal Fittings

H2 (Hex.) A1 M A2 D L Part No.

SI Unit for Vacuum Manifold

Hysteresis H2 10988 10P2-P1 10P2-P1 100 Setpoint P1 11989 H1+1P2-H2 H1+1P2-H2 600 Hysteresis H1 10988 10P1-1 10P1-1 50 Setpoint P3 312000 H3+12000 H3+11000 40 Hysteresis H3 101999 10P3-1 10P3-1 10 Caution The Pressure parameters should be set so that each value meets the above conditions. The condition of P3 differs depending on the Pressure range parameter. -20No.EX-OMY0014-A 4.1.6.

Compact Vacuum Ejector Series ZQ

Connector type Lead wire length: 3 m CL Nil Y Standard (1 W for DC) Note) DC low wattage type (0.5 W) Connector type Without connector CN Note) In case of the manifold type or when single unit valves are aligned closely with each other, avoid energization lasting more than 3 days.

Pin Cylinders Series CJP2/CJP

-006 NTP-010 NTP-015 4 M2 x 0.4 1.6 4 4.6 4 5 6 9 M2 x 0.4 3 6 5 6 M3 x 0.5 1.8 5.5 6.4 6 6 8 11 M3 x 0.5 5 8 6 10 M4 x 0.7 2.4 7 8.1 10 8 10 13 M4 x 0.7 6 10 8 16 M5 x 0.8 3.2 8 9.2 16 10 12 15 M5 x 0.8 7 12 10 30 Pin Cylinder: Double Acting, Single Rod Series CJP2 Auto Switch Proper Mounting Position (Detection at Stroke End) and Its Mounting Height D-A9(V), D-M9(V), D-M9WV B H3 CJ1 H2

PFxx-OMP0001CN

[P_2][n_2][] [H_2][] [F 2] OUT2 500 L/min OUT1 -37No.PF-OMP0001CN-F b. () [P2L][n2L][] () [P2H][n2H][] [ H2][] [F 2] OUT2 500 L/min OUT1 -38No.PF-OMP0001CN-F c. 0999,999,999 3 (3) [P2.1][n2.1][] (3) [P2.2][n2.2][] (3) [P2.3][n2.3][] [F 2] OUT2 /OUT1 OUT1 -39No.PF-OMP0001CN-F d.

Large Size Vacuum Module: Series ZR

ZR1--CN . 1 pc. ZS-10-5A-50 . 2 pcs.

SMC Pneumatic Clean Series

Cn is rounded down to the nearest whole number, using no more than three significant figures.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Conductances combined When each of the separate conductances are given as C1, C2 and Cn, the composite conductance C is expressed as: C=1/(1/C1+1/C2+...1/Cn) when in series, and C=C1+C2+...Cn, when in parallel.

Air Slide Table Series MXJ

(Not plugged in the case of the clean series) 17 12 5 37 43 3 +0.03 0 depth 1.5 11 17 17 A D14 -X 3 2.5 2.5 3.5 A 4.8 Individual -X 3 +0.05 0 depth 1.5 4 x M3 x 0.5 A-A 177 Series MXJ Dimensions With stroke adjuster With adjuster on both ends MXJ4-CN With adjuster on extension end MXJ4-CSN 8 End plate 0.5 Note) Width across flats 4.5 Max. 6.5 3 With adjuster on retraction end MXJ4-CTN 4 8

ZQ

Connector type Lead wire length: 3 m CL Nil Y Standard type (1 W for DC) Note) DC low wattage type (0.5 W) Connector type Without connector CN Note) In the case of the manifold type or when single unit valves are aligned closely with each other, avoid energization lasting more than 3 days.

CM2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Width across flats B3 e 9 l 9 f h ZZ + Stroke Boss-cut style Built-in One-touch fittings One-touch fitting port size P ZZ + Stroke H1 H G F E MM P ZZ B2 D H2 I A AL B1 K N NA NN S Bore size (mm) 0 0.033 0 0.033 0 0.033 0 0.039 20 41 8 13 20 116 8 18 5

Precautions 1

(mm) HX H2 Q H1 NN F H MM ZZ QY I K N NA S AL D A B2 B1 Eh8 Bore size (mm) 20 25 32 40 Stroke range 0 0.033 20 8 5 13 41 116 14 28 5 15 24 62 8 18 26 Up to 300 13 19.8 65.3 15.5 M8 x 1.25 M20 x 1.5 0 0.033 26 8 6 13 45 120 14 5.5 15 30 62 22 10 22 32 Up to 300 17 70.5 33.5 19.5 M26 x 1.5 M10 x 1.25 0 0.033 26 8 6 13 45 122 16 5.5 15 64 12 22 32 Up to 300 17 76.5 37.5 25.8 34.5 19.5 M26 x

Compact Cylinder with Lock Series CLQ

80 100 L1 X C1 H2 Rod end nut Note) Be sure to use the attached flat washers when mounting a cylinder from the rod side.

Plate Cylinder with Lock Series MLU

depth 12 7 8 9 9 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37 38.5 43 2.5 0 0 6 5 5.5 7 8 36 40 45 53 6 7 8 11 54 68 86 104 26 42 54 64 5 to 300 5 to 300 5 to 300 5 to 300 MLUB25 MLUB32 MLUB40 MLUB50 Rc, NPT, 1/8 Rc, NPT, 1/8 M8 x 1.25 depth 13 M8 x 1.25 depth 11 Rc, NPT, 1/8 M10 x 1.5 depth 14.5 M10 x 1.5 depth 15 KA H2

Table of Contents

Straight Union: KFH H2 (width across flats) H1 (width across flats) Applicable tubing (mm) I.D.

Process Gas Diaphragm Valve

Applicable Fluid Process Gas Molecular Formula Process Gas Molecular Formula Boron11 Trifluoride Chlorine 11BF3 Cl2 Argon Chlorine Trifluoride Ar ClF3 Arsine Carbon Monoxide AsH3 CO Boron Trichloride Carbon Dioxide CO2 BCl3 Boron Trifluoride Germane BF3 GeH4 Halocarbon114 Hydrogen C2ClF4 H2 Halocarbon115 Hydrogen Sulfide C2ClF5 H2S Halocarbon116 Hydrogen Selenide H2Se C2F6 Acetylene Hydrogen

Shuttle Valve/AND Valve with One-Touch Fittings

Dimensions(mm) 1in = 25.4mm Model Metric size D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Inch size TMH-05 21 8.3 8.5 15.4 7.7 9.3 6.4 6.3 3.3 11.7 TMH-06 13.1 10 TMH-07 26.5 10.6 11 20 10 11 7.2 7.1 4.3 13.5 TMH-08 TMH-09 15.5 TMH-10 18.5 34 14.6 14.2 28 14 14 9.6 9.5 4.3 TMH-11 18.8 SMC Pneumatics, Inc. 6 SMC Pneumatics, Inc. 7 World Wide Support...

SMC Pneumatic Clean Series

Cn is rounded down to the nearest whole number, using no more than three significant figures.

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

Wiring specifications Grommet type (Lead wire: 0.6 m) Nil Grommet type (Lead wire: 3 m) L Connector type (Lead wire: 0.6 m) C Connector type (Lead wire: 3 m) CL Without connector CN Analog output is only available in a grommet type.

LFE-OMZ0013

Use the accumulated pulses to obtain the accumulated flow based on the accumulated volume per pulse (page 62). -28No.LFE*-OMZ0013 Hysteresis H_1 (H_2) Hysteresis mode Instantaneous flow n_1 (n_2) Window comparator mode Hysteresis H1(H2) Hysteresis H1(H2) n1H n1L Instantaneous flow (n2H) (n2L) Accumulated increment output mode Count up from "0".