Types: Dryers, Method: [Freezing] Refrigerating type (air-cooling specification), Shape: Standard, Outlet Flow Rate(l/min): 750 ～ 820, Outlet Open Air Pressure Dew-Point(°C): 10, Exit Flow Rate Class(l/min): Up to 1000, Supply Side Connection Type: [Rc (R)] Rc, Inlet Air Temperature(°C): 35, Inlet Air Pressure(MPa): 0.7, Supply Side Plumbing Thread Nominal: 3/4, Control Side Connection Type

Table of Contents

10 20 20 20 20 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy Stainless steel Nil W

Smooth Cylinder/Low Speed Cylinder

40 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20, 25 32 6, 10 15, 20 25, 32 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25, 32 40, 50, 63 80, 100 32, 40 50, 63 80, 100 20, 25, 32 40, 50, 63 80, 100 20, 25 32, 40 50 6, 10 16 6, 10 16, 20 10, 15 25 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option) Rubber

Table of Contents

Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 40 25 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10

CRBU

Applicable shaft configurations shafts K, T Applicable shaft configurations Shaft J, K, T (mm) L2max W L1max X (mm) (mm) Shaft form 15 20 30 Size J K T J K T J K T J K T Size Size Thread Thread Shaft form 15 20 30 6.5 to 14 8 to 18 9 to 20 11.5 to 22 10 15 20 30 L11 L11 L11 L12 X3 X4 X4.5 X5 0.5 to 2 0.5 to 2.5 0.5 to 3 0.5 to 4 K T K T K T M3 X 0.5 M4 X 0.7 M5 X 0.8 2.5 2.5 3.3 2.5 3.3

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

20 25 6 8.5 11.5 9 13 18 4 4 5 5.5 11.6 6 7.5 16.4 20 20 27 6.5 8.5 13 10 14 20 4 4.5 9.2 6 5.5 12.6 6 8 17.2 20 25 27 7.5 10.5 13 11 15 4 4.5 9.8 6 6 13.3 20 25 7.5 10.5 7 Series C(L)KQG32 Dimensions CLKQG;32 (Clamping height LOW type) The figures below indicate the CLKQGB32-;RCL-X2081.

Table of Contents

-X CXS -R 10 15 20ZZ SS Z Data (Z) Manual lever insertion 1.7 K KK Hexagon (O) (Z) (mm) O K Model CXS10-R CXS15-R Width across flats 12 6.5 8.5 Width across flats 13 (mm) Symbol ZZ Z SS KK Stroke 50 40 30 20 50 10 10 50 40 30 20 40 30 20 10 10 20 50 40 30 Model CXS10-R CXS15-R 24.5 40 50 142 132 117 107 125 30 115 100 80 19.5 97 90 45 Dimensions other than those listed above are the same

Rotary Actuator

$Applicable shaft type: J, K, T $Applicable shaft type: K (mm) X W1 L1max L3max (mm) Shaft Y W2 L2max L4max J K T J K T J K T J K T Size Size W1 = type L3 = L1 = 10 10 4.5 to 14 0.5 to 2 Y-1 L2-1 X-3 L1-1 6.5 to 14 0.5 to 2 L4 = 15 15 Y = 5.5 to 18 0.5 to 2.5 Y-1.5 L2-1 X-4 L1-1 8 to 18 0.5 to 2.5 L2 = 20 20 6 to 20 0.5 to 3 Y-1.5 L2-1 X-4.5 L1-1 9 to 20 0.5 to 3 X = 30 30 8.5 to 22 W2 =

ZP

-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 19.5 40 119 137.5 141 6 13.5 25 28 50 53 ZPT32F10-0-A14 16 36.5 49 115.5 134 135.5 13 32 35 Additional Dimensions by Stroke (mm) Additional Dimensions by Stroke (mm) K P Q: 6 Q: 8 K P 5.1 K P Q: 6 Q: 8 K P 5.1 Stroke H I Stroke H I 20 20

ISO Cylinder

Width across flats SW G1 EE KK (WH) EE G2 4 x FF ND h8 NA NA F FX Width across flats K C 3 AM F FX N2 NA NA H N1 ZZ + Stroke S + Stroke Head cover axial port Boss-cut/Basic [mm] Dimensions Bore size AM C EE F FF FX G1 G2 H K KK N1 N2 NA ND S SW (WH) ZZ 20 20 8 G 1/8 30.4 M5 x 0.8 depth 9 22 22 8 30 6 M8 x 1.25 29 15 24 20 0 0.033 76 13 10 106 25 22 10 G 1/8 36.4 M6 x 1 depth 11 26 22 8 36

5 Port Solenoid Valve

250 k/500 kbps 156 k/625 k/ 2.5 M/5 M/10 Mbps 9.6 k/19.2 k/45.45 k/93.75 k/ 187.5 k/500 k/1.5 M/3 M/6 M/12 Mbps 21.6 to 26.4 VDC 100 mA or less Communication speed 21.6 to 26.4 VDC 100 mA or less Power supply for control Power supply voltage Internal current consumption 22.8 to 26.4 VDC 11 to 25 VDC 100 mA or less Power supply for output Power supply voltage Power supply for Power supply

Rotary Actuator/Vane Style Series CRB2

Applicable shaft type: K (mm) L3 max X W1 L1 max (mm) Shaft type Y W2 L2 max L4 max Size W1= J K T J K T J K T J K T Size L3= L1= 10 10 6.5 to 14 4.5 to 14 0.5 to 2 0.5 to 2 Y-1 L2-1 X-3 L1-1 L4= Y= 15 15 8 to 18 5.5 to 18 0.5 to 2.5 0.5 to 2.5 Y-1.5 L2-1 X-4 L1-1 L2= 20 20 9 to 20 6 to 20 0.5 to 3 0.5 to 3 Y-1.5 L2-1 X-4.5 L1-1 X= 30 30 11.5 to 22 8.5 to 22 0.5 to 4 W2= 0.5 to 4 Y-2 L2-2

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: K (mm) X W1 L1 max L3 max (mm) Shaft type L3 = Y W2 L2 max L4 max L1 = W1 = J K T J K T J K T J K T Size Size L2 1 4.5 to 14 10 10 X 3 Y 1 0.5 to 2 0.5 to 2 6.5 to 14 L1 1 L4 = L2 = Y = L2 1 5.5 to 18 15 15 X 4 Y 1.5 0.5 to 2.5 0.5 to 2.5 8 to 18 L1 1 L2 1 6 to 20 20 20 Y 1.5 X 4.5 0.5 to 3 0.5 to 3 9 to 20 L1 1 X = L2 2 8.5 to 22 30 30 Y 2 X 5 0.5 to 4 0.5 to 4 11.5

5

(mm) Bore size A AL B1 CD CI CX D E F FL G H H1 I K KA L MM NA NN 20 18 15.5 13 8 20 12 8 20 0 0.033 13 10.5 8 41 5 28 5 6 12 M8 x 1.25 24 M20 x 1.5 25 22 19.5 17 8 22 12 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 12 M10 x 1.25 30 M26 x 1.5 32 22 19.5 17 10 27 20 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 15 M10 x 1.25 34.5 M26 x 1.5 40 24 21 22 10 33 20 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12

ZP

Model Model ZPR20B-0-A10 ZPR40B-0-A14 23.5 38.5 49.3 67.1 12.4 47.5 58.3 76.1 24.4 20 40 25 48 16 22 43 34 10.5 25 ZPR25B-0-A10 19 ZPR50B-0-A14 50 24 39 49.8 67.6 15.6 51.5 62.3 80.1 32.4 28 57 27 53 38 14 ZPR32B-0-A10 32 29 44 54.8 72.6 18.9 37 34 Dimensions by Stroke Dimensions by Stroke 40 50 J K: 6 K: 8 Model 20 25 32 J K: 4 K: 6 K: 8 G H G H L M L M Model G H G H G H L M L M L M ZPRB10

LJ1H

12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

Compact Rotary Actuator Series CRQ2

double shaft length Change of double shaft length XA38 K 10, 15, 20, 30, 40 MSZ K J XA39 XA40 XA41 XA45 K K K XA46 CRQ2X MSQX Y Y Y Y Y 20, 30, 40 Y MRQ K, T J K K, T K 10, 15, 20, 30, 40 K K K K, T K X Z X, Z J Z J J, Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 J T Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft

AC Servo Motor Driver (Pulse input type/Positioning type ）

LSN 44 6.2 k LOP 45 LOP RD RD 49 RD (Note 5) 24 V DC OPC 12 20 21 (Note 7, 8) 13 DICOM DICOM Approx. 14 (Note 7, 8) RA 1.2 k (Note 2) Approx. 100 PP 10 Isolated Approx. 1.2 k PP2 37 (Note 1) Approx.

Refrigerated Air Dryers Series IDF/IDU

AFF37B-14 AM650-14 37 176.5 300 AMH650-14 AMD650-14 AME650-14 AMF650-14 A B AT55C-20 IDFB55E HAW75-20 AFF75 -20 AM850-20 55 264.7 450 AMH850-20 AMD850-20 AME850-20 AMF850-20 A B AT75C-20 IDFB75E AFF75 -20 AM850-20 HAW110-30 75 353.0 600 AMH850-20 AMD850-20 AME850-20 AMF850-20 For screw compressors (when an aftercooler is installed) Air compressor Local line Sub line Main line Note 2) Air

NCM

7/16-20 No.10-32 No.10-32 075 (3/4"), 088 (7/8"), 106 (1-1/16"), 125 (1-1/4"), 150 (1-1/2"), 200 (2") ZB + Stroke Y W 0.50 K E NE A ZC ZD MM N NC B Pilot NN-Mounting Nut (incl. except 2" bore) ZD D-Across Flats KK-UNF-2A (inch) MM 0.250 0.250 0.312 0.437 0.437 0.625 KK 1/4-28 1/4-28 5/16-24 7/16-20 7/16-20 1/2-20 A 0.50 0.50 0.50 0.75 0.75 0.88 B 0.624 0.624 0.624 0.749 0.749 1.375 D 0.25