EX245-FPS1_2_3_eng

Description Item ON US1 is present (> approx. 21.6 VDC). 350 mA or less (EX245-FPS1) 300 mA or less (EX245-FPS2/3) Internal current consumption at 24 VDC (via US1) US2 Indicator NOTE US2 Meaning Reverse Polarity Protection Included (US1 and US2) For UL conformity a DC power supply meeting the requirements of UL1310 Class 2 must be used.

PFxx-OMJ0005CN

304 AWG26 0.50 mm 1.00 mm PVC 3.5 -56No.PF-OMJ0005CN-I CO2 3[V]12[mA] (15V) (420 mA) [mA] [V] [L/min] [L/min] PFM710--C/E 10(5) PFM710--D/F 10(5) PFM725--C/E 25(12.5) PFM725--D/F 25(12.5) PFM750--C/E 50(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350

PFxx-OMX0007

condensation or freezing) Operating humidity range Operation, Storage: 35 to 85%RH (No condensation) Standards CE marked (EMC directive, RoHS directive) Piping Piping specification Modular (Body size: 30) Modular (Body size: 40) Materials in contact with fluid SUS304, Aluminum alloy, PPS, HNBR (Sensor: Pt, Au, Ni, Fe, lead glass (not RoHS compliant), Al2O3) Lead wire with connector 3 m Body 350

HRX-OM-X084

Switching circulating fluid temperature range rising alarm WRM TEMP OUT OVER / / The monitoring time of communication error / OFF 30 Dustproof filter maintenance time *3 5000 PUMPF 00 Unused / TEMP OUTHI ALARM PUMPF COMM TIME EXT OFSET Output setting of circulating fluid temperature range rising alarm / / / Temp when only pump rus when alarm is generated FILTT FLTR TIME ON 0 PUMPF 350

HRX-OM-W002

Switching circulating fluid temperature range rising alarm WRM TEMP OUT OVER / / The monitoring time of communication error / OFF 30 Dustproof filter maintenance time *3 5000 PUMPF 00 Unused / TEMP OUTHI ALARM PUMPF COMM TIME EXT OFSET Output setting of circulating fluid temperature range rising alarm / / / Temp when only pump rus when alarm is generated FILTT FLTR TIME ON 0 PUMPF 350

HRX-OM-X071

Switching circulating fluid temperature range rising alarm WRM TEMP OUT OVER / / The monitoring time of communication error / OFF 30 PUMPF 00 Unused Dustproof filter maintenance time*1 5000 / TEMP OUTHI ALARM PUMPF COMM TIME EXT OFSET Output setting of circulating fluid temperature range rising alarm / / / Temp when only pump rus when alarm is generated FILTT FLTR TIME ON 0 PUMPF 350

DOC1003626

Item Range 0 None Hexadecimal number : 0h Decimal number : 0 1 Ambient temperature Hexadecimal number : F334h, FF42h to 0316h Decimal number : -3276, -190 to 790(0.1C) 2 External tuning temperature * Hexadecimal number : F334h, 0032h to 015Eh Decimal number : -3276, 50 to 350(0.1C) 3 Heat exchanger inlet temperature Hexadecimal number : F334h, FE0Ch to 0834h Decimal number : -3276, -500 to

MHx-OMY0005

MHF2-8D MHF2-12D MHF2-16D MHF2-20D mm 8 12 16 20 MPa 0.150.7 0.10.7 oC -1060 mm 1) 0.05 120 c.p.m. 120 60 2) 1 N 19 48 90 141 8 12 16 20 () mm 16 24 32 40 32 48 64 80 65 155 350 645 85 190 445 850 3) g 120 275 650 1,225 1) 0.15mm 2) 0.5MPaL=20mm 3) 4 2 2-1 1. ( ) 2. 3. 4. 2-2. 1. 2. (1) (2) (3) 5 3. 4. 5. 6. (1) (2) ,2 , 7.

SFOD-OMT0009CN

No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 [mm/s] 500 500 410 340 250 200 170 [mm/s] 30 20 10 () [mm/s] 49 33 17 () 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 [mm/s] 400 200 400 200 400 200 [mm/s] 20 10 20 10 20 10 () [mm/s] 25 13 27 14 30 15 () 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 [mm/s] 300 250 150 350

JXCx-OMU0026

LES(H)25 Lead symbol J K J K J K Lead [mm] 8 4 10 5 16 8 Max. speed [mm/s] 400 200 400 200 400 200 Min. speed [mm/s] (Independent and interpolation) 20 10 20 10 20 10 Min. speed [mm/s] (Speed tuning control) 25 13 27 14 30 15 Supplement 1.4 Initial setting of LEP series Model LEP8 LEP16 Lead symbol J K J K Lead [mm] 8 4 10 5 Stroke (mm) Others 25 Others 25 Max. speed [mm/s] 300 250 150 350

JXCx-OMT0001CN

108No.JXC-OMT0001CN-C LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 mm/s 500 500 410 340 250 200 170 [mm/s] () 30 20 10 [mm/s] () 49 33 17 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 mm/s 400 200 400 200 400 200 [mm/s] () 20 10 20 10 20 10 [mm/s] () 25 13 27 14 30 15 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 mm/s 300 250 150 350

JXCx-OMT0023

Maximum rating Static Varistor voltage rating Maximum capacity Power supply Rated (range) Permissible circuit Surge current Energy limit voltage (reference Varistor pulse V1mA voltage immunity immunity value) voltage power AC[Vrms] DC[V] 8/20 s[A] 2ms[J] [W] [A] [V] [pF] [V] TND20V-431K 275 350 10/1 time 195 1.0 100 710 1300 430(387 to 473) 200V class 7000/2 time TND20V-471K 300 385 215 775

SFOD-OMT0010

LES(H)25 Lead symbol J K J K J K Lead [mm] 8 4 10 5 16 8 Max. speed [mm/s] 400 200 400 200 400 200 Min. speed [mm/s] 20 10 20 10 20 10 (Independent and interpolation) Min. speed [mm/s] 25 13 27 14 30 15 (Speed tuning control) Supplement 1.4 Initial setting of LEP series Model LEP8 LEP16 Lead symbol J K J K Lead [mm] 8 4 10 5 Stroke [mm] Others 25 Others 25 Max. speed [mm/s] 300 250 150 350

Programless controller (with stroke study) Step motor (servo 24 VDC)

LEMB / LEMC LEMH / LEMHT Speed [mm/s] Acceleration Speed [mm/s] Acceleration [mm/s2] [mm/s2] 0 48 250 48 250 1 75 500 75 500 2 100 1000 100 1000 3 150 1500 150 1500 4 200 2000 200 2000 5 250 2500 300 2500 6 300 3000 400 3000 7 350 4000 500 4000 8 400 5000 600 5000 9 450 6000 800 6000 10 500 7500 1000 7500 11 600 10 1200 10 12 700 12500 1400 12500 13 800 15000 1600 15000 14 900 17500 1800

Ionizer Gun

Pressure Flow characteristics IZG10--01IZG10--02 Mode setting switch: Continuous blow 500 450 400 Indicator (maximum) Flow rate [L/min(ANR)] 350 300 Indicator (7) 250 Indicator (6) 200 150 Indicator (4) 100 Indicator (2) Indicator (0) 50 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 6.

Digital Flow Switch (Remote type sensor unit)

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM510--1 10 (5) PFM510--2 10 (5) PFM525--1 25 (12.5) PFM525--2 25 (12.5) PFM550--1 50 (25) PFM550--2 50 (25) PFM511--1 100 (50) PFM511--2 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 Flow adjustment needle revolution Flow characteristics (reference value) -23No.PF-OMJ0016-J Pressure loss (at 350 [kPa]) -24No.PF-OMJ0016-J Dimensions

LA-OMP0023

LAT3LAT3MLAT3F600 350 700 Load weight1000g Load weight1000g Load weight1000g 300 600 Positioning time [ms] Positioning time [ms] Positioning time [ms] [ms] 500 [ms] [ms] 700g 700g 700g 250 500 400 500g 500g 500g 200 400 300 150 300 200 100 200 300g 300g 300g 100 100g 100g 50 100 100g 0g 0g 0g 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 0 10 20 30 40 50 Total travel distance [mm] Total travel

Series MLGP

. + = 4 . 1 = a V V 2 V m M E k 2 Ek: Kinetic energy (J) M : Mass of object being transported (kg) m : Mass of moving parts of cylinder (kg) V: Maximum speed (m/s) Va: Average speed (m/s) Mass of moving parts of cylinder (kg) Bore size Standard stroke (mm) (mm) model 20 25 30 40 50 75 100 125 150 175 200 250 300 350 MLGPM20 0.40 0.42 0.45 0.47 0.59 0.65 0.71 0.77 0.83 0.89 1.08 1.20 1.31

MHF2-E

Middle stroke 120 Long stroke 60 Lubrication Not required Action Double acting Note 2) Gripping force Effective gripping force per finger (N) 19 48 90 141 Short stroke 8 12 16 20 Opening/closing stroke (Both sides) (mm) Middle stroke 16 24 32 40 Long stroke 32 48 64 80 Short stroke 65 155 350 645 Note 3) Weight (g) Middle stroke 85 190 445 850 Long stroke 120 275 650 1,225 Note1) This is

smcmaintenancepartslist

When retightening the sections, turn approximately 2 past their position prior to disassembly. 350 Series MNB/CNA2 Replacement Procedure of Seal 1 The cylinder needs to be disassembled and assembled in a clean place. 1. Disassembly of the Cylinder Actuators Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Industrial Filters Modular F.R.L.