Flow Sensor Series PFMV

to 0.5 l/min 0 to 3 l/min 0 to 1 l/min 0.5 to 0.5 l/min Note 2) 1 to 1 l/min Note 2) 3 to 3 l/min Note 2) Rated flow range (Flow rate range) 2 F.S. or less Note 3) Repeatability Pressure characteristics (Based on 0 kPa Note 4)) 2% F.S. or less (0 to 300 kPa) 5% F.S. or less (70 to 0 kPa) 2% F.S. or less (15 to 35C) 5% F.S. or less (0 to 50C) Temperature characteristics (Based on 25C) Rated

O

W hi t e I nput si gnal Bl ue G N D ( CO M M O N ) Bl ack M oni t or out put Brow n Bl ue W hi t e Bl ack W i ri ng di agram ( Pow er suppl y and i nput si gnal ) Current /Vol t age t ypeI TV 0 0I TV 0 1I TV 0 2I TV 0 3 Pow er suppl y 24VD C I TV 0 0Brow n + 1215VD C I TV 0 1Bl ue Pow er suppl y I nput si gnal 420m AD C I TV 0 0 W hi t e 020m AD C I TV 0 1 + Bl ack 0 5VD C I TV

O

W hi t e I nput si gnal Bl ue G N D ( CO M M O N ) Bl ack M oni t or out put Brow n Bl ue W hi t e Bl ack W i ri ng di agram ( Pow er suppl y and i nput si gnal ) Current /Vol t age t ypeI TV 0 0I TV 0 1I TV 0 2I TV 0 3 Pow er suppl y 24VD C I TV 0 0Brow n + 1215VD C I TV 0 1Bl ue Pow er suppl y I nput si gnal 420m AD C I TV 0 0 W hi t e 020m AD C I TV 0 1 + Bl ack 0 5VD C I TV

Nozzle Type Ionizer

Make sure to ground. +24 V +24 V Brown + 24 VDC Brown + 24 VDC +24 V Power supply 24 VDC +24 V Power supply 24 VDC Blue 0 V Blue 0 V 0 V 0 V F.G. F.G. Make sure to ground. Make sure to ground.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

U side D side D D D D D D 3 2 1 Stations How to Order Solenoid Valve 10 SV 1 1 0 0 F 5 Note) Clean series Note) Available with manifold block for station additions. Refer to the WEB catalog.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.

LECA6_C

mm/s 0 1 ABS 100 50.00 1000 1000 0 0 0 100 0 0 0.1 2 INC 50 10.00 1000 1000 0 0 0 100 0 0 0.1 () No.1(IN0ON) DRIVEON No.1 DRIVE No.

POWER CLAMP CYLINDER

Bore Arm angle( (mm) 75 90 105 120 15 30 45 60 135 0 0 0 0 0 0 0 0 0 50 15 30 45 60 75 90 105 120 135 -4 -5 -5 -5 -5 -5 -5 -6 -9 0 0 0 0 0 0 0 0 0 63 15 45 30 60 75 90 105 120 135 -3 -4 -5 -5 -5 -5 -5 -6 -9 (7) Do not disassemble the power clamp cylinder. The power clamp cylinder consists of a completely sealed structure in order to protect it from welding spatter.

IZx-OMR0035

Air flow SW:1 10 10 Air flow SW:10 5 5 Air flow SW:10 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance mm Installation distance mm 28 Doc.

MHL2

5 Rubber magnet Synthetic rubber Replacement Parts MHL2-40 Main parts Seal kit @6@7@8@9#0 <10> !1!3!6@6 <16 to 25> eo!0!4!6@6#0 <32, 40> ei!4!

0.4

0 Fitting assembly> Wiring 0 1 For single (2-wire) For double (3-wire) (For P, R port) VVQ1000 51A C8 C SSQ1000 4 A P 1 200 For station 2 to 24 kit Port size Wiring C6 C8 N7 N9 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 1/4" One-touch fitting for 5/16" 0 1 For single (2-wire) For double (3-wire) How to Increase Manifold Stations Manifold Options Lead wire length

Escapements Series MIW/MIS

+0.025 6 -0.1 0 7h9 -0.036 0 2.6 4 18 13 4 15 M3 x 0.5 7 6 (Effective depth 3) 8 -0.1 0 10h9 -0.036 0 2.5H9 0 +0.025 21 26 4.5 19 M3 x 0.5 9.5 23 3.3 5 18 10 (Effective depth 4) 13h9 -0.043 0 11 -0.1 0 4H9 0 +0.030 28.5 29.5 35 M5 x 0.8 25.5 5.1 7 12.5 6.5 25 15 (Effective depth 7) 17 (Effective depth 8.5) 17h9 -0.043 0 15 -0.1 0 41 41 40 5H9 0 +0.030 M6 x 1 37 6.8 10 17 10 28 21h9 -0.052

q"s

*sure dlsplay Accuracy J3% (lull span) Minimum unit [ i l P a : 0 . 0 1 . k a f / c m ' : 0 . 0 1 , b a r : 0 . 0 1 .

Hygienic Design Cylinder Series HY

0 !2 w !1 o @0 @1 Built-in magnet @2 @5 @3 @4 Component Parts No. Description Material Qty. Note No. Description Material Qty.

Modular/F.R.L. Units Series AC

1500 0 200 400 600 800 00 25 50 75 100 125 150 0 0 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) AC30 Rc3/8 AC40 Rc1/2 AC40-06 Rc3/4 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 500 1000 1500 0 1000 2000 3000 00 1000 2000 3000 4000 5000 0 0 Flow rate (l/min (ANR)) Flow

Direct Operated

to 0.5 0 to 0.5 1.5 3 1.5 3 3 1.5 3 1.5 1/8 (6A) Low vacuum 0 to 0.5 380 Low vacuum 0 to 0.5 Low vacuum 0 to 0.5 0 to 0.9 530 730 530 730 530 730 530 730 1/4 (8A) 0.64 0.17 0.40 0.38 0.20 1.6 Low vacuum 2.2 4 2.0 0 to 0.5 0 to 0.9 1.6 0.38 0.20 0.17 0.40 0.64 Low vacuum 4 2.2 0 to 0.5 0 to 0.9 0.64 0.17 0.40 0.38 0.20 1.6 Low vacuum 2.2 4 3/8 (10A) 0 to 0.5 0 to 0.9 1.6 0.38 0.20 0.17 0.40

Digital Flow Switch (Integrated display type)

to 10.5 L/min 1 0 to 26.3 L/min 0 to 52.5 L/min 0 to 105 L/min 2 Set flow range CO2 0 to 5.2 L/min 0 to 13.1 L/min 0 to 26.2 L/min 0 to 52 L/min Min. setting/display unit 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min Accumulated Setting/display flow range 3 0 to 9 L flow Min. setting/display unit 1 L Accumulated flow volume per pulse 0.1 L/Pulse 0.1 L/Pulse 0.1 L/Pulse 1 L/Pulse Display unit Instantaneous

EX260-SPR-A_eng

Safety cannot be assured in the case of unexpected malfunction. 2 0 0 0 0 0 0 1 Valve manifold 3 0 0 0 0 0 1 1 ADDRESS 4 0 0 0 1 0 0 0 Replacement of the SI unit Remove the M3 hexagon screw from the SI unit and release the SI unit from the valve manifold. Replace the SI unit.

E-ITV-STD-RF-A

W hi t e I nput si gnal Bl ue G N D ( CO M M O N ) Bl ack M oni t or out put W i ri ng di agram ( Pow er suppl y and i nput si gnal ) Current /Vol t age t ypeI TV 0 0I TV 0 1I TV 0 2I TV 0 3 Pow er suppl y 24VD C I TV 0 0Brow n + 1215VD C I TV 0 1Bl ue Pow er suppl y I nput si gnal 420m AD C I TV 0 0 W hi t e 020m AD C I TV 0 1 + Bl ack 0 5VD C I TV 0 2 I nput si gnal 010VD C

Modular F.R.L. Unit

0 0 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa AC60 AC30 0.25 0.25 Set point Set point Outlet pressure MPa Outlet pressure MPa 0.2 0.2 0.15 0.15 0 0 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa AC40 0.25 Set point Outlet pressure MPa 0.2 0.15 0 0 0.2