MRQ

Linear Motion/Standard Motion Size Standard stroke (mm) 32/40 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 Refer to p.1.5-18 for other intermediate strokes.

Power Valve: Economy Valve Series VEX5

10 12 14 20 1 2 3 4 1 2 100 VAC 50/60 Hz 1 2 3 (Ex.)

SMC Basic Pneumatics

Powet Preflx Svmbol Pourer Preflx Svmbol 10-1 deci d 101 Deka da fi2 Heclo h 1O-2 centi c iO-3 milli m 103 Kilo k 10-6 micro ], tO6 Mega M Table 3.2 Prefixes tor powers of ten This lads us to a kPa (kilo-pascal or 1/100 b ol a BAR) and an MPa (1,OOO,OO0 pascals or 10 BAF). Practice with these prefixes and pay attention to what th symbol represents in terms of powers of ten.

HRX-OM-W004

3.10.1 LRC(ASCII) .3-10 3.10.2 CRC(RTU) .3-10 3.11 Explanation of function codes . 3-12 3.11.1 Function code04 Reading multiple registers .3-12 3.11.2 Function code06 Writing registers .3-13 3.11.3 Function code16 Writing multiple registers .3-14 HRR Series HRX-OM-W004 Contents 3.11.4 Function code23 Reading/writing multiple registers . 3-15 3.12 Negative response . 3-16 3.13 Register Map

AS

Rod O.D.Applicable tubing O.D. 10 20 25 30 M5 standard 01 standard 02 standard 03 standard 04-04 06-06 08-08 10-10 4 4 6 6 8 8 10 10 wBring up the body, while holding it down. w eTake the finger off the release ring and remove the speed controller from the One-touch fitting.

RLQ

YB-03 32, 40 80 9 6.5 10 18 50 d2 d1 YB-05 50, 63 120 11 6.5 12 22 60 L UT C UA (mm) Part No.

Series VS

VSS8-6 VSS8-8 VSS8-10 VSS8-6 VSS8-8 VSS8-10 Description Description VSS8-10 VSS8-8 VSS8-8 VSS8-10 VSS8-6 VSS8-6 VSS8-10 VSS8-8 VSS8-6 1.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 13-9-10

Compact Cylinder with Air Cushion and Lock Series RLQ

Extension locking Retraction locking 100 100 63 63 50 50 40 Load mass kg Load mass kg 40 10 10 32 32 0.5 MPa 0.4 MPa 0.5 MPa 0.4 MPa 1 1 100 500 100 500 Maximum speed mm/s Maximum speed mm/s Allowable load mass (Graph (2)) Horizontal (With and without switch) 10 Load mass m (kg) 1 63 50 40 32 m 0.1 10 100 Eccentric distance + Stroke L (mm) l S l: Eccentric distance (mm) S: Stroke (mm) L Cushion

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

Series CE1

pulse) REA Power supply voltage 100V AC ( 20%), 50/60Hz 24V DC ( 10%) (Power ripple 10% or less) Between case and AC line: 1500V AC for 1min.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

Compact Vacuum Ejector Series ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 10

JXCx-OMT0028CN

LEC (LECP6LECA6) 9 - 3 3.1 DC24V10% 200mA () 300mA () LEC (LECP6, LECA6) 12 *UL UL1310 Class2 EtherNet/IP EtherNet (IEEE802.3) 100BASE-TX 10/100Mbps () 100m(328ft) EtherNet/IP (/) 2048 (256byte)/2048 (256byte) IP DHCP ID7 0(Generic device) 154 LEC-GEN1 10 - RS485(Modbus ) 115.2k 230.4kbps (115.2kbps) (3m)(3m12 ) 39m 3m 3m 3m 3m 3m 0 40() 90%RH () -10 60() 90%RH () 2(0.5G

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

389 4-13-10

2/3 Port Valve for Various

Allowable voltage fluctuation is 10% of the rated voltage.

IDX-OM-Y002

Option R . 10-1 10.1 Safety instructions for use . 10-1 10.2 Specifications. 10-1 10.3 Connection of power supply . 10-2 10.4 Handling Precautions of the Earth Leakage Breaker . 10-2 10.5 Electrical circuit diagram . 10-2 Chapter 11 Inspection record . 11-1 11.1 Inspection record . 11-1 IDF190D/240D Series IDX-OM-Y002 Chapter 1 Safety Chapter 1 Safety 1.1 Before Using the Air Dryer Before

PSxx-OMT0001CN

1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMT0001CN-E 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 6 10 N 3 10 0.4MPaMPa 0 G1/8 F G1/8 3 1 11 0.4MPaMPa 0.2MPaMPa 0.2MPaMPa 2 3 C Rc1/4 F 12 G1/4 4