CY1

40 50 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY1R20 CY1R63 200 H 1000 100 Allowable driving force Fn (N) Allowable driving force Fn (N) 500 H 400 50 30 L 300 200 L 100 10 5 Useable range 20 30 40 50 Useable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 1112

NCQ8

1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/4 2-1/2 2-3/4 3 3-1/2 4 4-1/2 5 #10-24UNC1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-3/4 1-7/8 2 2-1/4 2-1/2 2-3/4 3 3-1/2 4 4-1/2 5 #10-24UNC1-1/4 1-3/8 1-1/2 1-5/8 1-3/4

Air Cylinder NCA1 Series

/16 1/4 8 1/2 3/4 3/4 2 1 1/2 9/16 7 1/8 5 7/8 3 1/4 8 3/4 10 1 1/16 5 5/16 2 1/8 7/8 1/4 10 5/8 1 3/4 2 1/4 2 11/16 8 7/8 7 1/8 4 1/8 10 5/8 12 1 1/16 6 3/8 2 1/8 7/8 3/8 12 3/4 1 3/4 2 1/4 2 11/16 11 7 5/8 4 5/8 11 1/8 14 1 5/16 7 3/8 2 7/16 2 7/16 3/8 14 3/4 1 1/4 3/4 2 3/4 2 1/4 3/4 12 5/8 8 7/8 5 1/2 13 MS2 8 ~ 14 WITH SIDE LUG BORE ROD KK A B V W XS Y (MM) SM 8 1 3/8 1-14 1 5/8 2 1/

SMC Pneumatic Clean Series

22 18 14 12 10 8 21.5 15 15 15 171 137 135 131 50 45 45 41 27 25 25 21 20 20 20 10 8 8 8 30 28 28 25 104 102 102 3.2 3.2 3.2 55 40 40 40 75 55 55 55 21 19.5 19.5 15.5 M10 x 1.25 M8 x 1.25 M26 x 1.5 M20 x 1.5 4 4 4 7 6.8 6.8 1/4 1/8 1/8 16 13 13 11 8 8 M26 x 1.5 M10 x 1.25 23 10 8 3.2 134 M32 x 2 M14 x 1.5 With air cushion Relief port M5 x 0.8 H A K F AL Width across flats B1 H1 H2 GC GA

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

size (mm) Stroke range (mm) A AL C D DK E F GA I J K B1 H1 KA KB MM NA P S 13 5 18 14 26 15.5 8 M4 x 0.7 depth 7 9.2 12 2 12 20 5 24 Up to 200 6 1/8 8 77 M8 x 1.25 M5 x 0.8 depth 7.5 17 6 22 16.5 31 19.5 10 11 14 2 12 25 5.5 29 Up to 300 8 1/8 10 77 M10 x 1.25 M5 x 0.8 depth 8 17 6 22 20 38 19.5 12 12 18 2 12 32 5.5 35.5 Up to 300 10 1/8 10 79 M10 x 1.25 M6 x 1 depth 12 19 8 30 26 47 27

REA/REB

Speed 600 mm/s REAS25 8 4 7 10 11 6.5 26.4 16 8.5 70 54 40 20 14 REAS32 8 5 7 12.5 14 8 33.6 20 9.5 86 66 46 24 16 REAS40 10 5 10 12.5 14 8 41.6 25 10.5 104 76 57 25 20 J x K HP HS HT L LD M MM N NN Model REAS15 M8 x 1.0 39 15 21 M6 x 1.0 x 9.5 60 5.6 8 M5 x 0.8 7.5 REAS20 M10 x 1.0 45 25.5 10 M6 x 1.0 x 9.5 70 5.6 10 M6 x 1.0 9.5 REAS25 M14 x 1.5 53 23 10 M8 x 1.25 x 10 70 7 10 M6 x 1.0

NCA1

/4 8 1/2 3/4 3/4 2 1 1/2 9/16 7 1/8 5 7/8 3 1/4 8 3/4 10 1 1/16 5 5/16 2 1/8 7/8 1/4 10 5/8 1 3/4 2 1/4 2 11/16 8 7/8 7 1/8 4 1/8 10 5/8 12 1 1/16 6 3/8 2 1/8 7/8 3/8 12 3/4 1 3/4 2 1/4 2 11/16 11 7 5/8 4 5/8 11 1/8 14 1 5/16 7 3/8 2 7/16 2 7/16 3/8 14 3/4 1 1/4 3/4 2 3/4 2 1/4 3/4 12 5/8 8 7/8 5 1/2 13 MS2 8 ~ 14 WITH SIDE LUG BORE ROD KK A B V W XS Y (MM) SM 8 1 3/8 1-14 1 5/8 2 1/4 7/8

KR

(mm) A Weight (g) L2 M D1 D2 L1 Model Urethane 2-applicable tubing KAT23-M5 15 9.6 16 15.5 M5 x 0.8 M6 x 1 8 8 8 15.5 19.5 21 3.4 2.9 9 1 8 KAT23-M6 KAT23-U01 10 3.2 17.5 10 KAT04-M5 15.5 M5 x 0.8 M6 x 1 8 17 4.3 4.3 6 8 KAT04-M6 16 10.4 16 18 4 1 8 KAT04-U01 20 9 14 10 10 21.5 6.0 6.0 1 4 KAT04-U02 22 15 Connection thread KAT06-M5 16 M5 x 0.8 M6 x 1 18 4.3 4.3 8 7 8 KAT06

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Connector C Actuator side (Terminal no.) 1 2 5 6 (8) (14) (18) Cable length (L) [m] A1 B1 (13.5) (17.7) (17.7) 1 1.5 3 3 5 5 8 8 A 10 B 15 C 20 1 2 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side (14.2) Connector C (Terminal no.) 1 2 5 6 (5.5) (6.3) Produced upon receipt of order

Speed Controller with Indicator

Flow Rate and Sonic Conductance Model AS22l1FSl-U01 AS22l1FSl-U02 AS32l1FSl AS42l1FSl Flow Direction Symbols on Body Meter-out Meter-in Metric size 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Symbol Tubing O.D.

MXQ

M3 x 10 M3 x 8 M3 x 8 0.9 0.9 0.9 3. Shock absorber is considered a consumable component. When energy absorption is decreased, replace it.

Cylinder with Lock

Auto switch model D-Y59m D-Y69m D-Y7P D-Y7PV D-Y7H D-Y7mW D-Y7mWV D-Y7BA D-Z7m D-Z80 D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-A9m D-A9mV D-F5m D-J59 D-F59F D-F5NTL D-A5m D-A6m D-A59W D-G39 D-K39 D-A3m D-A44 D-P3DWA D-P4DW A B A B A B A B A B A B A B A B A B A B 32 13.5 10.5 9.5 6.5 10 7 15 12 3.5 0.5 7.5 4.5 3.5 0.5 7 4 9 6 6.5 3.5 40 10.5 14 6.5 10 7 10.5 12 15.5 0.5 4 4.5 8 0.5 4 4

SYJ3000/5000/7000

: Side Ported/SS5YJ3-41Stations -M5, [ ]: AC 91.7 [96.1] Approx. 300 (Lead wire length) C4 N3 For (Built-in One-touch fitting) Grommet (G) For M5 (Pitch) P = 10.5 16 1/8 (P port) 10 Manual override 1/8 (P port) 36.4 10 10 61.7 [63.9] 60.9 [63.1] 21.4 78.8 [83.2] R R B B B B B 7.8 39.5 38.7 36.5 11.5 18 4.3 21.5 (4.4) P A A A A A 3 1/8 (R port) (Station n) (Station 1) 2-4.5 (For mounting

HRX-OM-W002

specification . 9-5 9.2 Outline dimensions . 9-6 9.2.1 HRR012/018-A-10/20. 9-6 9.2.2 HRR012/018-W-10/20. 9-7 9.2.3 HRR024/030-A-20. 9-8 9.2.4 HRR024/030-W-20. 9-9 9.3 Flow Chart . 9-10 9.3.1 HRR012/018/024/030-A-10/20.9-10 9.3.2 HRR012/018/024/030-W-10/20-.9-10 9.4 Cooling capacity . 9-11 9.4.1 HRR012-A/W-10/20. 9-11 HRR Series HRX-OM-W002 Contents 9.4.2 HRR018-A/W-10/20. 9-11 9.4.3 HRR024

High Vacuum Angle Valve

1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

CM2

18 22 22 24 K 5 5.5 5.5 7 N 15 15 15 21.5 P B2 26 32 32 41 D F 13 13 13 16 I 28 33.5 37.5 46.5 AL 15.5 19.5 19.5 21 MM M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 NA 24 30 34.5 42.5 G 8 8 8 11 B1 13 17 17 22 NN M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 41 45 45 50 H1 5 6 6 8 0 0.033 0 0.033 0 0.033 8 10 12 14 1/8 1/8 1/8 0 0.039 1/4 With Rod Boot S 62 62 64 88 TD 8 9 9 10 TT 10 10 10 11 TX 32

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

and turn to operature and lock override. 2-Rc(PT)1/8 (P port) 2-Rc(PT)1/8 (P port) 60.9 (GZ, GS: 61.6) [62.6] 59.9 (GZ, GS: 60.6) [61.6] 78.8 (GZ, GS: 80.2) [82.2] 10 10 91.7 (GZ, GS: 93.1) [95.1] SY B B B B B P 40 P 39 35 35 A A A A A SYJ 2 19 19 10 10 SX MAX.5 (Lead wire length) 2-4.5 VK G: 300 H: 600 (Mounting holes) (Pitch) P=10.5 10.5 VZ L2 4 L1 VF VFR 48.5 [55] VP7 36.1 A A A A 29.5

CXS

6.5 C0.5 3.2 1 6 5.5 4.5 5 20 0.1 M5 x 0.8 6 1.25 6.5 3.5 +0.2 0 + 0.2 0 0 0.2 +0.016 +0.001 0.05 0.15 6 +0.3 0 CXS15 5 M5 x 0.8 8 7 8 C0.5 5.2 1.5 8 7.5 5 6 25 0.1 M6 x 1.0 8 2 9.5 5.5 3 +0.3 0 0 0.2 + 0.2 0 +0.2 0 +0.016 +0.001 8 CXS20 0.05 0.15 6 M6 x 1.0 10 8 9.5 C0.5 6.2 2 10 9.5 7 8 28 0.1 M8 x 1.25 10 2 11 6.6 +0.2 0 + 0.2 0 10 0 0.2 CXS25 +0.019 +0.001 0.05 0.15 +0.3 0 6 M6 x 1.0

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

8 8 8 7 5.5 5.5 5 50 45 45 41 1/4 1/8 1/8 14 12 10 16 13 13 10 8 M14 x 1.5 M32 x 2 134 3.2 23 The bracket is shipped together.

CL

1/8 1/8 19 13 73.5 8 9 10 57.5 6 3.5 8 Up to 300 55 80 8 20 18 15.5 20 13 38 19 13 83.5 10 9 10 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 25 22 45 19 13 83.5 12 9 10 69 9 4 9 Up to 300 64.5 90 8 19.5 26 17 32 22 45 30 16 90.5 14 10 15 76 11 4 8 Up to 300 70 21 100.5 32 11 22 40 24 52 H GQ GR H1 I N NA K L P PG PH PL PW RR S U Z ZZ MM NN Bore size (mm) 1/8 1/8 1/8 1/4 28 4 5 4 M8 x 1.25 41 5