(Normally Closed)], Pressure Gauge/Digital Pressure Switch: w/o Pressure Gauge, Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None, Air Filter Drain Port: w/Drain Cock, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left to Right, Drain Cock w/Barb Fitting

(Normally Closed)], Pressure Gauge/Digital Pressure Switch: G (Round Type Pressure Gauge, w/Limit Indicator), Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None, Air Filter Drain Port: w/Drain Cock, Exhaust Mechanism: N (Non-relieving Type), Flow Direction: Left

Body Size: 40, Model Type: B (Air Filter + Regulator), Thread: N (NPT), Port Size: 06 (3/4), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator

Body Size: 40, Model Type: B (Air Filter + Regulator), Thread: N (NPT), Port Size: 03 (3/8), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: w/o Pressure Gauge, Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: 2 (Metal Bowl), Bowl Guard: None, Air Filter Drain Port: J (Drain Guide 1/8: Body

Body Size: 40, Model Type: B (Air Filter + Regulator), Thread: Rc, Port Size: 04 (1/2), Float Type Auto Drain: C [N.C.

Body Size: 40, Model Type: B (Air Filter + Regulator), Thread: N (NPT), Port Size: 04 (1/2), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: w/o Pressure Gauge, Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: 2 (Metal Bowl), Bowl Guard: None, Air Filter Drain Port: J (Drain Guide 1/8: Body

Body Size: 40, Model Type: B (Air Filter + Regulator), Thread: N (NPT), Port Size: 04 (1/2), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: G (Round Type Pressure Gauge, w/Limit Indicator), Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: 2 (Metal Bowl), Bowl Guard: None, Air Filter Drain

Body Size: 40, Model Type: B (Air Filter + Regulator), Thread: N (NPT), Port Size: 03 (3/8), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: G (Round Type Pressure Gauge, w/Limit Indicator), Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: 2 (Metal Bowl), Bowl Guard: None, Air Filter Drain

Body Size: 40, Model Type: B (Air Filter + Regulator), Thread: Rc, Port Size: 04 (1/2), Float Type Auto Drain: C [N.C.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

v Deionized water v Sodium hydroxide Ultra deionized water v Toluene v Hydrofluoric acid Concentration 50% or less v Sulfuric acid (except fuming sulfuric acid) Concentration 20% or less v Phosphoric acid Concentration 30% or less v Note 1) The material and fluid compatibility check list provides reference values as a guide only.

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

6 Body size If more than one option is required, write option part numbers in the order of K, N. 1 2 3 4 M5 standard 01, 02 standard 03 standard 04 standard Tube size (1) 4 6 8 10 12 04 06 08 10 12 Electroless nickel plated (3) Brass PBT PBT/Stainless steel NBR NBR NBR NBR NBR NBR NBR/Stainless steel Electroless nickel plated Elbow type Control method Meter-out Meter-in 0 With One-touch fitting

Electro-Pneumatic Proportional Valve

Analyzer, instrumentation Specifications PVQ10 03: 0.3, 04: 0.4, 06: 0.64, 08: 0.8 Model PVQ30 16: 1.6, 23: 2.3, 40: 4.0 Orifice (mm) Fluid Ambient and fluid temperature Port size Max. operating pressure (MPa) Hysteresis Repeatability Proof pressure Rated voltage Power consumption Coil insulation Air, inert gas 0 to +50oC M5 03: 0.7, 04: 0.45, 06: 0.2, 08: 0.1 Rc 1/8 16: 0.7, 23: 0.35, 40

Electro-Pneumatic Proportional Valve Series VEF/VEP

03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2(A) 1/4 3 3/8 2(A) 2(A) 1(P) 3(R) 1(P) 3(R) 03 04 06 25 3/8 1/2 3/4 1 4 Note) Does not conform to ISO1179-1. 886 Series VEF/VEP Electro-Pneumatic Proportional Valve Application Example

Electro-pneumatic Proportional Valve Series VEF/VEP 1

06 0.05 to 0.65 MPa 1 2 2 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 3/4 0.1 to 0.9 MPa 2 02 03 04 03 04 06 1 3 30 Rc 3/8 Rc 1/2 Rc 3/4 4 0.005 to 0.15 MPa 1 1 4 45 1 2 3 4 12 8 4.5 2.5 Without sub-plate Rc 1/4 Rc 3/8 Nil 02 03 JIS Symbol Flow type Flow type Pressure type 2 3 03 04 06 25 Rc 3/8 Rc 1/2 Rc 3/4 4 1 14-9-11 2 Series VEF/VEP Application Example How to Use DIN Terminal Caution Controlling

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

PF2D

(at 25C water) Temperature characteristics 5% F.S. (0 to 50C, based on 25C) Pulse output, N channel, open drain, output for monitor unit PF2D 300/301 (Specifications: Maximum load current of 10 mA; Maximum applied voltage of 30 V) Pulse output Output Voltage output Note 5) 1 to 5 V Accuracy: 2% F.S., Min. load impedance: 100 k (Output impedance: 1 k) Analog specifications Current output Note

/N.C.), 3rd Selection Vacuum V Port: 6 (Vacuum, V Port: Ø6), 3rd Selection Quantity: 1, /: /, 4th Nominal Nozzle Size: 4 (ø1.5), 4th Selection Supply Valve and Release Valve: K (N.C./N.C.), 4th Selection Vacuum V Port: 6 (Vacuum, V Port: Ø6), 4th Selection Quantity: 1

Body Size: 40, Model Type: C (Air Filter + Mist Separator + Regulator), Thread: Rc, Port Size: 04 (1/2), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: w/o Pressure Gauge, Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None, Air Filter

Body Size: 40, Model Type: Air Filter + Regulator + Lubricator, Thread: Rc, Port Size: 04 (1/2), Float Type Auto Drain: w/o Auto Drain, Pressure Gauge/Digital Pressure Switch: w/o Pressure Gauge, Attachment: V (Mounting Position: AF + AFM + AR + V), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None, Air Filter Drain

PF2D

or less (With load current of 80 mA) (PF2D300, PF2W300, PF2W330) Maximum applied voltage: 30 V 2 outputs Environmental resistance Note 4) Output specifications Switch output PNP open collector Maximum load current: 80 mA Internal voltage drop: 1.5 V or less (With load current of 80 mA) (PF2D301, PF2W301, PF2W331) 2 outputs NPN open collector or PNP open collector (Same as switch output) Accumulated