High Vacuum L Type Valve

(Refer to Chapter 7, Parts Replacement Procedure (P. 13 to 17) for details.) 6 XL-OMV0016 3. Product Specific Precautions 3 Precautions 3 Be sure to read before handling Maintenance Parts Caution SMC specified parts should be used for maintenance service. Refer to Chapter 5, Construction and Dimensions" (P. 10) for the part indication numbers.

10

The rotating eccentric angle to the stroke end must be 2 3.

Mist Separator

P A B C D E G J M N Q R S T U V W AM20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AM30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AM40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl Auto drain Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with level

Micro Mist Separator

Standard specifications Bracket mount Indicator mount P A B C D E G J M N Q R S T U V W AMD20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AMD30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AMD40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl Auto drain Semi-standard

Solenoid Valve

Double solenoid type SQ1000/2000 3 position type SQ1000/2000 4 position dual 3 port type SQ1000/2000 Note) With quick response type, approximately -40 V of coil surge voltage is generated when the valve is switched OFF.

Angular Style Air Gripper Series MHC2/MHCA2/MHCM2

Confirmation of workpiece held 3.

Line filter

P A B C D E G J M N Q R S T U V W AFF20 1/8, 1/4 40 142. 3 17. 5 21 25 21 30 27 22 5. 4 8. 4 60 2. 3 28 50. 4 AFF30 1/4, 3/8 53 178. 1 21. 5 26. 5 30 35 26. 5 41 35 25 6. 5 13 71 2. 3 32 54. 1 AFF40 1/43/81/2 70 223. 5 25. 5 35. 5 38. 4 40 35. 5 50 52 30 8. 5 12. 5 88 2. 3 39 58. 1 Auto drain / semi-standard bowl drain Auto Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with

High Vacuum L Type Valve

(Refer to Chapter 7, Parts Replacement Procedure (P. 14 to 18) for details.) 6 XL-OMS0001-B 3. Product Specific Precautions 3 Precautions 3 Be sure to read before handling Maintenance Parts Caution SMC specified parts should be used for maintenance service. Refer to Chapter 5, Construction and Dimensions" (P. 11) for the part indication numbers.

XL-OMY0002

1. 2. 3. 4. 2 XL-OMY0002 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0002 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0002 2.2 A6063SUS316LSUS304 5 P11 FKM 3 3[]P8 60 , 245250Hz 30m/s 5 XL-OMY0002 /H0 H4 H5 () 510% O 0.1mm0.2mm O 9 P15 3 3P7P8 5 P11 O 10 P16 P19 6 XL-OMY0002 3. 3 5 P11 25 40 50 XLD25-30-1 XLD40-30-1 XLD50-30-1 XLD25-30-1H XLD40-30-1H XLD50-30-1H 63 80 100

Low Profile Slide Table Series MXF

3 !4 !2 r w e !0 o !9 !8 i !5 u !7 q !

PF-OMN0009_C

1. 2. 3. 4

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Stopper Seal Bumper O-ring Drive bushing 2 Series KP Dimensions Male Connector: KPH Effective area mm Model L M TPH TPS A H (width across flats) Applicable tubing O.D. mm Connection threads R Weight g Applicable tubing 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 25.4 25.4 25.9 26.4 32.3 30.3 37.5 33 34 34.5 21.5 19.5 22 20.5 28.5 24.5 32 27 28 27 3 4 4 5 6 7 10 11 12 13 KPH04-01 KPH04-02

SY3000V-OMY0001

(OFF )3.7mm 3 5 3 SY3000/5000/7000 (4A)(2B) (N.C.) (N.O.)3 3 8 No.SY3000V-OMY0001 SY series 1/3 DC24V67ms ) 40ms SY ,[SY(3,5,7)0] [SY(3,5,7)3] (50 10 )(51 11 ) (52 12 ) A,B A,B <> 9 No.SY3000V-OMY0001 SY series ()DC12V 0.5V () () (1) () COM.

XLF Series

68 XLF-63 88 196 100 3 11 87 95 70 69 XLF-80 90 235 117 3 11 114 110 83 96 XLF-100 108 300 154 3 11 134 130 102 131 XLF-160 138 315 200 3 11 190 180 153 112 9 XL*-OMJ0003-D 5.

Transfer

0 @2 @1 #2 ^2 ^5 $5 %2 @5 ^8 $4 ^1 @4 %4 %5 ^7 $3 #0 $2 %6 @7 ^4 o %7 ^9 ^6 @9 %8 ML2BS $1 %3 ^3 !

MRQ

3 Compact hexagon nut Stainless steel Platinum silver !4 !5 !6 !7 !8 !

SY3000/5000/7000 Series Plug-in Type

They are convenient at times when a double solenoid type 3-port valve is required.

Clean Regulator

Description Grade A Grade B 1 Body Stainless steel 316L 2 Diaphragm PTFE Fluororubber 3 Diaphragm PTFE Fluororubber 4 Valve guide PPS 5 Bonnet PPS 860 Clean Regulator SRH Series Dimensions Rc thread type 30.5 (36.5) 40 (52) Panel thickness Max. 3 ARJ AR425 to 935 Panel mounting holes 40 (58) ARX AMR ARM Max. 83.5 (Max. 104.5) ARP IR-A 22 (27) OUT IN IR 24 (33.5) IRV Rc 1/4 VEX Gauge port

In-line Air Filter

Metric size ZFC7 ZFC5 Symbol Applicable tubing O.D. 4 6 8 10 12 3 4 5 6 7 Option Nil B None With bracket Inch size B D E F 5/32" 1/4" 5/16" 3/8" Max.

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.