Low-Speed Rotary Actuator

2 22 Seal washer 2 22 Seal washer 2 22 Seal washer 2 -31- Disassembly procedure 1Loosen cross recessed no.0 screwsize 10,15or roundhead screwsize 20,30,40. 2Pull out the bearing retainer and the shaft from the body.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

(4 port) 22 (2 port) 22 (4 port) 22 (2 port) 2 12 14 4 14 4 2 12 50 80 95 SMC SMC A B SMC 50 80 SMC B A 95 Manual override 5 1 3 Manual override 2-8.5 mounting hole 8 5 1 3 71 65 8 2-8.5 mounting hole 65 71 Indicator light 84 79 Indicator light 84 79 M12 connector M12 connector 150.5 137 150.5 137 PE port PE port PE port PE port 65 39 EA EB P 27 65 39 EA EB 27 P 1/2, 3/4, 1 1 port 3/4-

SZ3000

22 22 SOL.A SOL.A SOL.A 21 21 21 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 4 4 4 SOL.A SOL.A SOL.A 3 3 3 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 1 Station 1 Station 1 2 2 2 SOL.A SOL.A Triangle mark SOL.A 1 1 1 Triangle

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

13.5 12.7 13.5 17 18 17 18 21 22 21 22 22.4 25.2 6.2 11.8 27.6 28.6 29.5 29.6 30.5 27.6 33.3 34.1 35.3 43.5 44.9 32.6 33.6 34.5 34.6 35.5 32.6 38.3 39.1 40.3 51 52.4 5.2 6.2 7.1 6.2 7.1 8.1 7.4 8.2 9.5 10.3 11.6 11.8 14.8 14.8 19.8 19.8 26.5 82 11.3 26.5 15-9-51 Flow Control Equipment Precautions Be sure to read before handling.

New

20 20 22 97 108 143.5 89 100 135.5 30 30 32.5 52.5 52.5 55 20 20 22 83.5 94.5 130 11 2 Port Solenoid Valve For Dust Collector Series VXF2 Dimensions: Direct piping type VXF21A<<

VQ7-6/7-8

Proper tightening torque Nm Tightening torque for piping Connection threads Rc1/8 Rc1/4 Rc3/8 Rc1/2 Rc3/4 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 5.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Model Auto switch mounting Cushion Rubber Bore size (mm) Port size Lubrication Action Standard stroke Note 2) (mm) Long stroke (mm) Note 1) Note 2) Model Air 10-/21-CG120 10-/21-CG125 10-/21-CG132 10-/21-CG140 10-/21-CG150 10-/21-CG163 10-/21-CG180 10-/21-CG1100 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 20 25 32 40 50 63 80 100

ITV

44 22 44 EXH (3) EXH (3) AP100 SUP OUT SUP OUT 15.5 15.5 Dimensions not shown are same as on page 830.

Compact Cylinder with Air Cushion and Lock Series RLQ

A A1 E1 L1 MM RR1 U1 ND NX Part No. cylinder bore cylinder bore A A1 E1 L1 MM RR1 U1 ND size (mm) size (mm) CNA +0.058 0 +0.070 0 0.3 0.5 0.3 0.5 32, 40 +0.058 0 +0.070 0 Y-G04 42 14 22 30 M14 x 1.5 12 10 18 32, 40 I-G04 10 16 14 42 16 22 30 M14 x 1.5 12 14 50, 63 Y-G05 56 18 28 40 M18 x 1.5 14 22 50, 63 I-G05 14 20 56 20 28 40 M18 x 1.5 16 20 CNS Applicable pin part no.

Air Cylinder Series CS1

22 36 164 98 230 253 238 261 1401 to 1600 Lube Non-lube Air-hydro Lube Non-lube Air-hydro Up to 1400 19 19 36 184 98 227 250 232 255 1401 to 1600 Up to 1400 22 22 45 204 248 269 252 273 1401 to 1600 106 Up to 1500 26 26 45 228 272 290 281 299 Lube Non-lube 1801 to 2000 115 Up to 998 26 26 45 257 272 290 286 304 1801 to 2000 120 Lube Non-lube Dimensions except mentioned above are the same

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

34 30 72 22 40 FT FX 40 89 22 50 (mm) L B + Stroke FZ A + Stroke Bore size (mm) Stroke range (mm) 4-FD A L 10 10 to 40 8 75 Rear flange type: MQQLG 10, 16, 20 25, 30, 40 16 10 to 60 10 88.5 2-FD 4-FD 20 10 to 60 10 97 25 10 to 50,75,100 12 104.5 30 10 to 50,75,100 12 124 FV FV 40 M 10 to 50,75,100 12 124 (Dimensions other than A and L are the same as the front flange type.)

Slide Tables MX Series

(5.1) 45 (5.1) 72 (8.1) Vertical Mounting (Tapped Holes) Axial Mounting (Tapped Holes) l 4.8 6 6 8 l 4.8 6 6 8 Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7

Compact Cylinder with Air Cushion Series RQ

50 22 44 8 33.5 M8 x 1.25 14 28 Refer to page 9 for details on rod end nut and accessories.

Compact Cylinder with Air Cushion and Lock Series RLQ

Applicable cylinder bore size (mm) ND NX Applicable pin Part No. 32, 40 50, 63 10 14 18 22 IY-G04 IY-G05 Part No.

LJ1H

8 9 Standard Motor/Horizontal Mount Specification Series LJ1H20 Dimensions/LJ1H202PA Scale: 10% 12.5 9.5 Work piece mounting reference plane LJ1 LG1 LC1 LX LC6D/LC6C Switches 110 4-M6 x 1 thread depth 15 67 20 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane 8H8 depth 8 Z section detail 130 200 52 52.5 Stroke + 150 (table movement range) Z section 22

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Type 60P Flat Ribbon Cable Type (26 pins) Without Power Supply Terminal With Power Supply Terminal Positive common Negative common Common 26 26 26 Positive pin (Common) Positive pin 25 25 25 Station 12 SOL.b 24 24 24 Negative pin Negative pin (Common) SOL.a 23 23 23 Station 11 SOL.b 22 22 22 Unused terminal Unused terminal SOL.a 21 Station 20 21 Station 20 21 20 20 6 6 SOL.b Station 5 SOL.b

Speed Controller with One-touch Fitting

) AS231F-02-08(S)A 8 13.2 34.9 (35) 23.5 46 14.2 22 (22) AS231F-02-10(S)A 10 15.9 20.9 38.1 (38.2) 24.7 47.3 15.6 23 (24) AS331F-02-06(S)A 6 8.2 16.5 29.9 (30) 17.5 40.1 AQ 1/4 17 (17.5) 12.9 13 ASV 13.3 42 (42) AS331F-02-08(S)A 8 13.2 37.1 23.5 59.9 14.2 43 (43) AS331F-02-10(S)A 10 15.9 17.4 23 41.2 26.1 62.5 15.6 46 (46) AS331F-02-12(S)A 12 18.5 42.5 28.3 64.7 17 48 (48) AS331F-03-06(S)

Possible to transfer a workpiece at low-speed.

Applicable shaft type: X MSU CRJ Short shaft side X = Y = X = Y = Short shaft side Short shaft side CRA1 CRQ2 Long shaft side MSQ Long shaft side Long shaft side Y = Size 20, 30, 40 Size 10, 15 MSZ (mm) CRQ2X MSQX CRQ2X MSQX Y 1 to 17 1 to 19 1 to 28.5 1 to 30 1 to 34 X 3 to 10 3 to 11 3.5 to 16.5 4 to 20 4 to 22 (mm) Size 10 15 20 30 40 Y 1 to 19.5 1 to 22 1 to 25 Size 20 30 40 MRQ D327

7

VX3 Tightening Torque for Piping VXA Connection thread Rc1/8 Rc1/4 Rc3/8 Rc1/2 Rc3/4 Rc1 Proper tightening torque (Nm) 7 to 9 12 to 14 22 to 24 Recommended Unacceptable 28 to 30 Fig. 2 Binding tubes with bands 36 to 38 Wiring 4. When connecting piping to a product Avoid mistakes regarding the supply port etc. Warning 5.

ZP

Form w 1 Material e Vacuum inlet r Connection A thread Width across flats 12 10 13 A5 59 38 22 2.5 M5 x 0.8 21 8 4 16 59.5 38.5 22.5 10 13 Width across flats 7 64 38 22 2.5 16 64.5 38.5 22.5 20 25 68 42 24 3.5 32 68.5 42.5 24.5 40 72.5 46.5 28.5 6 50 73.5 47.5 29.5 20 25 A8 M5 x 0.8 N S U F GN GS N4 N6 U4 U6 A6 M6 x 1 26 8 4 ZP Y U D2 Construction p. 117 58 42 24 3.5 M8 x 1 16 12 4 32 58.5