LEYx-OMZ0015 Scket width across flats Rod end nut Max.thread Model Bolt tightening length [mm] torque [Nm] [mm] LEY25 M14x1.5 50 20.5 17 LEY32 M14x1.5 50 20.5 22 Soke LEY63 M18x1.5 97 26 36 Mounting / Body bottom tapped style (When Body bottom tappde is selected Rod end nut thread Width Model depth of Length [mm] across flats bracket[mm] [mm] LEY25 22 8 8 or more Thread depth of bracket LEY32 22 8 8 or
Note 3) When the rod is extended, the clamp stroke and rotary stroke are added to the appropriate dimensions. 4.1-18 Rotary Clamp Cylinder/Heavy Duty Series MK2 32, 40, 50, 63 MK/MK2 RSQ/RSG RSH CE1 CE2 ML2B Rear flange With arm Model E D C B G A C F A B F G D E Model ML1C 39 46 58 57.5 45 45 65 65 20 20 22 22 67 67 88 88 18 18 22 22 48 54 67 80 5.5 5.5 6.6 9 8 8 9 9 65 72 89 108 25 25 40
22 14 14 1 1 25 25 25 25 1/8 2-3/8 1/4, 3/8 X (PE) port 1/8 R1, R2 port 2-3/8 P Port 1/4, 3/8 X(PE) port P port 3-10-8 9 ISO Standard Solenoid Valve: Size 1 Metal Seal/Rubber Seal Series VQ7-6 Prewired Connector Type 2 position single : VQ7-6-FG-SSC single (Reverse pressure): VQ7-6-YZ-SSC 120.5 120.5 68.5 52 Mounting hole 2-6.5 68.5 50 50 Manual override 42.5 42.5 13 (A port) 13 (B port)
Lead wire color Dot marking 18 19 14 15 Pink 16 17 20 21 22 Pink 23 24 25 13 Terminal no.
Applicable Magnetic Field Resistant Auto Switches (Refer to page 21 and 22 for detailed auto switch specifications.)
(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5
VX Manifold Series VVXA21/22 VNl Normally Closed (N.C.), Normally Open (N.O.) VQ Refer to p.4.1-64, 4.1-65 for specifications and models.
G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8
22 22 SOL.A SOL.A SOL.A 21 21 21 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 4 4 4 SOL.A SOL.A SOL.A 3 3 3 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 1 Station 1 Station 1 2 2 2 SOL.A SOL.A Triangle mark SOL.A 1 1 1 Triangle
Refer to the specifications of actuator for more details. 22 Step Motor Controller (Servo/24 VDC) Series LECP6 Servo Motor Controller (24 VDC) Series LECA6 How to Mount a) Screw mounting (LEC6-) (Installation with two M4 screws) b) DIN rail mounting (LEC6D-) (Installation with the DIN rail) DIN rail is locked.
VMG1-08-250-100 VMG1-08-300-100 VMG1-08-350-100 VMG1-08-250-150 VMG1-08-300-150 VMG1-08-350-150 VMG1-08-250-300 VMG1-08-300-300 VMG1-08-350-300 VMG1-08-250-600 VMG1-08-300-600 VMG1-08-350-600 Nozzle size 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 01 02 03 04 05 06 07 11 12 13 21 22 23 24 31 32 33 34 35 36 37 38 41 42 43 44 45 46 47 48 49 50 51 52 23.4 23 22.5 22.1 22 Nozzle length: 100 mm 98
operating conditions Compressed air 0.3 to 0.85 0.3 to 1.0 5 to 55 5 to 55 5 to 50 5 to 50 Ambient temperature (oC) Note 1) Standard Outlet air atmospheric pressure dew point (oC) performance 15 Inlet air flow rate (L/min [ANR]) Note 2) 28 25 56 50 111 100 222 200 329 300 550 500 665 600 830 750 1110 1000 Outlet air flow rate (L/min [ANR]) Purge air flow rate (L/min [ANR]) Note 3) 3 6 11 22
VQ Proper tightening torque NNm (kgfNcm) Tightening Torque for Piping LVM Connection threads M5 1.5 to 2 (15 to 20) VCA Rc 1/8 7 to 9 (70 to 90) Rc 1/4 12 to 14 (120 to 140) VCB Rc 3/8 22 to 24 (220 to 240) Reference Tightening of M5 fitting threads After tightening by hand, tighten approximately 1/6 turn further with a tightening tool.
If a moment or torque directly acts on the cylinder, it will lead to reduced service life or damage to machinery. 7 3 Position Cylinder Series RZQ Construction 13 24 21 3 2 1 6 4 8 7 10 19 22 20 12 23 11 9 5 23 18 14 16 17 15 22 Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 No. 13 14 15 16 17 18 19 20 21 22 23 24 Note Note Description Material Description Material Hard anodized Aluminum alloy
Refer to the specifications of actuator for more details. 22 Step Motor Controller (Servo/24 VDC) Series LECP6 Servo Motor Controller (24 VDC) Series LECA6 How to Mount a) Screw mounting (LEC6-) (Installation with two M4 screws) b) DIN rail mounting (LEC6D-) (Installation with the DIN rail) DIN rail is locked.
[0.15] 22 [0.15] 22 [0.15] 15 [0.10] 15 [0.10] 15 [0.10] 7.3 [0.05] 7.3 [0.05] 7.3 [0.05] 0 0 7.3 [0.05] 15 [0.1] 22 [0.15] 29 [0.2] 36 [0.25] 44 [0.3] 0 0.00 7.3 [0.05] 15 [0.10] 22 [0.15] 29 [0.20] 36 [0.25] 0 0.00 7.3 [0.05] 15 [0.10] 22 [0.15] 29 [0.20] 36 [0.25] Pilot pressure psi [MPa] Pilot pressure psi [MPa] Pilot pressure psi [MPa] 3 Regulator for Chemical Liquids Series LVR Specications
18 1/8 63 129 63 Up to 400 35 32 70 27 55 18 38 6 11 51 11 M6 x 1 7 16 11 M18 x 1.5 22 1/4 73 135 67 Up to 400 35 32 75 27 58 18 38 6 11 51 11 M8 x 1.25 7 16 11 M18 x 1.5 22 1/4 73 135 80 Up to 500 40 37 88 32 69 22 45 12 13 62 13 M8 x 1.25 7 19 13 M22 x 1.5 26 1/4 83 158 85 Up to 500 40 37 95 32 74 22 45 12 13 62 13 M10 x 1.25 7 19 14 M22 x 1.5 26 1/4 83 159 100 Up to 500 40 37 110 41 87
M1 0Xl.5 15 50 131 20 28 22 SO.6 44 B " M l 0)(1.5 M10)(I .S 63 138. 5 18 124 .5 SO.6 44 I. 8 Ml0Xl .5 15 20 30 22 " M12xl .75 M1 2x 1.75 lB 150 27 M1 6X2.0 21 80 168 22 38 28 64 56 18 10 10 0SM:: Series CDQ2BP High Magll8lic Field Resistance ," , [).P70 ' , D-~i4,,;'; ' ; ::~::Y_iidiz!C:::i Auto SWitch No.
Silicon rubber Urethane rubber Fluororubber 40 161 EPR 39 160 40 50 63 80 100 125 1 0 89 158 2 0 56 156 3 0 55 396 6 0 155 347 12 1 121 345 22 3 120 580 118 531 116 529 How to Order ZPT 40 HB N A14 Mounting thread diameter (Vacuum entry) Pad diameter (mm) Pad diameter Thread dia.
MRQ DBasic type 11-MSQBA 11-MSQBR M5 x 0.8 depth 5 (Vacuum port) 20DC DB DA (mm) DA(h9) DB(h9) DC(H9) DD(h9) HB HC HD Size 10 20 30 50 46 45 20 35 20 5 59 HB 61 60 28 40 22 6 65 (HD) 11.5 67 65 32 48 22 6 68 5.5 HC 77 75 35 54 24 7 77 Dimensions other than above are identical to the basic type.