ZSE F/ISE

OUT1 output mode selection in Initial Setting on page 16-2-41. SET Press the SET button.

Digital Gap Checker

Detection nozzle: 1.5 Piping: F type: 4 x 2.5 tube 1 m, 3 m, 5 m Test conditions G, H type: 6 x 4 tube 1 m, 3 m, 5 m Supply pressure: 200 kPa ISA3-F ISA3-G Piping length: 1m, 3m, 5m Piping length: 1m, 3m, 5m : When the display value becomes 9 or lower, "0" is displayed. "0" and "10" are displayed near "10". This does not affect the performance.

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 18 Stations, A B Port Size: C4 (ø4 One-touch Fitting)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 18 Stations, A B Port Size: M5 (Base Mounted M5X0.8)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 18 Stations, A B Port Size: M5 (Base Mounted M5X0.8), P R Port Thread: T (NPTF)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 41 (5 Port/Base Mounted Common SUP Common EXH), Stations: 18 Stations, A B Port Size: N3T (5/32" One-touch Fitting NPTF)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 18 Stations, A B Port Size: ø4 One-touch Fitting, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 18 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: -

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 18 Stations, A B Port Size: Base Mounted M5X0.8, P R Port Thread: NPTF

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Base Mounted Common SUP Common EXH, Stations: 18 Stations, A B Port Size: 5/32" One-touch Fitting NPTF, P R Port Thread: -

Rotary Table Series MSU

2-5.5 through Angle adjustment bolt 6 Adjustment: Max.10.2 2-M5 x 0.8 1.5 7 +0.030 0 3-4H9 long groove depth 3 ( A , B , C ) 4-M5 x 0.8 depth 10 B port A port 0.5 6g6 0.004 0.012 14h9 0 0.043 42 0 0.062 48h9 41 7 Rotary Table High Precision Type Series MSUA These drawings indicate the condition when the B port is pressurized.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

7.5 Up to 300 16.5 17 10 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5

Title not found

BORE B D GA'GA K MM N P x LD LH H zz h 1 3 8 (35) 2.76 2.05 t52l 0 7 9 l:20) 1.57 1.39 (10) 0.67 M8x1.25 J.2A t7l M18rl 5 1 . 1 4 3 5 4 l90l 1.06 lz7) 1 5 1 o3) 3 5 4 ls0J 2.24 (58) 1188) 2.05 (52) '11.21 2.60 (66) s T o 7 7 2 (196) 1 3 8 (35) 3.35 (85) 2.52 079 (20) 1 5 7 1.39 (10) 0.67 M10x1.25 i.2a l7l M18x1 5 1.22 (31) 3 8 6 l93l 1.34 (341 1.63 (16) 0.45 1 1 1 . 5 ) 1 9 7 t50l 6 5 4 t1661

Micro Mist Separator Series AFD20/30/40

23 26 25 J 5.4 6.5 8.5 8.5 K 8.4 8 10.5 10.5 G 27 40 54 54 P 57 73 73 E 18 16 17 14 F 30 41 50 50 D 40 53 70 70 A 40 53 70 75 B 97 129 165 169 C 10 14 18 20 AFD20 AFD30 AFD40 AFD40-06 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Optional specifications Model With drain guide With barb fitting Metal bowl Metal bowl with level gauge B B B 97 142 178 182 B AFD20 AFD30 AFD40 AFD40-06 137 173 177 162

Digital Flow Switches

15 20 25 30 40 35 0 2 4 6 8 10 12 16 14 18 20 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) Construction PF2D504/520 Parts list Material Number Parts o !

LG1H

23 ZSP RA2 CLEAR 13 CR 41 Torque limiting RDYCOM 12 25 TLC RA3 Positioning completion READY 11 RD 49 24 INP RA4 PULSE F + 15 PP 10 PULSE F 16 PG 11 10 m or less NP 35 PULSE R + 17 S/S NG 36 PULSE R 18 4 LA A phase pulse detector (Differential line driver) 9 PG0 LZ 8 5 LAR PG0 COM 10 LZR 9 6 LB B phase pulse detector (Differential line driver) LG 3 7 LBR Control common Plate SD 34 LG Control

VM

Voltage AC125V 2 2 4 4 15 10 15 10 AC250V 1.5 1.5 3 3 15 10 15 10 DC8V 1.5 2.5 3 5 15 15 15 15 DC14V 1.5 2.5 3 5 15 10 15 10 DC30V 1.5 2.5 3 5 6 5 6 5 DC125V 0.3 0.05 0.3 0.05 0.5 0.05 0.5 0.05 DC250V 0.2 0.03 0.2 0.03 0.25 0.03 0.25 0.03 JIS Symbol Construction Precautions Component Parts Be sure to read before handling.

VM

x 28 x 87 18 x 30 x 91 26 x 35 x 94 23 x 40 x 115 30 x 40 x 57 VA VM VR VH VHS Roller lever Adjustable roller lever Adjustable rod lever P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Dual pressure is available only on external pilot. 5-6-3 Mechanical Valves

ChemicalThermo-con

)) 11.6 (294) 0.7 (18) Power switch DC connector 13.0 (330) (0.4 (10)) 12.2 (310) 0.4 (10) Circulating fluid inlet Purge outlet (M5) Power connector 0.67 (17) 4.6 (116) 0.28 (7) 78.7 (2000) 0.28 Power Cable (Accessory) (7) 15.7 (400) (0.4 (10)) 15.0 (380) 0.4 (10) Connector: IEC 60320 C13 or equivalent Cable: 14AWG, O.D. 8.4 3.9 (100) 0.24 (6) Circulating FluidTube Size Wire color Contents

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

4 10 20 27 + Stroke 15.5 29 42.5 + Stroke 10 5 20 5.5 18 Note 3) 2 x 2 x 9 counterbore 2 x 2 x M6 x 1.0 effective depth 10 2 x M5 x 0.8 (Piping port) M5 x 0.8 (Relief port) 5.5 2 x 5.4 through M8 x 1.25 47 1 25.5 10 36 Rod end nut 12 Flat washer 8 15 14 7 7 10 25.5 29.5 + Stroke 18.5 36 48 + Stroke 13 5 25 5.5 19 Note 4) 2 x 2 x 9 counterbore 2 x 2 x M6 x 1.0 effective depth 10 2 x M5 x