Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 ZH15DS-10-12-12 ZH15DL-10-12-12 12.8 6 24 21 7.8 6 17 24 12.8 6 24 21 6 17 24 12.8 6 24 22 6 17 24 12.8 6 24 22 6 17 24 13.7 6 26 24.5 8 20 28 13.7 6 26 24.5 8 20 28 15.3 10 28 27 10 22 30 15.3 10 28 27 10 22 30 Applicable tubing diameter J 7.8 7.8 7.8 9.6 9.6 10.7 10.7 ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

AR Series Modular Type Regulator

AW-A Optional specifications Model AR10-A AR20-A AR25-A AR30-A AR40-A AR40-06-A Bracket assembly Note 1) AR12P-270AS AR22P-270AS AR27P-270AS AR32P-270AS AR42P-270AS AR42P-270AS Set nut AR12P-260S AR22P-260S AR22P-260S AR32P-260S AR42P-260S AR42P-260S AC-B AF-A Note 2) Round type Standard G27-10-R1 G36-10-l01 G46-10-l01 0.02 to 0.2 MPa setting G27-10-R1 Note 3) G36-4-l01 G46-4-l01 Pressure

Pin Clamp Cylinder Series CKQ/CLKQ

) Lock at extended direction A (H) (H) 15 3 2 (L) (Same measurement on 4 sides) 450.05 (10) 45 (M10) 40 (M10) 40 0.05 (10) 17 3 LOCK (t=1 x 1, t=0.5 x 2) Depth 13 2 x M10 x 1.5 4 sides x Depth 11 2 x 10H7 4 sides x (Same measurement on 4 sides) 40 (when the shims are attached) 85 (L) 30 (M10) 300.05 (10) (Same measurement on 4 sides) With shims 47 13 91 P1 (lock release port) (The lock is

Process Pump

SUP = 0.2 MPa 0.2 0.2 0.1 0.1 0 0 5 0 10 15 20 25 10 0 20 30 40 50 Discharge rate (L/min) Discharge rate (L/min) PAF3413 Air Consumption (4 Hz) PAF5413 Air Consumption (3 Hz) 200 Air consumption (L/min [ANR]) Air consumption (L/min [ANR]) SUP = 0.5 MPa 300 SUP = 0.5 MPa 150 SUP = 0.4 MPa SUP = 0.4 MPa 200 SUP = 0.3 MPa SUP = 0.3 MPa 100 SUP = 0.2 MPa SUP = 0.2 MPa 100 50 0 5 0 0 10 0 10

•

g~ 57 WS I Bore F (mm) ' H IA IB ' L W N S WC ZZ GA GB 40 44 52 52 47 97 58 97 72 97 52 55 -49 58 49 58 37.5 43.5 49.5 37.5 43.5 I 5 7 30 10 30 10 30 12 194 194 194 52 60 52 74 50 55 63 69 49.5 5.5 * Pos$lble to fab(fcate the dImenSIOns of H and L othef than the standafd. N type (Semi-standard) 1 S mba. H L ZZ ~prE! .

VCB

Hz VCB2: 4.9/4.1, VCB3: 7.7/6.6, VCB4: 10.5/9.3 VX3 Inrush VCB2: 22/19, VCB3: 36/30, VCB4: 45/37 Apparent power (VA) 50/60 Hz VXA Holding VCB2: 10/8, VCB3: 15/13, VCB4: 19/16 Note1) Vibration resistance Conditions when tested with one sweep of 10 to 250 Hz in the axial direction and at a right angle to the armature, in both energized and deenergized states.

Peltier-type Chiller Thermo-con/ Compact Type

temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the heating capacity increases by approx. 10 W.

ZCUK

(mm) 10 16 20 25 32 5 10 15 20 25 30 40 50 Theoretical Output/Double Acting Type (N) Operating pressure (MPa) Piston area (mm2) Rod dia.

IDX-OM-W011

IDF6E-**-L IDF8E-**-L IDF11E-**-L IDF15E1-**-L N.O. () ) 0.151.6MPa ) 50L/min(ANR) IDF Series 10-1 10 1 IDX-OM-W011 10 L 10-3 Rc1/2 32 25 1) 2830Nm 30 (5) (22)(27) () () () 2) 3) 10-4 IDF Series 10-3 10 2 IDX-OM-W011 11 M 11 M IDF4E/6E/8E/11E/15E1 11-1 ( ) 11-2 ADM200 IDF4E15E1-10-M IDF4E15E1-20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50

VQ5000

Material Description Part number No. 4 5 10 NBR Gasket VVQ5000-80A-1 Type 10 NBR Gasket VVQ5000-80A-2 Option A 1 station Note) Spare parts consist of sets containing 10 pcs. each.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

) 10% or less (With power supply polarity protection) 55 mA or less (at no load) NPN or PNP open collector output: 1 output 80 mA 30 V (With NPN output) 1 V or less (With load current of 80 mA) 1 s (0.25, 0.5, 2, 3) Yes 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

10% or less (With power supply polarity protection) 55 mA or less (at no load) NPN or PNP open collector output: 1 output 80 mA 30 V (With NPN output) 1 V or less (With load current of 80 mA) 1 s (0.25, 0.5, 2, 3) Yes 1% F.S.

Precision Regulator

Description IR1000 IR1010 IR1020 IR2000 IR2010 IR2020/2120 IR3000 IR3010 IR3020/3120 P362030-201 Bracket P36201023 P36202028 Pressure gauge234 G33-2-01 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-4-01 G43-10-01 G33-4-01 G43-4-01 1 A bracket and two mounting screws (M5 x 35) To mount the bracket, remove two body screws (M5 x 30) on the name plate on the opposite side and replace the attached

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

10-24UNC 10.40) 10-32UNF : 270" Rotation Port Size. @ An gle Adj ustin g U nit/D im e ns io n s NCDRB18W10.15.20.30 (inch) N C R 8 1 8 W U 1 0 . 1 5 . 2 0 . 3 0 6-Q(NCRB1BW15, 20, 30) Include marka Auto Switch Compatible Type NCDRBIBWUi0. 15 NCDRB1BWU20.30 s*nci' u"it { Adjustable rotation{ *or"t "aru"ro. { With Auto Switch Appendix How To Set Rotation Time Ust@: Stable Rotation Time Regulation

Series LQ3 High Purity Fluororesin Fitting

W M L H E W M 10 14 18 22 30 36 14 20 25 29 37 49 46.5 57 79 88 103 122 11 16 21 24 32 41 10 17 22.5 24.5 27 30 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3U1A LQ3U2A LQ3U3A LQ3U4A LQ3U5A LQ3U6A 1/4 (E) (E) L

NCRBIBwserbs

10-24UNC 10.40) 10-32UNF : 270" Rotation Port Size. @ An gle Adj ustin g U nit/D im e ns io n s NCDRB18W10.15.20.30 (inch) N C R 8 1 8 W U 1 0 . 1 5 . 2 0 . 3 0 6-Q(NCRB1BW15, 20, 30) Include marka Auto Switch Compatible Type NCDRBIBWUi0. 15 NCDRB1BWU20.30 s*nci' u"it { Adjustable rotation{ *or"t "aru"ro. { With Auto Switch Appendix How To Set Rotation Time Ust@: Stable Rotation Time Regulation

Coolant Valve

SGC SGH Large valve capacity VNC VNC Av factor 30 x 10-6 to 1600 x 10-6 (VNC1 to VNC7) Cv factor 49 to 100 (VNC8 to VNC9) VNH VND VCC TQ 617 Coolant Valve: Air Operated/External Pilot Solenoid VNC Series [Option] Note) CE-compliant: For D or DZ only How to Order Thread type Seal material Bracket (Valve size: 1/2/3/4) A B Rc G NPT NPTF Nil F N T NBR seals FKM seals None With bracket (VN-16

ITV

12 114 Rc(PT) 1/2 35.7 Exhaust port OUT 2 SUP (1) OUT (2) EXH (3) 22 8 25 Flat bracket P3020114 (optional) 2-Rc(PT) 1/4, 3/8, 1/2 m36 Port size 4-M5 X 0.8 thread depth 6mm through Mounting hole G OUT 2 30 25 22 R3.5 15 25 m36 7 (10) 30 L-bracket INI-398-0-6 (optional) 2-Rc(PT) 1/4, 3/8, 1/2 (7) 36 SUP port, OUT port 1.12-8 Series ITV2000/3000 Made to Order Specifications Contact SMC regarding

Precision Cylinder Series MTS

241 181 377 283 0.7 35 26 79 59 141 105 220 165 343 251 563 422 879 659 0.6 30 22 68 50 121 90 188 141 294 215 482 362 754 565 0.5 25 19 57 42 101 75 157 118 245 179 402 302 628 471 8 5, 10, 15, 20, 25, 30 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 50 37 113 84 201 150 314 235 490 358 804 603 1,256 942 8 12, 16 25, 50, 75, 100 25, 50, 75, 100, 125, 150, 175, 200 12 20, 25, 32, 40 16