High Vacuum L Type Valve AS568-030-XN1 Note2) Refer to Chapter 4, Construction and Dimensions" (P. 10) for the part indication numbers.
LVN Port P TI/ TIL Port P Port P PA Port A PAX Port A Port A PB Normally open (N. O.) Port P Port P Port P Model Manifold base model Individual port Rc VVXA211-stations Common port Rc Port A 1 8 1 4 3 8 1 8 1 4 VVXA212-stations VVXA221-stations VVXA222-stations Manifold Manifold Stations B mount 2 to 10 stations 17-3-97 The VX series will be revised shortly.
to 6000 L/min 120 to 12000 L/min Instantaneous flow 30 to 3150 L/min 60 to 6300 L/min 120 to 12600 L/min Set point range Accumulated flow 0 to 999,999,999,990 L 0 to 999,999,999,900 L Flow specifications Instantaneous flow 2 L/min 5 L/min 10 L/min Minimum resolution Accumulated flow 10 L 100 L Accumulated volume per pulse (Pulse width = 50 msec.)
MXS8 (L) MXS12 (L) MXS16 (L) MXS20 (L) MXS25 (L) 10 5 30 13+0.15S 180 155 115 100 80 -X 15 35 9 45 40 40 26+0.17S 410 285 235 190 160 150 30 50 20 60 80 90 43+0.21S 890 660 480 385 325 325 325 Individual -X 50 80 30 105 120 160 55+0.21S 1700 1370 1090 760 640 580 570 570 100 170 71 205 140 310 150+0.45S 3190 2670 2150 1630 1250 1100 1010 980 960 150 215 125 300 240 540 220+0.45S 4710
2.00 to -5.00 to -10.00 to Pressure spec. 1.000 kPa 2.00 kPa 5.00 kPa 10.00 kPa Display/Set pressure range -525 to 525 Pa -1.050 to -2.10 to -5.25 to -10.50 to 1.050 kPa 2.10 kPa 5.25 kPa 10.50 kPa Display/Min. setting unit 1 Pa 0.001 kPa 0.01 kPa 0.01 kPa 0.01 kPa Proof pressure 2.5 kPa 5 kPa 10 kPa 25 kPa 50 kPa Electrical Power supply voltage 12 to 24 VDC (10%), and power supply ripple (p-p
fitting Needle Valve/Flow Characteristics ASP330F ASP430F 400 200 3 6 Flow rate (l/min (ANR)) Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) 300 06 07,08,09 2 4 200 100 1 2 100 0 0 0 5 10 0 5 10 Number of needle rotations Number of needle rotations ASP530F ASP630F 1500 1000 14 Flow rate (l/min (ANR)) Inlet pressure : 0.5
less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L]
S 1 0.53 28 2.511 48 418 6.531.5 6.531.5 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW KFNW KDN SUS316L,SUS304,FKM 2 MPa G 0.40.7[ ] 46 200 360 660 1350 3000 5150 3 3 cm O.5MPa 2.5 12 15.5 30 42 54 54 M5 Rc1/8 Rc1/4 [kg] 0.5 1.2 1.8 3.4 5.6 11.5 20 1 2 [Y-VAC2] 5 3 1 1mm 32 L/SP=0.1MPa 30 6 P11) 28 XLD-100 XLD-160 L/s () P=0.1MPa 26 24 22 20 XLD-63 XLD-80 18 16 14 XLD-50 12 10
[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less
[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less
Supply pilot air higher than 0.25 MPa to P1 port Piping Inlet side (supply side): P port, Outlet side (exhaust side): A port Supply pilot air higher than 0.25 MPa to P1 port. PA VNH 12(P1) 12(P1) Nozzle 2(A) 1(P) PAX Nozzle 1(P) 2(A) 3(B) Stop valve Tank Coolant pump PB Tank Coolant pump For reducing load to pump, coolant liquid is returned from B port to tank each time.
For manifold type 31, S31, 32, S32 Body option 5 port 3: Common exhaust type for main and pilot valve 0: Pilot valve individual exhaust for the pilot valve (With gasket and screws) D: Push-turn locking slotted type M5: With M5 port sub-plate For sub-plate, manifold type 41, S41, 46, S46 R port P, E port R port P, E port Electrical entry 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC 24, 12, 6,
For sub-plate type, manifold type 41, S41, 42, S42, 42R, S42R (With gasket and screws) Body option Nil: Individual pilot exhaust type Electrical entry Manual override 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC Nil: Non-locking push type Grommet L plug connector M plug connector M8 connector R port P, E port G: Lead wire length 300 mm L: With lead wire (Length 300 mm) M
), Vacuum Pressure Switch Lead Wire: G [Lead Wire (2m) w/Connector (w/Connector Cover)], Check Valve: None, Fitting (V Port): 0 [w/o Fitting (M5 x 0.8)], Fitting (P Port): 0 [w/o Fitting (M5 x 0.8)]
A Dimensions COM 16 KQ2 06-M5 HLT SY Operator Setting 16 KQ2H/L07-M5 This operation manual is intended for those who have knowledge of machinery using pneumatic equipment, and have sufficient knowledge of assembly, operation and maintenance of such equipment. Only those persons are allowed to perform assembly, operation and maintenance.
Size: 3 (3 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: M5, A Side Port Size: M5, Knob Color: 2 Port Valve: Gray/3 Port Valve: Blue; w/Exception of P Port 11F and A Port 11F/36S Valve Gray, Bracket: L (L Bracket)
Size: 2 (2 Port Valve), Handle Prevention: A (w/Handle Prevention Function), P Side Port Size: M5, A Side Port Size: M5, Knob Color: 2 Port Valve: Gray/3 Port Valve: Blue; w/Exception of P Port 11F and A Port 11F/36S Valve Gray, Bracket: L (L Bracket)
Pressure Sensor Series PSE530 How to Order PSE53 0 M5 Sensor range Option None 0 1 2 3 Positive pressure [0 to 1 MPa] Vacuum [0 to 101 kPa] Low pressure [0 to 101 kPa] Compound pressure [101 to 101 kPa] Nil Port size Sensor cable (3 m) M5 R06 R07 M5 x 0.8 6 reducer 1/4 inch reducer L ZSE ISE Option ZSP Connector for pressure sensor controller (1 pc.) + Sensor cable (3 m) Description Part
(MPa) 0.4MPa Discharge flow rate (l/min) SUP = 0.5MPa 0.3 0.3MPa SUP = 0.5MPa 150 10 0.4MPa SUP = 0.5MPa 0.2MPa 0.4MPa 0.2 100 0.3MPa 0.3MPa 5 0.2MPa 0.1 50 0.2MPa 00 5 10 00 5 10 15 00 50 100 150 Flow rate (l/min) Air consumption (l/min [ANR]) Operating cycle (Hz) 4 Series PA3000 Dimensions PAm331m-m03 152 4-7 64 2-M5 with depth 8 139 10 10 120 95 Bottom view without foot SUP (P1) Rc,