VXA21/22

OUT Standard specification Option Note) Water (Standard, up to 40C) Air (Standard, Dry) Turbine oil Vacuum (up to 1.3 x102 Pa) Carbon dioxide (CO2), Nitrogen gas (N2) Vacuum (up to 1.3 x101 Pa) (V, M) Non-leak (106 Pa m3/s or less) (V, M) IN N.O.

MQQ

G5-S CV MVGQ CC RB J D-X 20Data 10-5-19 19 Series MQM Dimensions Basic style: MQMLB 6 Mounting nut M12 x 1 Rod end nut 2-M5 x 0.8 15 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7

MQQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-5-1 2 Low Friction Cylinder Application Example (Metal Seal Type) Series MQQ Series MQQ Pressure control with fine pressure variations Low breakaway pressure Low

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Formula (2) Effective inside diameter of piping Fluid flow velocity (m/s) Fluid volume (l/min) Effective inside diameter of piping (mm) V: Q: din: Fluid flow velocity Formula (3) din x 10__ 4 V = Q 1 ___ 60 Rubber hose 5m/s Steel piping 4.5m/s 600 General range of rubber hose (max. 5m/s) Cylinder bore size 160 500 General range of steel pipe (max. 4.5m/s) 11/2"(38.1) Rubber hose 400 Cylinder

High Power Cylinder Series RHC

or less B54 B64 100V, 200V Relay, PLC RHC 200 V or less C73C C80C 12V RZQ Connector 2-wire 24V IC circuit 24 V or less A33 A34 A44 B59W PLC Terminal conduit 100V, 200V Relay, PLC DIN terminal DGrommet Diagnostic indication (2-color indication) Solid state auto switches marked with are produced upon receipt of order.

Vacuum Gripper

TQ1230001-OM105-A 6.2 Change to 1 cup (without flange) *No mesh in the vacuum (V) port. If the mesh is necessary in the vacuum (V) port, use the vacuum gripper with cup mounting flange. 1. Disassemble the cup mounting flange (1) Loosen the bolt (M6x10), then remove the cup mounting flange. Be careful not to lose the O-ring. (2) Remove the parallel pin. Completion drawing 2.

Vacuum Gripper

TQ1230001-OM102-B 6.2 Change to 1 cup (without flange) *No mesh in the vacuum (V) port. If the mesh is necessary in the vacuum (V) port, use the vacuum gripper with cup mounting flange. 1. Removal of the cup mounting flange (1) Loosen the bolt (M6 x 10), then remove the cup mounting flange. Be careful not to lose the O-ring. (2) Remove the parallel pin. 2.

Compact Cylinder with Air Cushion Series RQ

YU-03 RS M W T2 V J E T1 B 2-D through K ( across flats) 2-O counter bore Joint H (with locking) d2 d1 mm Bore size (mm) B D E J M O Part no. L UT C UA 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 12 9 32 11 42 14.5, depth 8.5 YB-05 50 mm Part no. Applicable bore size (mm) UA C d1 d2 H K L UT Weight (g) Weight (g) Bore size (mm) T1 T2 V W RS Part no.

VEX1

3.9 4.0 Effective area 33 Air operated Solenoid 0.1 0.2 0.2 0.3 0.4 0.5 1.3 1.4 1.9 2.0 Weight (kg) Solenoid Specifications Air operated VEX1101, 1201, 1301 VEX1501, 1701, 1901 VK334VO307Pilot valve Model Grommet, DlN connector Grommet, Grommet terminal, Conduit terminal, DIN connector Electrical entry 100V, 110V, 200V, 220V, 240V 6V, 12V, 24V, 48V 10% of rated voltage Coil rated voltage V

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

Fluid Name and Option Option symbol and body material Fluid (Application) Brass B Stainless steel J J H H Q P M H M M P Ethyl alcohol Caustic soda (25% ) Gas oil Silicon oil Steam system (Steam) (Max. 183C) Steam system (Condensation) (Max. 99C) Medium vacuum (up to 0.1 Pa.abs) Parachloroethylene Helium Non-leak (10 6Pam 3/s) Heated water (Max. 99C) A A S E V A V V E Note 1) The leakage

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

Series VCL

J L Bracket part no.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

J L Bracket part no.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Q) 2-P one-touch fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5

Platform Cylinder Series CXT

Auto switch mounting brackets BQ2-012 are not used for sizes over 32 of DA9(V)/M9(V)/M9W(V)/M9A(V)L types. The above values indicate the operating range when mounted with the conventional auto switch installation groove. Individual -X 531 Series CXT Auto Switch Mounting Bracket: Part No.

Compact Manifold Regulator

(With NPN output) 1 V or less (With load current of 80 mA) 1 s (0.25, 0.5, 2, 3 selections) Yes 1% F.S.

MRQB-OM0002

E1 2 I E[J]I[kg][rad/s] Imr m[kg] rm 5.1 19 I I I I kg kg kg kg m m m m 2 2 2 2 m: m: m: m: kg kg kg kg b 20 5-2. 5.1 5.1 32 0.023[J] 40 0.028[J] 2 t [rad]t[s] E E1 2 I t E 2 I t E[J][rad]I[kg] 2 t (1) t = & (2) C C t 2 1 tdt 2 + = = & & t=0 =0C=0 t 2 1 t 2 1 2 = = & t 2 = 21 5-3.

High Vacuum L Type Valve

As this product has pressure balanced construction, the exhausting direction is free. 8 XL*-OMI0013-B 5.Dimensions 26 41 K J 72 53010 OPERATION INPUT K J V L C B 39 C B 69 XLS-**-P*G (with control power supply) XLS-**-P*G () L G1/2 D XLS-**-** (without control power supply) DIN terminal (D) DIN( D ) XLS-**-** () E D F K2 J L 27010 J M 29010 J K 33 25 G1/2 G1/2 C G C C B B B A A Terminal (

VVXA21/22

Note 2) Value on option V (Non-leak, Vacuum).

VCC

Manifold C C 1 V V V C C 1 0 0 Valve Specification Sheet Fill in the symbol for stainless steel fitting. For others, mark necessary items with a circle.