FILTER REGULATOR

AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.

Two Hand Control Valve

0 P1(11) port u R(4) Exhaust port r !5 o !7 A(2) port P2(12) port w !2 !6 !4 !

Pressure Sensor

M3 M5 01 N01 R04 R06 IM5 IM5H M5 female M5 female Port size M3x0.5 M5x0.8 R1/8 NPT1/8 M5x0.8 4 6 thread, thread, through M5x0.8 reducer reducer through type (with type mounting hole) Case Resin case: PBT Fitting: C3604BD PBT Resin case: PBT Resin case: PBT Fitting: SUS303 Fitting: A6063S-T5 Material Pressure sensing section Pressure sensor: Silicon, O-ring: NBR Oil resistance vinyl cabtyre

XL-OMY0001

R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz Greene, Tweed Technologies, Inc.

VFR2000 Series

For 3-position exhaust center valve or single acting cylinder, take appropriate measures to prevent malfunction by using it with an individual EXH spacer assembly(VVFS2000-R-01-1,2 or VVFS2000-R-02-1,2). 5.

VFR2000-OMM0001

01-1,2 VVFS2000-R-02-1,2) ( ) ( ) 3 1 DC 3 () -4No.VFR2000-OMM0001 5 5 5 5 0.1 2 C-R () C-R DC 3% AC 20% (SSR )AC 1) (C-R )OFF 2)() ZNR 1V -10 -5No.VFR2000-OMM0001 5 5 5 5 1.5~2 1) 2)1 ()ISO VG32 MSDS 3)2 ()ISO VG32 M5 1/61/4 1.5Nm Rc Rc1/8 79 Rc1/4 1214 -6No.VFR2000-OMM0001 5 5 5 5 ( ( ( ( ) ) ) ) 5m 3 30 () 1 VG32 2 ()ISO VG32 -7No.VFR2000-OMM0001 G : DC +(+)(-) E T D Y

VP(A)300/500/700 Series (PILOT VALVE : V200)

Reduce the amount of oil so that the oil does not scatter from air exhaust port[3(R) port*, PE port]. * 1(P) port, in case of body ported N.O type. Check voltage. Replace valve (pilot valve). Replace valve (pilot valve). Protect the valve so that water does not splash the coil.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

/3110 Manifold Specifications Specifications Manifold type Max. number of stations B mount 10 stations Port location/Port size P A E P A E Port direction Applicable valve model Exhaust type Side Side Side Side Bottom Side VS3114-00 Base Base Base Common 1 4 3 8 3 8 Accessory AXT338-17A Blanking plate (With gaskets and screw) How to order manifold VVS31 1 0 05 Courtesy of Steven Engineering

Digital Pressure Switch

X578 X579 X580 Rated pressure range 500 Pa 1.000 kPa 2.00 kPa 5.00 kPa 10.00 kPa Set pressure range (Refer to page 60) 525 Pa 1.050 kPa 2.10 kPa 5.25 kPa 10.50 MPa Withstand pressure 2.5 kPa 5 kPa 10 kPa 25 kPa 50 kPa Smallest settable increment 1 Pa 0.001 kPa 0.01 kPa 0.01 kPa 0.01 kPa Applicable fluid Air, inert gases and incombustible gases Power supply voltage 12 to 24 VDC 10%, ripple (p-p

CC

The speed will be approximately 1.4 times the date given on p.4.12-3.

MXQ

With end lock (R) Functional option Axial piping type (P) For details of adjuster and functional option, refer to pages 94 and 95 in Option Specifications.

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Air Slide Table Series MXQ

With end lock (R) Functional option Axial piping type (P) For detailed specifications of adjuster options and functional options, refer to option specifications on pages 3 and 4. Standard Strokes Order Made Order Made Specifications Model Standard stroke (mm) For order made specifications of series MXQ, refer to page 42.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEF How to Order LEJ 11 Vacuum type LEJS 11 40 S2 A 500 H LEL Clean series q w e r y u i o !0 !

Ｍ agnet Gripper Unit for Collaborative Robots

Refer to P.18 for assembling method. PNP output M8 8 Pin connector(Plug) PIN No.

•

SImA, rma l vollaQl9"IV ()( less ZSE4B-~: -26 Vacuum Analog output 1-5V( S%F S.I. load lq>edaoc:e: IkO ZSE4B -~: -65 P NP output PNP open co~ eclor MmA ISE4LB~i -25 Posilive pressure NPN output NPN0)J (l OJi eclGf 30V. 8rhA, resma l vol tage'!

How to Order

(For type 20 manifold) M 1 SYJ3 2 5 M M3 10 Body ported M 1 SYJ3 4 5 M 10 Base mounted CE-compliant Clean series Port size Nil Q CE-compliant 3 port Nil: Without sub-plate M5: M5 port With sub-plate Note) CE-compliant: For DC only.

10-SYJ3000

locking slotted type Coil type M5: With M5 port sub-plate Nil Standard With power saving circuit T For sub-plate, type 41, S41, 46, S46 manifold (24, 12 VDC only) Power saving circuit is not available for W type.

IZx-OMR0035

with Power supply cable (3m) B with Bracket Z with Power supply cable (10m) Q with AC adapter (with AC cord) R with AC adapter (without AC cord) N None IZF NT Model 21 For IZF21 31 For IZF31 IZS41 C Power supply cable P Power supply cable (3m) PZ Power supply cable (10m) Made to Order How to Order Contents/Specifications IZS41 CP-X13 Power supply cable length Made to order power supply

VPA4

M4 x 0.7 x 41 VPA544 VP500-17-1 Series Thread type VP500-24-3 M5 x 0.8 x 50 3 5 7 P F N T VPA344 VPA544 VPA744 Rc G NPT NPTF VPA744 VP700-17-1 VP700-24-1 Caution Port size Mounting screw tightening torques VPA344 1/8 1/4 VPA544 1/4 3/8 VPA744 3/8 1/2 Symbol 1 2 M3: 0.6 Nm M4: 1.4 Nm M5: 2.9 Nm 5-3-26 3 Dimensions VPA4150-Bottom ported SA VA SA 4-Rc 1/8 pilot port (5-Rc 3/8, 1/2) 4-9 mounting