5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

0.15 0.13 0.24 0.24 0.23 0.25 0.18 0.13 0.31 0.22 0.22 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 3.7 3.7 3.9 3.7 3.7 3.9 4.0 4.1 4.1 3.8 3.8 4.2 3.7 3.9 4.6 15 19 20 15 19 20 14 16 16 14 16 17 14 16 17 9.0 9.0 9.0 VFS5600 VFS5110 VFS5100 1 2 3 4 0.88 Single 600 45 or less 2 position 3 position 3 8 Double VFS5210 VFS5200 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2

Vacuum System Peripherals:

2 to 10 stations Both sides D side D B Double wiring specifications 08 2 to 16 stations 8 SUP/EXH block assembly specifications 09 9 Can accommodate up to 17 solenoids.

Mechanically Jointed Rodless Cylinder Series MY2

14 15 54 22 50 51 52 53 Qty. 1 1 2 2 2 2 2 4 MY16-16AStroke MY2H16-16BStroke 4 x 1.8 x 1.1 D-X MY2B16-PS MY2B25-PS MY1B40-PS Individual -X Seal kit includes @2, %0, %1, %2 and %3.

Mini Free Mount Cylinder

Grease part no.: GR-L-005 (5 g) 11 Resin Damper B 12 Steel wire Nickel plated Rod end nut 13 NBR Piston seal 14 NBR Rod seal 15 NBR O-ring 14 Series CUJ Dimensions: 12, 16, 20 Double Acting; Single Acting, Spring Return Lateral Mounting Without Magnet: CUJB 2 x P (Port size) N Element (for 12, 16) Plug (for 20) NN GB GA Width across flats V K C J R D H 2 x Q 2 x 2 x QA F + Stroke E (E) B

7ND9071en

Valve series MBV QMBV 1) Valve size T5, QT5 QXT5 T25, QT25 QXT25 R, QR E RSOFT 3) FL MBV QMBV 2) D, P, C 4) ZX mm in Dead angle, % 15 1/2 15 20 3/4 15 25 1 14 25.5 19.5 15 25.5 27 12.5 25/1 1/1 11 25/2 1/2 11 25/3 1/3 10 40 1 1/2 12 24.5 12.5 12 16 21 12.5 50 2 10 9 13.5 24.5 12.5 18 8 17 20.5 23 12.5 65 2 1/2 9 13 18 80 3 10 8 12 18 8 16.5 8.5 9 8.5 15.5 100 4 10 8 12 16.5 8.5 16 9 8 7 14.5

e

L-bracket / MYE-LB (Option) 87.3 22.5 Hexagon socket head cap screw (accessory) 2 25 60 (67) M5 x 8 2 pcs. 60 58 28 7 2 x 5.5 Round head combination screw (accessory) DIN rail bracket / MYE-DB (Option) M4 x 10 1 pc. 87.3 4.3 11 35.5 22 (7.5) (11.8) 73.6 (74.5) Round head Phillips screw (accessory) 21 M3 x 6.5 2 pcs. 42 1130 e-Rodless Actuator Linear Guide Type / Nominal Size: 16, 25 Series

MY1

x 3 x 1.05) (7.15 x 3.75 x 1.7) (8.3 x 4.5 x 1.9) Side seal assembly Scraper Piston seal Cushion seal Tube gasket O-ring 2 2 2 2 2 4 MYMK-20-Stroke MYMK-25-Stroke MYMK-32-Stroke MYMK-40-Stroke MYMK-16-Stroke 20 14 15 MY1M63-PS MY1M50-PS MY1M40-PS MY1M20-PS MY1M25-PS MY1M32-PS MY1M16-PS 16 17 19 Note) Two kinds of dust seal bands are available.

Sine Rodless Cylinder Series REA/REB

: 2 pcs.

Programless Controller Series LECP1

Produced upon receipt of order (Robotic cable only) Connector A B1 (Terminal no.) 1 2 5 6 A1 (14) (18) (17.7) (10.2) A6 B1 B3 A1 A3 B6 (13.5) With lock and sensor 1 2 15 16 Connector B Connector D (30.7) L (11) (14.7) Cable type (10) Connector A terminal no. B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no.

Environment

How to Order 25A-LEY 16 100 B C 1 1 6N S Series compatible with secondary batteries q w e r t y u i o !0 !1 !2 !

CJ5-S

10-14-16 17 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height Series CJ5-S D-H7BAL HS SMC SMC 16 29 A B RE A B Operating Range Minimum Stroke for Auto Switch Mounting REC Basic style, Foot style, Flange style, Clevis style Mounting bracket Bore size (mm) 10 Auto switch model CX 5 16 1 (Rod cover side) 2 (Different sides) 2 (Same side) Number of auto

CJ5-S

10-14-16 17 Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height Series CJ5-S D-H7BAL HS SMC SMC 16 29 A B RE A B Operating Range Minimum Stroke for Auto Switch Mounting REC Basic style, Foot style, Flange style, Clevis style Mounting bracket Bore size (mm) 10 Auto switch model CX 5 16 1 (Rod cover side) 2 (Different sides) 2 (Same side) Number of auto

CJ2X/CUX/CQSX/CQ2X/CM2X

REC 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size 7 12 Air flow (l/min (ANR)) 38 Controlled flow CX 0.1 0.2 Effective area (mm2) 0.6 CY 100 180 230 260 390 460 Flow rate (l/min (ANR)) Free flow 1.5 2.7 3.5 4 6 7 Effective area (mm2) MQQ M Note) Supply pressure: 0.5 MPa, Temperature: 20C In-line Type RHC Air Flow/Effective Area MK(2) AS2001FM

CJ2X/CUX/CQSX/CQ2X/CM2X

2 pcs. 1 pc. n pcs.

SI Unit for Vacuum Manifold

Vendor defined parameters Index(dec) Subindex Access Parameter name Size[byte] Data Storage Section 0x0040(64) 1...16 R/W Pressure P1 2 Y 3.4.1 0x0041(65) 1...16 R/W Hysteresis H1 2 Y 3.4.2 0x0042(66) 1...16 R/W Pressure P2 2 Y 3.4.3 0x0043(67) 1...16 R/W Hysteresis H2 2 Y 3.4.4 0x0044(68) 1...16 R/W Pressure P3 2 Y 3.4.5 0x0045(69) 1...16 R/W Hysteresis H3 2 Y 3.4.6 0x0046(70) 1...16 R/W

Table of Contents

Refer to the attachment table on page 14-2-12 or 14-2-16 for standard bypass port sizes applicable to AC.

AS-FG/ASD-FG

Flow Rate and Effective Area AS1001FG AS2001FG AS2051FG AS3001FG AS4001FG Model 6 8 10 12 4 6 6 8 10 3.2 12 4 Metric size 6 Tube O.D. 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 3/16" 1/4" 1/8" Inch size 1/4" 5/16" 5/32" 3/16" l/min (ANR) Flow rate Controlled (Free) flow 100 130 230 290 460 420 660 920 1050 1390 1.5 2 3.5 4.5 7 6.5 10 14 16 21 Effective area mm Note) Flow rate values are at a pressure

Electric Actuators

(A contact) 1 2 1 pc. 2 pcs. 6 6 pcs.

51

2 2 2 2 2 3 3 6 7 7.5 7.5 12 12 16 16 5 6 6 8 11 11 13 16 26 31 38 47 58 72 89 110 M4 x 0.7 depth 7 Width across flats 6 length 3.5 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 24 M5 x 0.8 M5 x 0.8 Rc1/8 Rc1/8 Rc1/4 Rc1/4 Rc1/4 Rc3/8 14.5 17.5 17.5 23.5 29 29 35.5 35.5 57 60 62 62 84 84 104 105 Up to 300 M5 x 0.8 depth 7.5 Width across flats 8 length 3.5

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

size (mm) Stroke range (mm) N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA P O A 75, 100 125, 150 200, 250 300 63 100 66 180 135 117 65 228 60 M12 234 135 12 14 180 158 250 228 25 25 M12 x 1.75 depth 23 Rc 1/4 Rc 3/8 Rc 1/2 200 80 115 76 214 160 138 75 262 70 M12 268 155 16 14 200 178 284 262 27 30 M12 x 1.75 depth 28 230 100 125 80 245 190 153 85 304 80 M14 310 175 16 16 226 200 326 300