Vacuum

1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR Series ZPT Serles ZPY eAdaplor oAdaptor

Vacuum

1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR Series ZPT Serles ZPY eAdaplor oAdaptor

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

CG5-S

R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 6 6 8 8 10 10 12 12 16 16 KGS Extended Male Elbow KGW Hexagon Socket Head Male Connector Applicable tubing O.D.

EXxx-OMZ0016

Signal M12, 4-pin, plug B code 1 24V (US1) 2 N.C. 3 0V (US1) 4 N.C. Caution Note that connecting the power cable to BUS IN or BUS OUT will damage the product. BUS IN / BUS OUT connectors BUS IN BUS OUT No. Signal M12, 4-pin, plug Signal M12, 5-pin , socket No. A code A code 1 SLD 1 SLD 2 DB 2 DB 3 DG 3 DG 4 DA 4 DA 5 N.C.

JXCx-OMT0061CN

4 3 2 1 5 4 3 2 1 1 DA CC-Link A 2 DB CC-Link B 3 DG CC-Link 4 SLD CC-Link T 5 FG 70 - 16

Auto Switch Guide

PC Connector model M83 pin M84 pin M124 pin 1 2 1 4 Pin arrangement 1 2 Solid state switch Standard part no. 3 4 4 3 3 For the applicable auto switch model, refer to the table below.

Series PF2W Digital Flow Switch For Water

(In case of output OUT2, n_1, 2 to be n_3, 4 and P_1, 2 to be P_3, 4.)

Series AP500

) Connections 1/2, 3/4 inch face seal, 1/2, 3/4 inch tube weld 3.

HRX-OM-R028

specification.3-1 3.3 Connected explanation .3-2 Chapter 4 MODBUS communication function. 4-1 4.1 Precautions for communication .4-1 4.1.1 Precautions after wiring and before communication . 4-1 4.1.2 Precautions for communicating . 4-2 4.2 Communication specification.4-2 4.3 Setting and checking.4-3 4.3.1 Setting and checking items. 4-3 4.3.2 Setting and checking . 4-4 4.4 Communication

VZS

Side 4(A), 2(B) D side 1 16 VS4 16 stations Max. 16 stations.

CQS

2, !3, !4.

Flow Control Equipment

/ 1 8, / 1 4 / 3 8 / 1 2 In-line M3/M5 / 1 8, / 1 4 / 1 4, / 3 8 2.5 to 25 20 to 40 32 to 63 32 to 63 40 to 100 40 to 100 AS1000 AS2000 AS3000 AS3500 AS4000 AS5000 4.1-23 / 1 4, / 3 8 / 1 4, / 3 8, / 1 2 / 1 4, / 3 8, / 1 2 63 to 125 1 40 to 200 160 to 250 300 300 AS420 AS500 AS600 AS800 AS900 / 1 4, / 3 8, / 1 2 / 3 4 4.1-27 1 / 11 4 / 1 2 1 2, 4.0-1 Applicable tube O.D Applicable cylinder

CXS

screw) 2-R3.5 1 15 12 1 35 0.2 0.2 33.6 20 35 46 44 35 6.3 5 2-M3 x 0.5 x 10 (Hexagon socket head cap screw) 12 2-R3.5 7.5 2-M4 x 0.7 x 14.5 (Hexagon head bolt) 2-M4 x 0.7 (Hexagon nut) 4-M3 x 0.5 with depth 5 4-M4 x 0.7 (Through) (Z) (20) 20 4-M3 x 0.5 with depth 4.5 5 7 8.5 (mm) 2-5.1 7 Model Z ZZ SS S 10 30 30 92 136 52 CXSW10-10 Standard stroke Long stroke (-XB1 1) 4-M5 x 0.8 with depth

MNB

5 @4!8 @0!7 !9i @2 q r @8#9 $0 $2 w $3 #8 @9 A C B !3 !4 #4 $1 e$8 o $7 !1@1 !6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

•

El 4 5 g ZPY2O!' 20 23 14 ZPY25l' 2$; 2&~ 14' 24 24 2<5 42 4 1.7 ZPY02U 2 2.~ 1.2 G.8 N4(::,"') 13.5 5 1.8 .Z!'Yo4l!; ZPY06U N4(~ 1 42 5 6 8 II 1 ,ll!: 145 5 1.8 4 4.8 is j ,. , 42.5 4.5 2.3 811(:t"' < 7 ;.8/4 , 1 1 6.5 M ' (mm) 6 7 2.5 r9# 1 < Ns(",,:"...) oe.4 1 5.5 7 2.5 ZJri'Otl 8 ,1\ ZPY32~ 32 35 14.5 Deep type I r.sXI 1., . "" , 1: t.i5 XQ! 'I U4!"'

VZ100/300/500

Internal pilot Series VZ100 Series VZ300 Series VZ500 4-6-2 3 Series VZ100/300/500 Precautions Be sure to read before handling.

VCC

VCC Series Dimensions Manifold Pilot port C4: 4 One-touch fitting C6: 6 One-touch fitting G1/4 (RETURN port) G1/4 (IN port) VV2CC1 VVMCC1, VV3CC1 30 31 0.5 to 2 0.5 to 2 10 10 20 G1/4 OUT port 0.5 to 2 0.5 to 2 20 G1/4 OUT port n-1 9 7 5 3 1 122.2 <124.2> 142.2 <144.2> 142.2 <144.2> 120 122.2 <124.2> 100 22.6 100 120 80 25 75 50 n 1 0 8 6 4 2 50 67.5 <69.5> L1 8 67.5 <69.5> 64.9 L2 4 x 9

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

2 !3 !4 !5 !

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.