IDX-OM-Z004

. i-8 1 1.1 . 1-1 1.2 . 1-2 1.2.1 C . 1-2 1.2.2 G . 1-2 1.2.3 K . 1-2 1.2.4 P . 1-2 1.2.5 R . 1-2 1.2.6 V . 1-2 1.2.7 . 1-2 1.2.7 . 1-2 1.3. . 1-3 2.1 . 2-1 2.2 . 2-2 2.2.1 . 2-2 2.2.2 . 2-3 2.2.3 . 2-4 2.2.4 . 2-4 2.2.5 . 2-5 2.2.6 . 2-6 1 IDX-OM-Z004 2.2.7 . 2-7 2.3 . 2-9 2.3.1 . 2-9 2.4 . 2-9 3 / 3.1 . 3-1 3.2 . 3-1 3.3 . 3-2 3.4 . 3-2 3.5 . 3-2 3.6 . 3-3

FREE MOUNT CYLINDER

Also, if pipe tape is used, leave 1.5 to 2 thread ridges exposed at the end of the threads. 8/10 2-10 Precautions 2-8 Maintenance ! Caution ! Warning Do not place your fingers in the clearance between the non-rotating plate and the cylinder tube. Maintenance should be performed according to the procedure indicated in the Operating Manual.

Auto Drain Valve Longer life & Higher resistance to foreign matter

Description Material Color 1 Body Aluminum die-cast White 5 Diaphragm FKM 6 Main valve FKM Port size 3/8 and 1/2 Port size 3/8, 1/2 with V option 26 Bleed valve Replacement Parts No. Description Material Part no. 2 Element Nylon AD402P-040S 3 Bowl O-ring NBR KA00463 4 Bowl assembly1 See below. See below. Bowl Assembly Part Nos. Bowl material Bowl assembly part nos.

ASP

Metric size Inch size 06 08 10 12 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Universal Port size Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 With One-touch

HEC-OM-S019

Alarm b contact (CLOSE During Alarm) 10 Temperature Alarm Common 10 10m 02 2m 04 4m 06 6m N AC100V L AC100V 6-8 PT-RTD 5 Unused 9 Unused RS-485 Communication connector Note: Always use shielded cable connected to this connector. 6-9 Unused 3-4 Unused 3-5 Unused 1-3 Unused 12-14 Unused 1 BUS + 2 BUS 5 SG 4 FG 15 FG Power supply connector (IEC60320,C14) E PE HEA100 1 2 Specifications Continued

Vacuum Regulator Series IRV

50 2-Rc 1/8 Vacuum gauge port IRV3000 IRV3000 54 70 50 66 SMC P K U C S O H L 10.5 x 8.5 2-Rc 1/8 Vacuum gauge port Approx. 130 G 43 74 SET VAC SET Pad side Vacuum pump side 22 Approx. 68 Rc 1/2 2-Rc 1/4, 3/8, 1/2 Connection port 66 2

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 40 60 30 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N Note 2) F Note 3) Thread type Rc NPT G e + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 5) H Note 4) a Without mounting option

SJ1000/2000/3000 Series

at 8 locations.

Drain Separator for Vacuum Series AMJ 1

3/8 F Flow: Right Left R G 04 1/2 N If ordering two options or more, indicate symbols numerically and alphabetically.

Drain Separator for Vacuum Series AMJ

AMJ 30 0003 2R ZR ZM Body size Pressure gauge position 30 3/8 None Bracket Nil ZH 40 1/2 B Option 50 3/4 ZU Drain cock Nil Metal bowl 2 ZL Thread type Port size Nylon bowl 6 Drain guide (Rc 1/4) 02 1/4 Nil J Rc ZY 03 3/8 F Flow: Right Left R G 04 1/2 N If ordering two options or more, indicate symbols numerically and alphabetically.

AWM20 to AWM40

Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + H Mounting Without mounting option With bracket With set nut a Nil B Note 4) + Without auto drain Float type auto drain (N.C.)

DOC1003077

AL3 pump and fan If 0 is set, derivative control 4 0sec 2 3rd digit : Data length stop is disabled. When cleaning the panel, heat sink, filter use a vacuum cleaner to 7: 7 bit, 8: 8 bit High temp. alarm Internal temp. sensor value exceeds the high temp. cutoff temperature. 4th digit : BCC check Temp.control Turn ON Main power switch again remove the dust.

Exhaust Cleaner for Clean Rooms AMP Series

2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

ACG

Series ACG How to Order ACG 30 A 03 G1 Option Symbol Description Applicable model Body size Nil 1 2 3 6 8 C J N R ACG20 to 40 Port size Symbol (8) 0.02 to 0.2 MPa setting ACG20 to 40 20 30 40 1/8 Metal bowl ACG20 to 40 3/8 Lubricator with drain cock ACG20 to 40 1/2 Nylon bowl ACG30, 40 Metal bowl with level gauge ACG20 With bowl guard Model combination ACG20 to 40 (9) Filter case with drain

AR20-B to AR60-B

Standard Specications Model AR20-B AR25-B AR30-B AR40-B AR40-06-B AR50-B AR60-B Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Pressure gauge port size *1 1/8 Fluid Air Ambient and uid temperature *2 5 to 60C (with no freezing) Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Set pressure range 0.05 to 0.85 MPa Construction Relieving type Weight [kg] 0.16 0.21 0.29

V100

List part numbers of the installed valve and option in required station location separately under manifold part number. 4-2-7 8 Series V100 Common SUP/Common EXH Type S41 How to Order Applicable solenoid valve Note) VV100 S41 05 M5 V114V114AV124V124AStations 2 port size 02 M5 M5 x 0.8 2 stations 2 Applicable blank plate assembly V100-77-1A 1 20 20 stations 3 2 1 port M5 x 0.8 3 port M5 x

Air Suction Filter

type allows element replacement ZFB30 8, 10, 3/8" 75 Easily replaced filter element ZFB40 1/2" 100 ZFC 10 4, 5/32" ZFA ZFA IN/OUT straight piping ZFC5 In-line type 20 Easy installation and removal with One-touch fittings ZFB ZFB 6, 1/4" 30 ZFC ZFC 5 P.281 Light and compact molded resin parts 8, 5/16" 70 ZFC7 10, 3/8" 80 Easily replaced filter element 12 100 Note) Flow rate when initial

Process Pump

This may cause internal damage to the process pump or liquid leakage. 10 Specifications Model PA3310 PAP3310 Actuation Automatically operated Rc, NPT, G, NPTF 3/8" Female thread Main fluid suction discharge port Rc, NPT, G, NPTF 3/8" 3/8", 1/2" Tube extension Female thread With nut (size 3, 4, 5) 3/8", 1/2" Integrated fitting type Port size Pilot air supply/exhaust port Rc, NPT, G, NPTF 1

IR30-OM00013

PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 010. 2 M Pa M AD E I N J APAN So G No. o S o1 T P2 U Q3 V R4 W Z12 6- (1) Nm 1/4 3/8 1/2 12~14 22~24 28~30 (2) (3) (4) 7- (1) (2) (3) (4) (1) (2) (3) (1) (2) O 3 (3) 3 (4) P.5 0 (5) 0 8- (1) (2) (3) 21Nm (4) ON-OFF 5 79Nm (6) (7) (8) 0.5MPa 0.1MPa (9) AN Rc1/2 (1) (2) 9- (1) (2) 1.5~2 (1) 1 1.5 (2) (3) a b

Lubricator Series AL10 to 60

3 6 8 C R 3W Z Applicable model AL30 to 60 AL30 to 60 AL30 to 60 AL10 to 60 AL10 to 60 AL10 to 60 AL30 to 60 AL20 AL10 to 60 AL30 to 60 AL10 to 60 Body size F.R.L. 10 20 30 40 50 60 AV Thread type Metric thread (M5) Rc NPT G AU Nil AF N F AL20 Port size AR Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 (2) IR M5 01 02 03 04 06 10 Accessory When more than one specification