Stations: 02, A,B Port: 1/8, Thread: NPT

Stations: 07, A,B Port: 1/8, Thread: NPT

Stations: 09, A,B Port: 1/8, Thread: NPT

Stations: 10, A,B Port: 1/8, Thread: NPT

Stations: 11, A,B Port: 1/8, Thread: NPT

Stations: 14, A,B Port: 1/8, Thread: NPT

Air Cylinder Series CM2

45 45 50 PG 22 27 27 29 Z 37 41 41 45 PH 19.5 24 24 24 ZZ 181 195 197 233 PL 20 24 24 24 PW 38 41 41 41 N 15 15 15 NA 24 30 S 127 137 139 167 MM M8 x 1.25 Bore (mm) Bore (mm) 20 25 32 40 20 25 32 40 1 8 1 8 1 8 1 4 33.5 M26 x 1.5 M10 x 1.25 37.5 M26 x 1.5 M32 x 2 34.5 M10 x 1.25 46.5 M14 x 1.5 21.5 42.5 618 Series CLM2 Fine Lock Cylinder Double Acting, Single Rod Single Clevis Style (C)

Air Cylinder

5 8 28 5 6 M8 x 1.25 24 M20 x 1.5 1/8 62 37 116 25 22 19.5 40 17 32 37 10 26 0 0.033 13 10.5 7 4 60 75 8 45 6 8 33.5 5.5 8 M10 x 1.25 30 M26 x 1.5 1/8 62 41 120 32 22 19.5 40 17 32 37 12 26 0 0.033 13 10.5 7 4 60 75 8 45 6 8 37.5 5.5 10 M10 x 1.25 34.5 M26 x 1.5 1/8 64 41 122 40 24 21 52 22 41 47.3 14 32 0 0.039 16 13.5 7 5 66 36 82 11 50 8 10 46.5 7 12 M14 x 1.5 42.5 M32 x 2 1/4 88 45

Made to Order

series GB Stroke B Stroke A (mm) Bore size GB Q S ZZ 40 29 53 168 230 50 33 59 180 249 63 33 61 196 268 80 41 73 232 320 100 41 79 252 341 Q S + Stroke (A + B) ZZ + Stroke (A + B) CNA2 series Stroke A Stroke B GE (mm) Bore size GE S ZZ 40 29 237 299 50 33 258 327 63 33 280 352 80 41 334 422 100 41 372 461 ZZ + Stroke (A + B) S + Stroke (A + B) -X -X 1789 Made to Order Common Specifications

1

43.5 [17.5] 29.5 (41.5) 26.5 (38.5) 33.5 (45.5) 41 [15] 48 [22] 29 (41) 42 48 44.5 47.5 43.5 44 [18] Data R 63 48 43.5 [17.5] 29.5 (41.5) 26.5 (38.5) 33.5 (45.5) 41 [15] 48 [22] 29 (41) 49 55 51.5 54.5 50.5 44 [18] Y + Stroke [ ]: Denotes the locations for CDG1R. ( ): Denotes the value of long strokes.

CM2

8 75 60 4 7 18 13 37 34 8 62 15.5 13 26 30 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 116 20 0 0.033 25 45 8 75 60 4 7 22 13 41 40 10 62 19.5 17 32 37 6 8 33.5 5.5 M10 x 1.25 15 30 M26 x 1.5 120 1/8 26 0 0.033 32 45 8 75 60 4 7 22 13 41 40 12 64 19.5 17 32 37 6 8 37.5 5.5 M10 x 1.25 15 34.5 M26 x 1.5 122 1/8 26 0 0.039 40 50 11 82 36 66 5 7 24 16 45 52 14 88 21 22 41 47.3 8 10 46.5 7 M14

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

25 41 49 36 42.5 8 30 26 36 78 74 18 44.5 46 Inch Size Applicable tubing O.D.

Modular/F.R.L. Units Series AC

Body Size 21 31, 41 Description Metal Bowl Metal Bowl With Sight Glass Residual Pressure Relief Valve Symbol Nil V NPT Threads Applicable Model Combo All All Description Without Valve With Downstream Valve Port Size Symbol 02 03 04 Applicable Body Size 21 31 41 Port Size 1/4 3/8 1/2 Accessories Symbol Nil C D Applicable Body Size All 31, 41 31, 41 Description None Float Auto Drain (N.C.)

VQ5000

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

High Vacuum Angle Valve, XL Series

O After a few seconds at 10-6Torr 41

42

port 1/8" External pilot port 27.5 27.5 41 41 41 41 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3-position type. 495 Base Mounted Plug-in Unit VQ5000 Series [Option] Note) CE-compliant: For DC only.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

45 45 50 37 41 41 45 13 17 17 22 26 32 32 41 26 26 26 31 5 6 6 8 8 8 8 10 134 138 140 174 M8 x 1.25 M20 x 1.5 M10 x 1.25 M26 x 1.5 M10 x 1.25 M26 x 1.5 M32 x 2 M14 x 1.5 The bracket is shipped together.

SMC Pneumatic Clean Series

32 32 26 6 6 5 8 8 8 50 45 45 41 24 22 22 18 31 26 26 26 75 75 75 66 60 60 60 M26 x 1.5 M26 x 1.5 M20 x 1.5 174 140 138 134 17.5 17.5 19.5 15.5 35.5 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 45 41 41 35.5 26-0.033 0 17.5 19.5 35.5 32-0.039 0 21 82 36 10 8 M32 x 2 21.5 41.5 19 Air cylinder CM2 2122CM2/ 101110112122Head side flange style (G) / CM2G, CM2G With rubber bumper Standard

5 Port Solenoid Valve

194.8 (200.3) 91.7 121.8 213.5 2 105.8 4(A) port 17.5 105.8 59.5 13.5 2(B) port 13.5 (B port) (A port) 17.5 SMC 2 4 2 4 SMC A B A B 66 53 40 53 66 40 A B A B 1 3 5 14 12 14 5 1 3 12 35 53 2 x 6.5 Mounting hole 2 x 6.5 Mounting hole 53 35 Manual override Manual override 98 50 41 37 31.5 18 G1/2 Electrical entry PE X 31.5 37 41 50 162 G1/2 R1 R2 P 18.4 Electrical entry 1/8" PE. port 41 41 27.5