Compact

ST 5, 10 ST 5, 10 0.05 0.00 0 10 20 30 40 0.00 0 10 20 30 40 0.00 0 10 20 30 40 Load [N] Load [N] Load [N] MXZ25 MXZ25 MXZ25 0.25 0.40 0.25 ST 45, 50 ST 35, 40 ST 45, 50 ST 45, 50 Table displacement [mm] Table displacement [mm] Table displacement [mm] 0.35 0.20 0.20 ST 25, 30 0.30 ST 35, 40 ST 35, 40 0.25 0.15 0.15 ST 25, 30 ST 25, 30 0.20 0.10 0.10 0.15 ST 15, 20 0.10 0.05 0.05 ST 5, 10

AC Servo Motor Driver (CC-Link Type ）

50 20 9 15 9.

MXH Series Compact Slide

63.5 64.5 34 34 32 7 32 7 6 20 20 11 6 15 NS 15.5 52.5 + Stroke 68 + Stroke 32 4-M5 x 0.8 depth 8 10 + Stroke 15 20 Stroke (mm) LT NS LB J LA 5 20 64 4 10 10 20 10 64 4 15 74 25 20 4 20 74 25 4 20 25 40 84 4 30 30 40 30 84 4 40 20 94 50 20 6 50 104 70 25 6 25 60 70 114 6 30 30 36 Compact Slide MXH Series Auto Switch Specifications Auto Switches/Proper Mounting Position for Stroke

MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.

Modular F.R.L. Units

mA 100 VAC, DC: 20 mA IS10M-20-A IS10M-30-A IS10M-40-A IS10M-50-A Maximum operating current Separate spacers are required for modular unit.

Round Type Hydraulic Cylinder

A1 L1 R1 U1 NDH10 E1 MM NX Applicable bore size (mm) I-020B I-032B I-04A IA-04 A B C D E F M R Size Tolerance Note +0.027 0 +0.027 0 +0.027 0 +0.027 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 0.1 0.2 0.1 0.2 0.1 0.3 0.1 0.3 AD-FI-20 AD-FI-25 AD-FI-32 AD-FI-40 9 9 16 16 16 18 22 22 36 38 55 55 9 9 12 12 10 10 15.5 15.5 20 25 32 40 20 20 24 24 14 14 20 20 30 10 16 22 60 20 25 32 40 46 28 M8 x 1.25

PFxx-OMA1007

(Refer to page 40, 41) [EXA1-30] 10 to 1050 L/min [EXA1-30] 50 L/min Common Standby flow rate (Threshold) [EXA1-40] 20 to 2100 L/min [EXA1-40] 100 L/min Common [EXA1-60] 40 to 4200 L/min [EXA1-60] 200 L/min Common [EXA1-20] 0 to 520 L/min [EXA1-20] 50 L/min Common Sets the standby flow rate (hysteresis).

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

186 (230) CRA1BW80 6 0 0.030 CRA1BS80 1/4 92 72 70 20 3 50 5 142 22.5 23.5 12 12 18 20 15 25 20 167 19 35 40 M12 x 1.75 Depth 14 245 (311) CRA1BW100 CRA1BS100 3/8 112 85 85 25 4 60 5 172 28 25 12.5 12.5 18 25 19 30 25 202 24 40 45 8 0 0.036 For model with air cushion Single shaft with four chamfers: CRA1BX Double shaft key: CRA1BY Double shaft with four chamfers: CRA1BZ Note) Other dimensions

240

Dimensions [mm] Model L1 L2 A B C D E F G J LEPY10-25 138 150 20 22 30 29 20 29 39 LEPY10-50 163 175 24 43 34 50 24 50 60 LEPY10-75 198 210 30 72 40 79 30 79 89 LEPY10L-25 124 136 61.8 20 22 30 29 20 29 39 LEPY10L-50 149 161 24 43 34 50 24 50 60 LEPY10L-75 184 196 30 72 40 79 30 79 89 47.8 382 Step Motor (Servo/24 VDC) Electric Actuator/Miniature Slide Table Type LEPS Series Model Selection

Thermo-chiller

Polyester band Forklift insertion side Cardboard box 800 mm Less than 150 mm 300 mm or more or more Wooden skid Forklift insertion side Less than 150 mm Model Weight [kg] Dimensions [mm] HRLE050-A-20 150 Height 1320 x Width 580 x Depth 1240 HRLE050-W-20 143 HRLE090-A-20/40 176 HRLE090-W-20/40 170 300 mm or more 500 mm or more 2. Transporting with forklift 1.

Compact Slide Series MXH

0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph (6) Load Eccentricity 200 mm Graph (9) Load Eccentricity 200 mm Graph (12) Load Eccentricity 200 mm 1 10 10 0.1 Mass m (kg) 1 1 Mass m (kg) Mass m (kg) 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang

Compact and Lightweight

40 40 40 40 40 Suction flow rate 20 20 20 20 20 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 10 20 50 40 30 60 Supply pressure [MPa] 0 0 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 5 10 25 20 15 30 Supply pressure [MPa] Suction flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] ZH13SA ZH13LA Exhaust Characteristics Flow Rate Characteristics Exhaust Characteristics Flow Rate Characteristics 100 100

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Material Gasket Hexagon socket head screw Pilot valve assembly Sub-plate assembly 13 14 15 NBR Steel AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) Refer to How to Order Pilot Valve Assembly on page 1233.

Square Tube Type Air Cylinder Series MB1

Note) Pin, cotter pin and flat washer are included with the double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 12 16 19 24 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

186 (230) CRA1BW80 6 0 0.030 CRA1BS80 1/4 92 72 70 20 3 50 5 142 22.5 23.5 12 12 18 20 15 25 20 167 19 35 40 M12 x 1.75 Depth 14 245 (311) CRA1BW100 CRA1BS100 3/8 112 85 85 25 4 60 5 172 28 25 12.5 12.5 18 25 19 30 25 202 24 40 45 8 0 0.036 For model with air cushion Single shaft with four chamfers: CRA1BX Double shaft key: CRA1BY Double shaft with four chamfers: CRA1BZ Note) Other dimensions

MQQ

Action D Double acting Cylinder stroke (mm) Bore size (mm) Standard stroke (mm) Mounting style Bore size 10 10, 20, 30, 40 Through-hole/Both ends tapped common (Standard) Foot style Rod side flange style Head side flange style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100

MQQ

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

Rotary Table/Rack & Pinion Style Series MSQ

200 40 MSQA20 (High precision type) 20 0 10 20 30 40 50 12 10 8 6 4 2 0 Load N Load N MSQ30 MSQ3A MSQB30 (Basic type) 300 MSQB3A (Basic type) 100 250 Displacement m Displacement m 80 200 60 MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ50 MSQ7A MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement

7.5

Symbol Stations 02 20 20 2 stations 20 stations Specify the valve stations not exceeding the maximum stations. SUP/EXH block fitting spec.

15

moment (6 to 15) [Graph 11] Allowable moment (20 to 40) 20 200 CY1S40-Z 10 100 Moment M1, M3 [Nm] Moment M1, M3 [Nm] CY1S15-Z CY1S32-Z CY1S25-Z CY1S10-Z CY1S20-Z CY1S6-Z 1 10 0.5 5 200 300 100 400 100 400 300 200 Piston speed [mm/s] Piston speed [mm/s] M2 M2 [Graph 12] Allowable moment (6 to 15) [Graph 13] Allowable moment (20 to 40) 20 200 CY1S40-Z 10 100 CY1S15-Z CY1S32-Z Moment M2 [Nm