Series KP/KPQ/KPG

KPGR08-12 12 d 10 18.5 24 41 29 50.5 25.7 9 KPQR10-12 KPGR10-12 Note 1) D indicates the maximum diameter.

KP/KPQ/KPG

KPQR08-12 48 23.2 6 12 d 10 KPQR10-12 KPGR10-12 18.5 24 41 29 25.7 9 50.5 Note 1) D indicates the maximum diameter.

KP/KPQ/KPG

KPGR08-12 6 23.2 48 12 d 10 KPGR10-12 KPQR10-12 18.5 24 41 29 9 50.5 25.7 Note 1) D indicates the maximum diameter.

C95

MR 212 238 259 288 341 371 50 63 75 90 110 132 12 16 16 20 20 25 26 28 32 40 50 60 48 55 68 80 100 120 4 4 5 5 6 6 38 46 52 62 63 75 10 10 12 12 16 16 7 9 9 9 12 14 7 9 9 9 12 14 32 36 45 50 63 71 10 12 12 16 16 20 59 67.5 82.5 95 114 129 32 40 50 63 80 100 72 83 100 115 126 150 12 15 15 20 20 25 26 28 32 40 50 60 10 11 12 12 14 16 9.5 12 12 16 16 20 65 75 80 90 110 140 56 65 77 92 100 120

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

E1 EW TG1 FL l1 L l2 d1 CD MR d2 R1 l2 32 C5032 45 260.2 0.6 32.5 22 5 12 5.5 30 10 9.5 6.6 6.5 40 C5040 51 280.2 0.6 38 25 5 15 5.5 35 12 12 6.6 6.5 50 C5050 64 320.2 0.6 46.5 27 5 15 6.5 40 12 12 9 8.5 63 C5063 74 400.2 0.6 56.5 32 5 20 6.5 45 16 16 9 8.5 80 C5080 94 500.2 0.6 72 36 5 20 10 45 16 16 11 11 100 C5100 113 600.2 0.6 89 41 5 25 10 55 20 20 11 12 CDH9 * Supplied with 4 mounting

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

KPQR08-12 12 d 10 18.5 24 41 29 25.7 9 50.5 KPQR10-12 KPGR10-12 Note 1) D indicates the maximum diameter.

CM2

M8 x 1.25 20 12 18 8 5 M20 x 1.5 9 15.5 13 5 28 15 24 1/8 11.5 20 0 0.033 25 45 8 13 10 12 M10 x 1.25 22 12 22 8 5.5 M26 x 1.5 9 19.5 17 6 33.5 15 30 11.5 1/8 26 0 0.033 32 45 8 13 12 20 M10 x 1.25 27 15 22 10 5.5 M26 x 1.5 12 19.5 17 6 37.5 15 34.5 14.5 1/8 26 0 0.039 40 50 11 16 14 20 M14 x 1.5 33 15 24 10 7 M32 x 2 12 21 22 8 46.5 21.5 42.5 14.5 1/4 32 Dimensions by Stroke Stroke 1 to

Slide Unit Series CX2/CXWM/CXWL

A80H E76A E73A E80A 3-wire (NPN equivalent) A72 A73 A80 A73C A80C 5 V 12 V 200 V 100 V IC circuit 10 16 20 25 32 16 20 25 32 Grommet CXS Relay, PLC 5 V, 12 V 12 V 100 V or less IC circuit 2-wire 24 V Connector 5 V, 12 V 5 V 12 V 24 V or less 100 V IC circuit 10 3-wire (NPN equivalent) DGrommet Relay, PLC 24 V 2-wire 5 V, 12 V 100 V or less IC circuit -X Solid state auto switches

Slide Unit Series CX2/CXWM/CXWL

A80H E76A E73A E80A 3-wire (NPN equivalent) A72 A73 A80 A73C A80C 5 V 12 V 200 V 100 V IC circuit 10 16 20 25 32 16 20 25 32 Grommet CXS Relay, PLC 5 V, 12 V 12 V 100 V or less IC circuit 2-wire 24 V Connector 5 V, 12 V 5 V 12 V 24 V or less 100 V IC circuit 10 3-wire (NPN equivalent) DGrommet Relay, PLC 24 V 2-wire 5 V, 12 V 100 V or less IC circuit -X Solid state auto switches

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Back port (Refer to P . 8-12-3.)

MK

ring Flange Hexagon socket head cap screw Piston rod y Except 12, 16 Except 12, 16 Bumper Ring nut Scraper pressure Rubber magnet u i o !

Vacuum System Peripherals:

42 e Valve Model Fill in the blanks below with symbols of necessary specifications.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

PLC Fieldbus network Gateway (GW) unit Serial communication RS485 Up to 12 controllers are connectable.

NCA1

2 1/4 4 2 1/2 1 3/4 2 1 1/2 -12 NCA1-1400 2 5 1/8 NI-1400 3 5 2 1/2 2 2 1/2 1 7/8 -12 NCA1-1401 2.5 6.19 NI-1401 3 1/2 5 13/16 3 2 1/2 2 13/16 2 1/4-12 NCA1-1402 3 6.25 Note) Retainer Rings are included NI-1402 3 1/2 6 1/8 3 3 3 1/4 2 1/2-12 42 Medium Duty Air Cylinder Series NCA1 How to Order Auto Switches Wire Lead Type Connector Type D D PC Lead wire length 0.5 (m) (1.64 ft) L 3 (m) (

Rotary Table/Rack & Pinion Style Series MSQ

12 12 12 12 12 12 1 1 1 1 4 4 4 Parts included 13 13 13 13 17 17 17 1 1 1 1 4 4 4 in seal kit 17 17 17 17 18 18 18 4 4 4 4 4 4 4 18 18 18 18 27 27 27 4 4 4 4 2 2 2 27 27 27 27 29 29 29 2 2 2 2 4 4 4 A grease pack (10 g) is included.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Back port (Refer to P . 8-12-3.)

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

4 82 88 12 14 26 12 M6 x 1 depth 9 21 100 st or more 25 25 25 350 to 500 175 80 37 46 57 100 88 13 14 31 12 M6 x 1 depth 13 21 125 st or more 32 32 32 350 to 600 201 82 37 52 65 114 90 16 14 38 12 M6 x 1 depth 13 21 150 st or more 40 40 40 350 to 800 238 92 44 62 84 138 101 20 15 47 12 M8 x 1.25 depth 16 25 200 st or more 50 50 50 350 to 1000 285 104 55 75 94 164 116 25 16 58 14 M10 x 1.5

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

13 36 62 17 15 39 13.5 5 14 5 48 33 25 25 34 46 M10 x 1.5 depth 12 0 0.030 20 CDVRA1BS63 14.5 10 2.5 117 12 14 41 76 19.5 17 39 20.5 6 21 5 60 33 30 30 34 57 M12 x 1.75 depth 13 0 0.030 23.5 CDVRA1BS80 15.5 12 3 142 12 18 50 92 22.5 20 43 28.5 6 29 5 72 33 35 40 34 70 M12 x 1.75 depth 14 0 0.036 25 CDVRA1BS100 16 12.5 4 172 12 112 18 60 28 25 43 38.5 8 39 85 5 33 40 45 34 85 ( ) are the

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

15 39 13.5 5 62 17 13 36 25 14 25 48 33 5 34 46 M10 x 1.5 depth 12 0 0.030 20 CDVRA1BS63 14.5 117 10 2.5 12 17 39 20.5 6 76 19.5 14 41 30 21 30 60 33 5 34 57 M12 x 1.75 depth 13 0 0.030 23.5 CDVRA1BS80 15.5 142 12 3 12 20 43 28.5 6 92 22.5 18 50 35 29 40 72 33 5 34 70 M12 x 1.75 depth 14 0 0.036 25 CDVRA1BS100 16 172 12.5 4 12 25 43 38.5 8 112 28 18 60 40 39 45 85 33 5 34 85 ( ) are the

CXWM/CXWL

V Yes 24 V Connector 3-wire (NPN equivalent) IC circuit 10 5 V Grommet 2-wire 24 V Relay, PLC 100 V 12 V F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector 10 16 20 25 32 3-wire (NPN) 3-wire (PNP) 24 V IC circuit 16 20 25 32 5 V, 12 V Diagnostic indication (2-color indication) Yes Relay, PLC F7PW J79W F7BA Water resistant