CEx-OMP0016 Hyrodless Monosashi-kun (with Stroke Adjustment Unit, X417) 31 Chapter 9: Construction / Parts List 32 Chapter 10: Cushion Capacity 10-1. Cushion Selection 33 10-2. Absorbing Capacity of Air Cushion, Stroke Adjustment Unit 34 10-3. Adjusting Method 35 Chapter 11: Stopping Operation 11-1. Over run 36 11-2.
Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s
1 C 6 2 1 3 G1/8 F 3 G1/8 7 NPN1 PNP1 N P L 4 7 5 M SI N 1 2 3 4 5 6 1 2 S 6 7 8 3 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101 1 2 2 -8No.PS-OMR0001CN-J 2 B 2 F 0.010.03mm 0.020.15mm 0.050.30mm G H DC24V AC100V AC110V 10 1 10 2 Rc1/8 4 1 C 2 10 N 6 10 3 0 G1/8 F G1/8 3 0.4MPaMPa 1 11 0.4MPaMPa 2 0.2MPaMPa C Rc1/4 3 F 12 G1/4 0.2MPaMPa 4
Reference Heavy duty auto drain 6.3 Outer dimensions [IDF100F-30-W] Ball valve (O.D.10, Length approx. 2m) is also available.)
bracket Model Port size (Nominal size B) A H B C D E F G I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50 R 88 S 3.2 AM 1 2 3 4 , 9 36 205 19 100 106 3 106 10 AMF450 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 1 Misc. , , , 1 1 4.5 4.5 6 3 4 257 314 406 30 40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 44 66 96 239 291 403 22 32 42 128 167
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
Free flow Controlled flow Model Port size Applicable cylinder bore size (mm) Effective area (mm2) Effective area (mm2) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Weight (g) 4.7 AS1000-M3 M3 x 0.5 20 0.3 20 0.3 2.5, 4, 6 33 AS1000-M5 M5 x 0.8 90 1.4 80 1.2 6, 10, 16, 20, 25 90 AS2000-01 1/8 340 5.2 250 3.8 20, 25, 32, 40 115 AS2000-02 1/4 340 5.2 250 3.8 130 AS3000-02 1/4 810 12.3 810 12.3
Real-time switch output Unit switching Hysteresis mode ON For Air YES OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l Real-time flow rate "P" Window comparator mode H : Hysteresis CFM x 10-2 x CFM x 10-1 ft3 x 10-1 H H CFM = ft3/min ON High Flow Rate Type (For Air) NO OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 Real-time flow rate OUT1
Inside diameter 25 approx. 2m) (The opposite side 4Eye bolt (O.D.10, Length Compressed air outlet JIS flange 65A 10K For Option K 16K 4x 20 Drain tube direction(Nil) Drain tube Ventilation approx. 0.7m) condensed water Drain tube for (O.D.10, Length 9351 78 18 267 8x 19 4x 19 A A Flange bolt hole Drawing of view A 1130 140 1120 140 655 Other than 18 Option K Option K Model 75 direction
Provide clearance to prevent the Model Bolt Max. tightening torque Max. screw-in depth Nm (mm) MHF28D M3 x 0.5 0.95 7 MHF2-12D M4 x 0.7 2.2 10 MHF2-16D M5 x 0.8 4.5 12 MHF2-20D M6 x 1 7.8 15 Model Bolt Max. tightening torque Max. screw-in depth Nm (mm) MHF28D M3 x 0.5 0.63 4 MHF2-12D M4 x 0.7 1.5 5 MHF2-16D M5 x 0.8 3 5.5 MHF2-20D M6 x 1 5.2 6 Max. screw-in depth Model Bolt Max. tightening
For ordering information, refer to the option part numbers on page 82. 74 3 Controller Series LC1 Performance/Specifications General specifications Model LC1-1H1 LC1-1H2 Item 100/110V AC 10%, 50/60Hz (100V AC, 50/60Hz for LC1-1HV1) 200/220V AC 10%, 50/60Hz (200V AC 10% for LC1-1H32) (200V AC, 50/60Hz for LC1-1HV2) Power supply Leakage current 5mA or less Dimensions 80 x 120 x 244mm Weight
10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40, 50 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40 to 50 4, 6 Nylon tube, 4, 6 Urethane tube Vacuum entry Thread dia.
X 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 0 5 10 15 20 25 30 0 10 20 30 40 50 60 Work load [kg] Work load
B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.
(R) 1 (P) Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 13 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)
10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40, 50 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40 to 50 4, 6 Nylon tube, 4, 6 Urethane tube Vacuum entry Thread dia.
plug connector (L) M-type plug connector (M) DIN terminal (D) (Y) 52.1 Max. 10 30 Applicable cable O.D.
3 Order 1 piece of finger assembly per one unit. 12-10-10 10 180 Angular Style Air Gripper Cam Style Series MHY2 Dimensions MHY2-10D Pin hole positioning 30 9 9 2-M3 x 0.5 thread depth 4 (Mounting hole) 4 4-M3 x 0.5 MHZ 3H9 + 0.025 0 depth 3 (Thread for mounting attachment) 6 0.005 0.025 MHF 4 4-M3 x 0.5 thread depth 6 (Mounting hole) MHL 3 6 2-3.4 2M3 x 0.5 thread depth 6 12 MHR (Mounting
3 Order 1 piece of finger assembly per one unit. 12-10-10 10 180 Angular Style Air Gripper Cam Style Series MHY2 Dimensions MHY2-10D Pin hole positioning 30 9 9 2-M3 x 0.5 thread depth 4 (Mounting hole) 4 4-M3 x 0.5 MHZ 3H9 + 0.025 0 depth 3 (Thread for mounting attachment) 6 0.005 0.025 MHF 4 4-M3 x 0.5 thread depth 6 (Mounting hole) MHL 3 6 2-3.4 2M3 x 0.5 thread depth 6 12 MHR (Mounting