MVGQ

x 0.8 M5 x 0.8 Series SYJ3000 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 20 30 M5 x 0.8 M5 x 0.8 M5 x 0.8 10 36 64 17 26 74 47 30 72 2 4 46 52 18 8 13 37 10 60 19 13 MVGQ Note 1) It is possible to manufacture the intermediate strokes other than the standard strokes by means of installing a spacer.

Compact Cylinder

27 7 22 M5 7 16 10 26 40 26 4 16 26 6.6 2.8 8 38 60 73 M5 29 7 22 M5 7 16 15 32.5 46 32 4 30 32.5 7 5 10 50 64 32 79 M6 33.5 7 24.5 M6 9 18 17.5 38 52 36 4 35 38 9 5 10 55 72 36 90 M6 38 10 26 M6 9 21 20 46.5 64 45 5 40 46.5 9 6 12 70 90 45 110 M8 45 10 31 M8 9 21 22.5 56.5 74 50 5 45 56.5 9 6 12 80 100 50 120 M8 50 10 31 M8 Single clevis bracket Hexagon socket head cap screw (accessory

CXS

42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 x 0.7 with depth 6 20 62 24 84 60 22 11 2-M5 x 0.8 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 x 0.8 with depth 7.5 25 73 29 87 71 27 13.5 2-M6 x 1.0 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 x 0.8 with depth 7.5 32 94 37 100.5 92 35 17.5 2-M6 x 1.0 75 45 8 16 4 30 16 18.5 56 80.5 10 Symbol Z Stroke Bore size (mm) 10, 20 30, 40, 50 75 100 15 20 25 32 25 35

DOC1001322

Model number Serial number Kind and amount of refrigerant (An example of "HRS400-A-46" model.) "3~" stands for "3 inter phase".

Rotary Table

M5. 2 180 Standard tyoe Number of auto switches 3 90 4 180 2pcs.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Digital Pressure Switch

M5 M5R 01 N01 Port size M50.8 M50.8 R1/8 NPT1/8 M5(0.8) M5(0.8) Wetted parts Pressure sensing part Silicone Material of Piping port C3602 (Electro less nickel plating) O-ring: HNBR With lead wire and connector attached (5-core, 2 m) 55 g 63 g Weight Without lead wire and connector 15 g 23 g Analogue output Voltage output Range Rated pressure range A B C Vacuum 0.0 to -101.0 kPa 0 -101 kPa

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

NB A S + Stroke Z + Stroke H (mm) A BA BB CA CB D F FB FC FT FX FY FZ GA GB H MM NN NA NB S Z Bore size (mm) 10 15 15 12 17 14 4 8 17.5 5.5 2.5 33 20 42 8 5 28 M4 x 0.7 M10 x 1.0 12.5 9.5 46 74 16 15 18.3 18.3 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 Double clevis style (D): CJ5DS R V CDH9 + 0.030 0 NB GA 0.030 0.060 Clevis pin ( ) Cdd9 Piping port 2 x M5 x 0.8

Digital Flow Switch

ZS-46-B Panel mount adapter ZS-46-D Panel mount adapter + Front protection cover ZS-46-5L Power supply/output connection lead wire 5-core, 2 m ZS-27-01 Front protection cover B Panel mount adapter Connection Example ZS-46-B PFG300 Sensor connector D Panel mount adapter + Front protection cover PF3A7 H Power supply/output connection lead wire ZS-46-D Lead wire and M12 connector (Option for

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

Open EO Closed EC K L J M5 x 0.8 (finger closing port) G I M (mm) I 9 11 Model MHS2-50D MHS2-63D G 37.5 44 FZ 6 7 FX 31 38 FY 28 34.5 EC 22 30 EO 34 46 DC 70 86 DO 82 102 M 2 3 B 70 86 K 10 11 AC 3 4 J 24 28 AA 55 66 AB 52 62 NA 18 24 L 4H9 6H9 NB 10h9 12h9 CA 9 12 CB 20 22 0 -0.036 0 -0.043 +0.030 0 +0.030 0 Model MHS2-50D MHS2-63D SC 12 14 RB 34 38 O 5 5.5 4H9 5H9 VA Q 14 17 RA 52 66 VB

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5 20 26 ZZ 103 132 137 156 182 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 Model 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 P (Piping port) Model Mounting nuts (2 pcs.) are shipped together.

CHKD/CHKG

Body mounting bolt tightening torques Tightening torque (Nm) 2.5 4 7 16 30 40 70 100 Bore size (mm) Mounting bolt size M5 M5 M6 M8 M10 M12 M14 M16 20 25 32 40 50 63 80 100 Magnetic body (steel plate, etc.) 268 JIS Standard Compact Hydraulic Cylinder: 10 MPa CHKD Series Construction r !0 !1 q y !3 o i !4 !

SFOD-OMT0010

(a) Direct Mounting with four M5 screws Mounting screw (M5) 4pcs. (prepared by customer) (b) DIN rail mounting The figure on the right shows how to mount the DIN rail mounting brackets. Secure the DIN rail mounting bracket using the mounting screws (M5 x 8) 2 places on one side (4 places on both Mounting screw M5X8 sides).

3-Position Rotary Table

x 0.8 M4 x 0.5 M10 x 1 34 132.5 46 50 27.3 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M5 x 0.5 M12 x 1.25 37 168.5 58.5 63.5 39 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M5 x 0.5 M12 x 1.25 40 184 63.5 69 36.4 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M6 x 0.75 M14 x 1.5 46 214.5 76 78 42.4 66 26.5 5H9

MHL2

X 0.8 (Finger opening port) Auto switch mounting groove (4 locations) 4-M5 X 0.8 44 (Piston rod and rack screw) 5.5 H M5 X 0.8 18.2 (Finger closing port) 12.4 0.5 9 8 8.4 16.8 15 31 Width across 12.5 A flats 8 (4 locations) (46) 20 15 15 7 Closed 7 7 34 20 10 10 Open G 4-M4 X 0.7 through (Thread for mounting attachment) Model MHL2-10D MHL2-10D1 MHL2-10D2 J 80 108 146 A B C D E F G H 38 54

Compact

Right) MXZ25L(Pilot port location: Left) 2 x M5 x 0.8 (Pilot port) 2 x M5 x 0.8 (Pilot port) 22.2 + Stroke 22.2 + Stroke 9.5 2.5 9.5 (54.9) (54.9) 8 8 2.5 Auto switch Auto switch 10 MXZ Series Model Selection For Transfer (1) Load weight and overhang L1 and L2, should be within the average speed limit in the graphs. (2) For horizontal use, overhang L3 should not exceed the allowable range

Plug-in Unit

Port size VQC1000/2000 VQC4000 --C8 Port size VQC2000 VQC1000 Symbol C3 C4 C6 C8 C10 C12 N1 N3 N7 N9 N11 M5 02 03 B C0 VVQC 1 000-2A-1 For 3.2 One-touch fitting For 4 One-touch fitting For 6 For 8 For 10 For 12 For 1/8" For 5/32" For 1/4" For 5/16" For 3/8" For M5 thread Rc 1/4" Rc 3/8" Rc 1/4" bottom ported Without One-touch fitting Option Series Nil R Centralized exhaust External pilot

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

M2 M3 m1 m2 m3 16 25 40 16 25 40 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 100 120 100 38 35 35 MY2HT 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load. Refer to each graph regarding the maximum allowable moment and maximum allowable load for a particular piston speed.

EXxx-OMY0004

Required screws are as follows: 2 x M5 (End plate: torque = 1.5 Nm) 2 x M5 (SI Unit : torque = 1.5 Nm) 4 x M (Valve manifold: refer to valve manifold catalogue) Fig. 7-1 Required screws All manifolds are mounted using 8 screws (except VQC4000 which uses 7 screws). 25 No.EX##-OMY0004 7.1.1. Valve manifold connection Connect the valve manifold with the 2 screws on the SI Unit.

ML1C

Range (mm) No. of auto switches mounted Applicable auto switch Bore size (mm) 25 6 4 D-M5, D-M5W, D-M5T D-E7A, D-E80A Auto switch model 40 6 4 D-M5, M5W, M5T D-E7A, E80A 32 6 4 10 15 5 10 1 pc. 2 pcs.