Manifold Type: Base Mounted, Valve Stations: 8 Stations, A, B Port: NPTF1/8

Manifold Type: Base Mounted, Valve Stations: 8 Stations, A, B Port: ø4 One-touch Fitting

Manifold Type: Base Mounted, Valve Stations: 8 Stations, A, B Port: ø4 One-touch Fitting

Manifold Type: Base Mounted, Valve Stations: 8 Stations, A, B Port: ø6 One-touch Fitting

Manifold Type: Body Ported, Valve Stations: 8 Stations, A, B Port: NPTF

Manifold Type: Base Mounted, Valve Stations: 8 Stations, A, B Port: 10-32 Nom

Manifold Type: Base Mounted, Valve Stations: 8 Stations, A, B Port: NPT1/8

Manifold Type: Base Mounted, Valve Stations: 8 Stations, A, B Port: NPTF1/8

SI Unit: PNP Output, -COM, Valve Stations: 8 Stations, A, B Port: One-touch Fitting for ø6, Thread: -

Fieldbus system EtherCAT compatible SI Unit

081D 0 Clear -98No.EX-OMA1023 Details of the Parameter Data SI unit (EX600-SEC3/4) Index Name (Meaning) Type Value 40x0:0 Unit parameters UNSIGNED8 8 40x0:02 Monitor short circuit (out) Enum0800 0=Disable 1=Enable 40x0:06 Restart after short circuit Enum0801 0=Manual 1=Auto Monitor 24V_C (Monitoring the power supply voltage for control and input) Enum0800 0=Disable 1=Enable 40x0:07 40x0:08

HRX-OM-M005

Fuse Cutout FLT 08 Alarm9 Reservoir High Temp. FLT 09 Alarm10*1 10 Alarm11 Reservoir High Temp.

KFx-OMV0007

Mounting/ Piping Equivalent tightening torque [Nm] KF 04 1.5 to 2.0 2 to 7 KF 06 1.5 to 2.0 3 to 8 KF 08 1.5 to 2.0 4 to 9 KF 10 1.5 to 2.0 6 to 9 KF 12 1.5 to 2.0 9 to 12 KF 04 1.5 2 to 4 KF 06 1.5 4 to 6 KF 08 1.5 6 to 9 KF 10 1.5 10 to 12 KF 12 1.5 10 to 12 Sleeve material Fitting size Appropriate tightening rotations Nylon 66 C2700 2.

Ionizer Gun

Ionizer IZG10 08 01 01 Ionizer Gun One-touch fitting Nozzle type Symbol Applicable tube O.D.

HRX-OM-K003

Fuse Cutout FLT 08 Alarm9 Reservoir High Temp. FLT 09 Alarm10 Return High Temp WRN 10 Alarm11 Reservoir High Temp.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Inch size Metric size 3.2 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 With One-touch fittings Use 1/8" tube. 15-9-72 2 Speed Controller with One-touch Fittings Panel Mount Type, In-line Type Needle Valve/Flow Characteristics AS1001F AS2001F AS2051F Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (/min (ANR))

Speed Controller with One-touch Fittings Series AS In-line Type 1

Metric size Inch size P . 15-11-3 3.2 With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Use 1/8" tube. 23 04 06 08 10 12 01 03 05 07 09 11 13 4 6 8 10 12 Flow Direction Symbols on Body JIS Symbol Symbol 15-9-10 2 Speed Controller with One-touch Fittings In-line Type Series AS Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Elbow Universal 2 3 Metric size Inch size 3.2 23 01 1/8" 04 06 08 10 12 03 05 07 09 11 13 4 5/32" 6 3/16" Control 8 1/4" Meter-out Meter-in 0 1 10 5/16" 12 3/8" Use 1/8" tube. 1/2" M5 Port size With One-touch fitting M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 01 02 03 04 U10/32 N01 N02 N03 N04 Needle Valve/Flow Characteristics AS1201FG, AS1211FG AS2201FG-

ASD

Millimeter Inch With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Thread _ Meter thread (M5) Unified thread (10-32 UNF) R(PT) N NPT Port size M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AS ASN AQ ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow

KA

(mm) Fitting size d Soft nylon Polyurethane D L A M Part No. 3.2 9.6 18.5 17.5 18 4 33.5 34.5 36.5 18.5 15.5 KAR23-04 3.4 2.9 2.0 1.8 5 KAR04-06 KAR04-08 5.6 5.6 6 8 10.4 4 16 12.8 39.5 37 39.5 10 KAR04-10 3.3 2.5 KAR06-08 8 18.5 6 17 12.8 KAR06-12 42 4.7 12 20 10 KAR06-10 13.1 13.1 3.0 8 KAR08-10 41 4.0 18.0 18.0 10 20 18.5 15.2 KAR08-12 42 4.6 12 10 KAR10-12 44.5 33 32.8 32.8 12 20 21 18.5

High Purity Fluoropolymer

Packaging Nil 1 Clean packaging Class M3.5 Standard packaging Class M5.5 Class Symbol Nil 1 Applicable For LQ2 For LQ1 Class Symbol 1 2 3 4 5 6 Class 1 2 3 4 5 6 Applicable tubing size Connection tubing size Class 1 2 3 4 5 6 Symbol Connection tubing size Class 1 2 3 4 5 6 Symbol Inch sizes Metric sizes 03 04 06 08 10 12 19 25 03 05 07 11 13 19 25 3 x 2 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19