Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

5 !6 !7 !8 !

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

5 !6 !7 !8 !

AMD

O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMD150 1 8 1 4 3 8 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122

IZ-OMU0031-CN

<> [F 5] (1.5s) (200ms) [F 5] -24No.IZ*-OMU0031 [F 6] <> [F 6] [F 6] 000 30 -25No.IZ*-OMU0031 [F98] (F) OUT1 OUT2 OUT2 <> [F98] [on] [oFF] [oFF]() 2 [F90] -26No.IZ*-OMU0031 [F99] <> [F99] ON 5 [F99] -27No.IZ*-OMU0031 / () () 1"Hi" 1 1"Hi" 1 / 1() 10F.S. () 1 LoC1 < -> 5 LoCUnL () / -28No.IZ*-OMU0031 5 [UnL] [LoC] 5 [LoC] [UnL] 30/ [UnL] [FAL]3[LoC

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 1/8, 1/4, 3/8 1/4, 3/8 1/2 3/8, 1/2 3/4 1/2, 3/4 1 3/4, 1 1, 11/2 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 24

Series 12-REA Sine rodless cylinder

thread depth J 2-Port size D I NB NB T N K W N S + Stroke F F NA R ZZ + Stroke 43 35 29 22 20.5 27.8 D Model Port size K NN B L MM x J N NA H 16 15 10 I 46 36 30 NB 19 17 17 T S 11 9 8 G ZZ 10 8 8 R 60 50 50 W 16 16 13 F 40 40 30 X 12-REA40 12-REA32 12-REA25 Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 70 60 46 M26 x 1.5 M26 x 1.5 M32 x 2.0 21 17 15 50 40 34 19 15 13 150 124 111 182 156

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Rated voltage Manual override Symbol Nil: Non-locking push type A: Non-locking push type (Manual) E: Push-turn locking type (Manual) DC AC (50/60 Hz) 2(A) 1 100 VAC 2 200 VAC 3 110 VAC [115 VAC] 4 220 VAC [230 VAC] 5 24 VDC 6 12 VDC (P)1 3(R) Electrical entry Light/surge voltage suppressor DC AC Nil Without light/surge voltage suppressor S With surge voltage suppressor *1 DIN terminal

Vacuum Saving Valve

Relationship between Minimum Operating Flow and Fixed Orifice Size 50 40 M8 0.5 5.0 Connection thread size for the pad Fixed orifice size (mm) Minimum operating flow (l/min (ANR)) Q2 30 N = 6 (unit) 20 10 0 5 10 15 20 25 30 35 Q1 = 31 l/min (ANR) Suction flow (l/min (ANR)) The above selection example is based on a general method under the given selection conditions, and may not always be

Micro-Mist Separator with Prefilter Series AMH

66 17 10 218 80 22 10 218 80 19 10 241 90 25 10 241 90 21 10 277 100 30 10 334 150 40 13 13 16 16 19 19 22 22 32 100 63 113 76 119 76 145 90 151 90 166 106 173 106 200 122 253 160 8 12 6 40 66 84 28 5 2.0 27 37 1/4,3/8 172 AMH250 178 1/2 8 12 6 40 66 84 28 5 2.0 27 37 3/8, 1/2 204 AMH350 3/4 210 8 14 7 50 80 100 34 5 2.3 32 37 8 14 7 50 80 100 34 5 2.3 32 37 10 14 9 55 88 110 50 9 3.2 37

JXCx-OMT0034CN

CN1IF (CONT) 19 - (LEC)(LEC) 5.4 CN2PC/TB (LEC)(LEC-T1-3*G*)(LEC-W2) CN2SW OFF RWw(n+1)b0 ON(1) (LEC) (LEC)(LEC-T1-3*G*)(LEC-W2) (1) CN2 (3m) (2) (USB ) 120.3 120.3 mm mm 200 200 mm/s mm/s USB (A-miniB type) 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 () 9.CN2TB/PC () 20 - .CN4 6.1 1 EMG+ EMG 2 EMGEMG 3 24V 5 4 3 2 1 () 4 0V 5 FG FG (LEC)(0V)

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 6 4 5 6 6.5 7.5 8 9 KFE06-02 KFE08U-03 KFE08N-03 KFE10U-03 KFE10N-03 KFE12U-03 KFE12N-03 1 4 41 49 50 63 62 93 91 37.5 17 17 44.2 16 15.2 3 4 5 5.5 6.5 7 8 M10 1 11 6 11 17 21 30 35 45 12 13 8 3 8 M12 1 46.2 39.5 17 16.2 19 19 14 3 8 10 M15 1 16 48.8 41.5 17 18.8 19 22 17 12 3 8 18 51.3 44.5 17 19.3 22 24 19 M17 1 Bulkhead union: KFE Applicable tube (mm) Effective orifice (mm 2) Mounting

PSxx-OML0002CN

< -> 5 [UnL] [LoC] 5 [LoC] [UnL] 46/ [UnL] [FAL] 3[LoC] -45No.PS-OML0002CN-G [0] <> (45)(45) [UnL] 5 [0] / 1 / ( ) 1 (/30 ) -46No.PS-OML0002CN-G , (1015 ) O -47No.PS-OML0002CN-G <> 5 UnLLoC 5 5 (30) 5 0 (30) 46/ 1 -48No.PS-OML0002CN-G ZSE30A(F)/ISE30A ( ) No.1 ON ON OFF Yes No.2 No ON OFF No.1 OFF No.3 No.4 No.5 No.6 No.7 -49No.PS-OML0002CN-G No.8 Yes No No.9 No

AC Servo Motor Driver (MECHATROLINK-II type)

LEY63 LEY63D Lead symbol A B C L A B C Series Lead 5(2.86) (Including pulley 20 10 5 20 10 5 (Pulley ratio 4/7) ratio) Initial value Recommended value Parameter *1,*2 Para.

ISE70/75/75H

Displayed values of the pressure sensor can be calibrated to within 5% of their readings. Error description Condition Solution LCD display A load current greater than 80 mA is turned on through either or both of the switch outputs. Shut off the power supply. After eliminating the output factor that caused the excess current, turn the power supply back on. 5%R.D.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Dimensions AS420 AS500 AS600 67.5 74 90 1/4, 3/8, 1/2 3/4 1 38 42 55 122 115 158 112 105 148 50 50 62 L1 L2 L4 Min.

F

~ 60OC / 40 ~ 140F Ambient and Fluid Temperature 8 ~ 10Turns No Of Needle Rotations AS1000 Not Applicable Panel Cut Out Dimensions AS2000 16.5 AS3000 16.5 AS4000 25 D I M E N S I O N S S E R I E S (N)AS1000-M5 D I M E N S I O N S S E R I E S (N)AS2000, 3000 Port Size G H I K A B C D E F Model 1/8 50 54.5 16 4.5 40 30 5 17 10 15.5 (N)AS2000-01 3/4 51.5 56 20 4.5 40 30 5 23 11.5 17 (N)AS2000

Angle Seat Valve /

Step 4 Item Selected item Symbol r VXB2 1 5 A H B L L Yes r Indicator For special options, refer to page 5. Step 5 3 Angle Seat Valve / Air Operated Type VXB Series For Steam Can be used with air or water Flow Rate Characteristics N.C.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

View A Terminal block numbers 4 3 2 1 1 2 3 4 5 6 7 8 8 7 6 5 50 Series PF2D Dimensions: Remote Type Display Unit for Deionized Water and Chemicals (4-channel Controller) PF2D200/201 40.1 (7.5) 40 6 2.5 L L/min 36.8 OUT1 CH FLOW SMC SET Sensor connector (option) Front protective cover + Panel mounting 53 9.4 (2) 47 42.4 46.4 Panel mounting adapter Front protective cover Waterproof seal Panel

Series SY100 3 Port Solenoid Valve Rubber Seal

For manifold type 30, 31 VP Standard SY1 3 5 L 1 M3 VG : Body ported (Cv: 0.008) VP Standard SY1 4 M 5 1 (Cv: 0.008): Base mounted VQ 3 port Piping port Rated voltage VQZ For DC M3: With sub-plate : Without sub-plate 5 6 V S R 24V DC 12V DC 6V DC 5V DC 3V DC VZ VS Sub-plate style For manifold type S41 For AC (50/60Hz) 1 2 3 4 100V AC 200V AC (With gasket and screw) 110V AC [115V AC] 220V

Series KP/KPQ/KPG

/2 4 18 4 4 14 6 19.5 10 10 L A M H 17 8 21.5 26 18 Connection threads 19 10 24 41 29 22 12 25 58 46 Reference dimension for R threads after installation Male Elbow: KPL Effective area mm Note 1) D1 Model L1 TPH TPS A H (width across flats) Applicable tubing O.D. mm Connection threads R Weight g L2 M D2 L1 Applicable tubing M 4 5 5 6 8 9 13 14 15 18 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5