XLA Series

5.

MX-OMP0051

2 2-4 2-5 1 ISO VG302 10 2-6 , 2-7 Nm MXQ6(A) M36 1.1 MXQ8(A,C) MXQ6B M36 1.1 MXQ12(A,C) MXQ8B M48 2.7 MXQ16(A) MXQ12B M510 5.4 MXQ20(A) MXQ16B M612 9.2 MXQ25(A) MXQ20B M816 22 Nm MXQ6(A) M60.75 5 MXQ8(A,C) MXQ6B M60.75 5 MXQ12(A,C) MXQ8B M81 12.5 MXQ16(A) MXQ12B M101 25 MXQ20(A) MXQ16B M121 43 MXQ25(A) MXQ20B M141.5 69 11 (MPa) (MPa) MXQ8(A,C) 0.3 MXQ8B 0.3 MXQ12(A,C) 0.3 MXQ12B 0.3

Electrostatic Sensor Monitor

V (within rated measurement range) Output impedance: Approx. 1 k Accuracy (to display value 25 oC) 1%F.S.

CC

CCVS02-*G-* SCCS, #4 CCVS11/12/13-*G-* SCCS, #5 CCVS21/22/23-*G-* SCCS, #5 CCVS31/32/33-*G-* SCCS, #5 CCVS10-* SCCS, #6 CCVS20-* SCCS, #6 CCVS30-* SCCS, #6 CCVL02-*G-* SCC, #3 CCVL11/12/13-*G-* SCC, #4 CCVL21/22/23-*G-* SCC, #4 CCVL10-* SCC, #5 CCVL20-* SCC, #5 4.12-11 Series CC Cylinder Max.

RLQ

5 V, 12 V 24 V IC circuit Diagnostic indication (2-color display) Grommet 12 V 5 V, 12 V 2-wire Water resistant (2-color display) 4-wire (NPN) IC circuit With diagnostic output (2-color display) Solid state switches marked with a "" are produced upon receipt of order.

ITV0000

Return 0.5 0.4 0.2 0 0 Out -0.2 -0.4 -0.5 -0.6 -0.8 0 25 50 75 -1 1 2 3 4 -1 100 5 Input signal % F.S.

Smooth Cylinder Series CQSY ø 12, ø 16, ø 20, ø 25

Minimum Operating Pressure Symbol Rubber bumper Unit: MPa 12 16 20 25 Minimum operating pressure Bore size (mm) 0.03 0.02 Standard Stroke Bore size (mm) 12, 16 20, 25 Standard stroke (mm) 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Replacement Parts: Seal Kit Theoretical Output OUT IN Unit: N Bore size (mm) Contents Kit no.

13

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 5 7 10 2 4 4 7 9 11 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 10 11 13 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 14 14 13 20 18 15 18 21 26 33 12 13 11 17

Digital Flow Switch (Integrated display type) ( compatible)

1.5 PF3W720 28 22 32 40 50 4.5 5 1.5 PF3W740 34 30 42 48 58 4.5 5 1.5 PF3W711 44 36 48 58 70 5.5 7 2 -103No.PF-OMV0006-B PF3W721 Basic type Symbol Piping port size A AA B D E F G H J K L N P Model 11/4, 11/2 104 74 31 52 39.5 PF3W721 25 27.5 3.5 depth 14 G 11/4 108 76 33 54 41.5 56 91 71.6 28.5 54 G 11/2 112 78 35 56 43.5 -104No.PF-OMV0006-B PF3W704/720/740/711/721 (With temperature sensor

Rotary Table/Vane Style Series MSU

MSUA1 MSUA1-S,SE C 8 x M3 x 0.5 depth 5 51 31 38 23.5 B 25 4 x M4 x 0.7 depth 4 22.5 4.5 +0.025 0 2.5H9 A Long groove depth 4 (Positioning pin hole) 35h9 0 0.062 22.5 3 x 3H9 depth 3 +0.025 0 +0.043 0 17 H9 ( A , B , C ) 27 2.5 2 2 x 4.5 through 12.5 37 8 6.5 10.3 6.5 31 4.2 2 31.5 2 36h9 0 0.062 27 16 9 5 4.5 Angle adjustment bolt 2 x 4.5 through 2 x M3 x 0.5 1 5 Adjustment: Max. 7.5 B port

Series AS-FM/AS-M/ASD-FM

Applicable cylinder bore size (mm) 3.2 Metric size Inch size Model 6 8 4 1/8" 5/32" 3/16" 1/4" 5/16" 6, 10, 16, 20 AS1001FM 20, 25, 32 AS2001FM 20, 25, 32, 40 AS2051FM Specifications Proof pressure 1.5MPa Maximum operating pressure 1MPa Minimum operating pressure 0.1MPa Ambient and fluid temperature 0 to 60C Number of needle revolutions 10 revolutions (20 revolutions Note 1) ) Applicable

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

center (A) 4 (B) 2 5 (EA) 3 (EB) 1 (P) 5(EA) 3(EB) 1(P) (This drawing shows a closed center type) No.

Mechanically jointed rodless cylinder Basic type With Slide bearing guide type With cam follower guide type With linear guide type With High rigidity/ Linear guide type With Protective Cover type

Damage to the seal belt may cause permanent air leakage. -5- 1-2. End-lock type (Cylinder with end lock) 16 20 25 32 40 Lock position Single side (selectable), both sides Holding force (max.)N 110 170 270 450 700 Stroke fine adjustment range (mm) 0 to -5.6 0 to -6 0 to -11.5 0 to -12 0 to -16 Backlash 1mm or less Manual release Possible (Non-locking type) Warning 1.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

25 27 5 A4 B2 Insulation Black () 28.5 PE A B 47 57 X Insulation Red (+) 3EB 1P 5EA 96.5 27 69.1 25 1/8" (Pilot EXH. port) 210.7 76.5 L (Lead wire length) 1.55 0.3 mm2 80.5 (For E type) 34 17.5 15.5 29.5 29.5 5 x 3/8", 1/2" (Piping ports) 44.5 113.6 L plug connector with cover (LL) 3 52-SY9440 (R) -LL03 04 200 L 5 (Lead wire length) Insulation: Red (+) Insulation

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

One-touch fitting Silencer 2.10-3 3 Port Solenoid Valve VQZ100/200/300 Valve Single Unit Body Ported Plug Lead Unit How to Order Valve VQZ100 VQZ 1 1 5 5 M C6 PR Series 1 VQZ100 Body width 10mm Bracket F None With bracket Configuration N.C.

Compact Electro-pneumatic Regulator Series ITV0000

Return 0.5 0.4 0.2 0 0 Out -0.2 -0.4 -0.5 -0.6 -0.8 0 25 50 75 -1 1 2 3 4 -1 100 5 Input signal % F.S.

ZPT/ZPX

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 0 0 1 1 0 5 8 16 27 53 84 0 0 0 1 1 3 1 1 2 3 5 8 Misc.

IDX-OM-U021

1 2 IN OUT INOUT () 424 IDF100150F 5-1 5 2 IDX-OM-U021 5 5-2 1-3 51 3.6 OFF () ON OFF ON IDF100150F 5-2 5 3 IDX-OM-U021 5 5-3 R OFF OFF OFF ON ON () IDF100150F 5-3 R 5 4 IDX-OM-U021 6 6 6-1 IDF100F-30IDF125F-30IDF150F-30560 MPa 0.151.0 / K 0.151.6 () 245 (85%) 50Hz 16 20.1 25 (ANR) 1) 60Hz 18.8 23.7 30 3/min m 50Hz 16.7 20.9 26 2) 60Hz 19.6 24.7 31.2 MPa 0.7

XLA- ∗ -F7NJ ∗ - ∗ Series

Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding

Compact Cylinder with Air Cushion and Lock Series RLQ

25 20 20 5.5 5.5 5.5 6.5 The operating ranges are provided as guidelines including hystereses and are not guaranteed values (assuming approximately 30% variations).