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machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 2 XL-OMV0002 1. 2. 3. 4., / 1 1.5 *3) *3)1 1 () 3 XL-OMV0002 1.1 A6063SUS316LSUS304 FKM XLC-80,XLC-100,XLC-160 :Y-VAC2 60 XLC-16,XLC-25,XLC-40 0.3MPa0.5MPa XLC-50,XLC-63,XLC-80,XLC-100,XLC-160 0.4MPa0.5MPa 245250Hz 30m

M3 1.25-3 6.5mm 2 (16AWG) 812mm3 () 1.25mm 0.1m 30m (11 ) M3 6.5mm () M3 0.631Nm () 2-2 IDU Series 2 4 IDX-OM-W014 2 2 3 ()2 2 2-2-3 4 IDU Series 2-3 2 5 IDX-DM-W014 3 3 1 IDU3E6E ` 3 2 ON IDU3E6E 5 0.15MPa IDU Series 3-1 3 1 IDX-DM-W014 3 3 3 3 4 3 3 5 3 5 OFF 3 6 24 IDU Series 3-3 3 2 IDX-OM-W014 4 4 4-1 5 310 4-2 4-2-1 () 4-2-2 1.

JIS B 8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1993:*2) 1. 2. 3. 1. 2. 3. 4. 1 1 1 1 1 1.5 1.5 1.5 1.5 *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () 2 , 2 2 2 2 3 , , ,, 4 , , , , , , , , , , , , 5m [] ,, , , , , , , , 5 ,, , , , , , , , , , , , , , 6 , 2 ,40mm, ON ON ON ON , ,: 1000 (ms) (mm) V(mm/s) = <> ,,(ON ) ,5m , ,30m, , <> ,100m <> (D-A96A96V ) ,,( ) [n ,n ] ,, ,, ,D-A90,A90V

M3 1.25-3 6.5mm 2 (16AWG) 812mm3 () 1.25mm 0.1m 30m (11 ) M3 6.5mm () M3 0.631Nm () IDU Series 2 4 IDX-OM-W023 2 2 3 ()2 2 2-2-3 4 IDU Series 2 5 IDX-DM-W023 3 3 1 IDU8E15E1 ` 3 2 ON IDU8E15E1 5 0.15MPa IDU Series 3 1 IDX-DM-W023 3 3 3 3 4 3 3 5 3 5 OFF 3 6 24 IDU Series 3 2 IDX-OM-W023 4 4 4-1 5 310 4-2 4-2-1 () 4-2-2 1.

M3 1.25-3 6.5mm 2 (16AWG) 812mm3 () 1.25mm 0.1m 30m (11 ) M3 6.5mm () M3 0.631Nm () 2-2 IDF Series 2 4 IDX-OM-W011 2 2 3 ()2 2 2-2-3 4 2-3 IDF Series 2 5 IDX-DM-W011 3 3 1 IDF4E15E1 ` 3 2 ON IDF1E3E IDF4E15E1 5 0.15MPa (IDF1E ) 3-1 IDF Series 3 1 IDX-DM-W011 3 3 3 3 4 3 3 5 3 5 OFF 3 6 24 3-3 IDF Series 3 2 IDX-OM-W011 4 4 4-1 5 310 4-2 4-2-1 () 4-2-2

M3 6.5mm 1.25mm 2 1 2 2. 2.1 ( ) 2 2 1 2. 2.2 2.2.1 (1) (85%) 240050 () 2000m (2) 2 2 2. 2.2.2 P.6-2 6.2 1 1 5 4 3 2 1 600mm 600mm 600mm 600mm 600mm 2 3 2. 2.2.3 50 50 (IN) (OUT) (IN) (OUT) (IN) (OUT) IN OUT 2.2.4 10mm ( ) 2 4 2. 2.2.5 6-1 IEC () IDF15E1-10(100V ) AC100V () [30mA 10A] IDF15E1-20(200V ) AC200V () [30mA 10A] 1.25mm 2 (16AWG) 812mm3 () 0.1m 30m

L N PE M3 6.5mm 1.25mm 2 :17 1 2 2 2 , 2 1 IDFA6E 20kg 2 2 2 2 2 1 240 050 ( ) 2000m 600mm 600mm 600mm 600mm 600mm 2 1 2 2 2 2 6 6-2 2 2 3 50 50 2 2 4 10mm ( 2 2 2 2 2 5 6-1 IEC AC200V 30mA 5A 1.25 216AWG,3 ,812 0.1m 30m M3 1.25-3 6.5mm () M3 0.61Nm 2 3 2 2 3 () 2 2 () 2 4 3 / 3 3 1 INOUT 3 2 ON () INOUT 5 ONOFF 0.15MPa NO IN 3 1 3 / 3 3 OFF OFF

Single Double 3-position 0.15MPa 0.1MPa 0.2MPa 5 to 60C Note 1) 1 (P) 5 (R1) 3 (R2) Minimum operating pressure 2-position double (metal) (A) 4 (B) 2 Ambient and fluid temperature Lubrication Manual override Impact resistance/Vibration resistance Enclosure Rated coil voltage Allowable voltage fluctuation Type of coil insulation Not required (non-lube type) Push type (tool required) 150, 30m

60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0002 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0002 1 &/ 1.52 2 ( ) 5 5 P-01-11 P-06-3 4 XL-OMY0002 2.2 A6063SUS316LSUS304 5 P11 FKM 3 3[]P8 60 , 245250Hz 30m

-2No.PS-OMS0006CN-G / *3) 1 1.5 3) 1 1 -3No.PS-OMS0006CN-G () () () () -4No.PS-OMS0006CN-G () * UL UL1310 2 UL1585 2 30 Vrms(42.4 V ) (2 ) UL (1 20 ) -5No.PS-OMS0006CN-G * FG (35 N () ,() *() 6 33 () () 30m DC(-)() * -6No.PS-OMS0006CN-G ( ) () CE/UKCA -5~50(5 ) * , 1015 10 1% 2053 LCD * -7No.PS-OMS0006CN-G N M5 ISE20 3 ISE20 -0.1001.000 MPa Y ZSE20 0.0-101.0 kPa K ZSE20F

IDFA75E) IDFA Series 1-1 1 1 IDX-OM-W032 1 (IDFA75E) () IDFA Series 1-1 1 2 IDX-OM-W032 2 2 2-1 50kg 2-2 2 2 1 2000m 240 050 600 mm 600 mm 600 mm 600 mm 600 mm ( ) IDFA Series 2-1 2 1 IDX-OM-W032 2 2 2 2 6 6-3 2 2 3 50 50 OUT IN (IN) (OUT) 2 2 4 10mm IDFA Series 2-2 2 2 IDX-OM-W032 2 2 2 5 6-1 IEC AC230V [30mA 10AIDFA75E 20A] 216AWG 812mm 3 () 1.25mm 0.2m 30m

Single Double 3-position 0.15MPa 0.1MPa 0.2MPa 5 to 60C Note 1) 1 (P) 5 (R1) 3 (R2) Minimum operating pressure 2-position double (metal) (A) 4 (B) 2 Ambient and fluid temperature Lubrication Manual override Impact resistance/Vibration resistance Enclosure Rated coil voltage Allowable voltage fluctuation Type of coil insulation Not required (non-lube type) Push type (tool required) 150, 30m

Single Double 3-position 0.15MPa 0.1MPa 0.2MPa 5 to 60C Note 1) 1 (P) 5 (R1) 3 (R2) Minimum operating pressure 2-position double (metal) (A) 4 (B) 2 Ambient and fluid temperature Lubrication Manual override Impact resistance/Vibration resistance Enclosure Rated coil voltage Allowable voltage fluctuation Type of coil insulation Not required (non-lube type) Push type (tool required) 150, 30m

-2No.PS-OMR0001CN-J 1 / 1 1.5 *3) *3)1 1 -3No.PS-OMR0001CN-J 1 SMC 100 1 -4No.PS-OMR0001CN-J 1 / (5 m ) CE 50 N 30m DC(-)() () IP67IP65 -5No.PS-OMR0001CN-J 1 41 LCD VX2 (2 )AR20 () -6No.PS-OMR0001CN-J 2 (0.01 mm0.03 mm0.02 mm0.15 mm0.05 mm0.30 mm) ON()/OFF()() (A)() (B)() (C)(B)() -7No.PS-OMR0001CN-J 2 2 9 0.010.03mm 0.020.15mm 0.050.30mm DIN F G H 7 10 B Rc1/8 4

pressure range Internal pilot type 5 to 50C Ambient and fluid temperature 25ms or less Response time (for 0.5MPa) Note 1) 5Hz Maximum operating frequency Non-locking push type, Slotted locking type Manual operation With vacuum pressure gauge Pilot valve individual exhaust type, Main valve/Pilot valve common exhaust Pilot exhaust type Not required Lubrication Unrestricted Mounting position 150/30m

IDFA4E15E1 L N PE M3 6.5mm 1.25mm 2 1-1 IDFA Series 1 4 IDX-OM-W017 2 2 , 2 1 IDFA4E15E 20kg 2 2 2 2 2 1 2000m 240 050 600mm 600mm 600mm ( 600mm ) 600mm 2-1 IDFA Series 2 1 IDX-OM-W017 2 2 2 2 6 6-2 IDFA4E15E 2 2 3 50 50 2 2 4 10mm 2-2-2 IDFA Series 2 2 IDX-OM-W017 2 ( 2 2 5 6-1 IEC AC230V 30mA 5A 216AWG,3 ,812 1.25 0.1m 30m M3 1.25-3 6.5mm ()M3 0.61Nm

-2No.PS-OMU0005CN-C / *3) 1 1.5 3) 1 1 -3No.PS-OMU0005CN-C () () () () -4No.PS-OMU0005CN-C () * UL UL1310 2 UL1585 2 30[Vrms] 42.4[V ]2 UL (1 20 ) -5No.PS-OMU0005CN-C * FG (35 N () ,() *() 6 33 () () 30m DC(-)() () * -6No.PS-OMU0005CN-C ( ) () CE -5~50(5 ) * , 1015 10 1% 2365 LCD * -7No.PS-OMU0005CN-C 3 ISE20B -0.100~1.000MPa ZSE20B 0.0~-101.0kPa Y ZSE20BF -100.0~100.0kPa

-2No.PS-OMT0001CN-E 1 / 1 1.5 *3) *3) 1 1 () -3No.PS-OMT0001CN-E 1 SMC 100 1 -4No.PS-OMT0001CN-E 1 / (5 m ) CE 50 N 30m DC(-)() () IP67IP65 -5No.PS-OMT0001CN-E 1 42 LCD VX2 (2 )AR20 () -6No.PS-OMT0001CN-E 2 (0.01mm0.03mm0.02 mm0.15 mm0.05 mm0.30 mm) ON()/OFF()() (A)() (B)() (C)(B)() -7No.PS-OMT0001CN-E 2 2 DIN 9 F 0.010.03mm 0.020.15mm 0.050.30mm G H 7 10 B Rc1/8 4

W hen a current of 30m AD C or m ore i s appl i ed, t he over current ci rcui t i s archi ved, Er. 5 i s di spl ayed and t he operat i on st ops.

W hen a current of 30m AD C or m ore i s appl i ed, t he over current ci rcui t i s archi ved, Er. 5 i s di spl ayed and t he operat i on st ops.