10

151 170 270 308 261 1675 MHL2-25DZ-X85 9 106 128 178 224 174 1815 MHL2-25D1Z-X85 9 160 182 282 328 270 2500 MHL2-25D2Z-X85 9 178 200 320 366 308 2730 Closed C B A A Open D Open E Mounting side Provide clearance between the mounting side and adapter.

MK

89 67 6.6 0.1 50 0.15 76 M8 X 1.25 9 108 80 9 60 92 M10 X 1.5 REC Arm for width across flats RHC Rod end width across flats With arm MTS CC Model MKl32-llN MKl40-llN MKl50-llN MKl63-llN Model MKl32-llM MKl40-llM MKl50-llM MKl63-llM H A A D G B B E C C F D F G M8 X 1.25 18 6 36 6.2 67 14 18 20 9 45 35.5 25 53.5 M8 X 1.25 61 18 6 36 6.2 67 14 18 20 9 45 43 25 M10 X 1.5 77 22 8 46 8.2 88 18

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

Metal stopper screw L Shock absorber 8-9-16

2/3 Port Valve

Applicable fluids TL D DIN connector DIN connector with indicator light DL 6, 7, 9.

Refrigerated Thermo-chiller

Note 9) Required flow when a load is applied as shown in the cooling capacity when the facility water teperature is at 25C.

Membrane Air Dryer

IDG-DP01 IDG-DP01 (Option: S) 9 With O-ring (1 pc.)

Digital Flow Switches

l, 0 to 9 ft3 x 10-2 0 to 9 l, 0 to 9 ft3 x 10-1 Accumulated flow range Note 1) Power supply voltage Current consumption Power supply voltage for sensor 24 VDC (ripple 10% or less) (With power supply polarity protection) 55 mA or less (Not including the current consumption of the sensor) Same as [Power supply voltage] Power supply current for sensor Note 3) Max. 110 mA (However, the total

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

65.5 [67.7] 55.7 [57.9] 75.5 64.6 57.2 50.7 42 42 42 42 34.7 17 9 17 9 17 9 17 9 8.5 8.5 8.5 8.5 21 21 21 21 44.5 44.5 44.5 44.5 Refer to the page 68 for dimensions with connector cable. 20 Series SYJ500 Manifold Specifications Manifold Specifications Type 20 Type 40 Type 41 For internal pilot Model Type 21R Type 40R Type 41R For external pilot Single base/B mount Manifold type Common SUP

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 6.5 6.5 9 9 25 29 36 40 For the following bore/stroke sizes, through-hole is threaded over the entire length.

HRX-OM-M091

Terminal resistance 1 1 1 9 5 9 5 9 5 SDSD+ SDSG SD+ SD+ SD+ SG SDSG SDSG Terminal resistance120 Master This product This product This product (first slave) second slave 31st slaves Do not connect any wire to other PIN numbers. Fig 3.3-1 RS-485 connector connection Tips 1 master : 1 product, or 1 master: N products. In the latter case, up to 31 products can be connected.

CJ5-S

87.2 57 9 144.5 120 80 291 257 CG-E080SUS 100 22 235 14 23 6 40 80 87.2 57 9 144.5 120 80 292 258 CG-E080SUS Plug bolts are installed when shipped from factory.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

4 x M2.5 x 0.45 thread depth 2.5 12.5 K Bottom view of MXQ6-30 13223 6.5 20 16 13 3.5 0.3 19.2 20 Z ZZ G (NN 1) x H H 10.5 5.5 10.5 5.5 A B 3H9( ) depth 2.5 +0.025 0 3.2 3.2 6.3 7 7 12 1 A B NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 2.5 +0.025 0 HA GA A-A B-B (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16

15

9 @0 @7 @2 #1 r q w e y t i u !5 !1 !4 #2 #0 !0 @8 @6 #5 #3 @5 $2 #7 #6 With bumper bolt CY1SG/Centralized piping type For 6 For 6 $0 #9 23b 29b $0 #9 #4 $1 $3 With bumper bolt With shock absorber 1502 Magnetically Coupled Rodless Cylinder Slider Type: Slide Bearing CY1S Series Component Parts No. No.

CJ5-S

87.2 57 9 144.5 120 80 291 257 CG-E080SUS 100 22 235 14 23 6 40 80 87.2 57 9 144.5 120 80 292 258 CG-E080SUS Plug bolts are installed when shipped from factory.

MK

1.25 9 80 108 9 60 92 M10 x 1.5 RS Q G Arm for width across flats RS H A Rod end width across flats With arm RZQ F + Clamp stroke C + Clamp stroke MI W S CEP1 CE1 CE2 ML2B C J G5-S G-(0 to 10) CV (mm) (mm) H G F F E D D C C B B A A G Model MK32-N MK40-N MK50-N MK63-N Model MK32-M MK40-M MK50-M MK63-M MVGQ M8 x 1.25 25 9 35.5 18 45 36 20 53.5 67 14 18 6 6.2 M8 x 1.25 25 9 43 18 45 36 20

The MSQ compact rotary table is ideal for material transfer applications. It incorporates load bearings and a mounting face with a rack-and-pinion style rotary actuator. The seven sizes are 10, 20, 30, 50, 70, 100, and 200 with rotational adjustments from 0-190 degrees, and auto switch capability. Additional features include a hollow shaft and direct load mounting possibility. Rotary table

HRX-OM-R028

Terminal resistance 1 SD+ 1 SD+ 1 SD+ 5 SG 9 SDSD+ SDSG 5 SG 9 SD5 SG 9 SDTerminal resistance120 Master This product (first slave) This product second slave This product 31st slaves Fig 3.3-1 RS-485 connector connection Tips 1 master : 1 product, or 1 master: N products. In the latter case, up to 31 products can be connected.

High performance type Step Motor Controller (Servo/24 VDC)

Product Outline 5 2.1 Product features 6 2.2 Product configuration 7 2.3 How to Order 8 2.4 Option 9 (1) Actuator cable [5 m or less] 9 (2) Actuator cable [8 to 20 m] 9 (3) Actuator cable for actuator with lock (for sensor and lock) [5 m or less] 10 (4) Actuator cable for actuator with lock (for sensor and lock) [8 to 20 m] 11 (5) I/O Cable 11 (6) Communication cable for controller setting

IDX-OM-W028

Specification for Option M 9 1 Safety instructions . 9 1 9 2 Specifications . 9 2 9 3 Cautions for handling the motor type auto drain . 9 2 9 4 Electric circuit . 9 2 Chapter 10 Specification for Option R 10 1 Safety instructions . 10 1 10 2 Specifications of the GFCI . 10 1 10 3 How to connect the power supply . 10 1 10 4 Cautions for handling the GFCI . 10 3 10 5 Electric circuit . 10 3