HRX-OM-W038

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-W038 Contents 6.3 Option T [High-pressure pump] . 6-2 6.3.1 Option T [High-pressure pump] . 6-2 6.4 Optional Accessories [Electric resistivity /conductivity

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

1u @7 @6 q!7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

Programless controller Step motor (servo 24 VDC)

Brown 2 A B-1 Red 1 A A-1 Cable length (L) Orange 6 B B-2 Yellow 5 B A-2 8 8m *1) Green 3 COM-A / COM B-3 Blue 4 COM-B / A-3 A 10m *1) Shield B 15m *1) Cable color Terminal no. Vcc B-4 Brown 12 C 20m *1) GND A-4 Black 13 A B-5 Red 7 A A-5 Black 6 *1) Produced upon receipt of B B-6 Orange 9 order B A-6 Black 8 3 Only Robotic type cable can be selected. Red 4 signal Terminal no.

HEC_W-E

TABLE 2-1 DIVISION OF DANGER, WARNING, CAUTION, AND NOTE -2-2 TABLE 2-2 MEANING OF A SYMBOLS -2-2 TABLE 2-3 SAFETY INTERLOCK LIST(PART 1) -2-6 TABLE 2-4 SAFETY INTERLOCK LIST(PART 2) -2-6 TABLE 3-1 QUALITY STANDARD FOR WATER(TAP WATER) -3-4 TABLE 5-1 FUNCTION OF COMPONENTS -5-3 TABLE 6-1 SPECIFICATIONS OF HEC006 -6-1 TABLE 6-2 SPECIFICATIONS OF HEC012 -6-2 TABLE 8-1 AVAILABLE MODE IN LEVEL

A_HEC-OM-K001

V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N o r m a l Fig. 6-3 Alarm indication in the event temp. upper and lower limit occurs LIGHT W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E Remote off Fig. 6-4 Alarm indication in the event Remote off occurs 6.2 Alarm indication 6-2 A_HEC-OM-K001-1.7 Chapter 6 Alarms 6.3 Content of Alarms Table 6-2 Content of alarm (1/2) Temp.

Digital Flow Switch (Remote type sensor unit)

Examples of Internal Circuit and Wiring 1 to 5 V / 4 to 20 mA output type With temperature sensor 1 to 5 V output type PF3W5--1/2 PF3W5--1T Analogue output 1 to 5 V Analogue output 1 to 5 V Output impedance: 1 k Output impedance: 1 k Analogue output 4 to 20 mA Maximum load impedance Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 -22No.PF-OMN0010-J Flow Measurement Measurement

Air Cylinder

1 !5 u !9 t !4 w !7 @0 e r y @1 q i !6 !3 !0 !2 Component Parts Replacement Parts/Seal Kit No. Description Material Note Bore size (mm) Kit no.

PF-OMN0009_C

11/4 14 11/2 / OUT1 OUT2 1 1~5 V 2 4~20 mA 1T 1~5 V 1~5 V (PF3W3)1~5V (-1-1T) 4~20mA(47) -11No.PF-OMN0009CN-F PVC PF3W5 U 48 () 3 A : 11 21 10~100 L/min 30~250 L/min U PVC 2 11 21 R (PVC) 11 21 40 11 21 25 25A 30 30A 250L/min G : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] L/min L/min(gal/min) JIS K6742 1 2 1~5 V 4~20 mA (PF3W3) 1~5(1) 1 N M8(3m) -12No.PF-OMN0009CN-F

HRX-OM-O021

Measures . 1-6 1.5.1 Safety Instructions for Use . 1-6 1.5.2 Personal Protective Equipment . 1-7 1.6 Emergency Measures. 1-8 1.7 Waste disposal . 1-9 1.7.1 Disposal of refrigerant and compressor oil. 1-9 1.7.2 Disposal of product . 1-9 1.8 Material Safety Data Sheet (MSDS) . 1-9 Chapter 2 Name and Function of Parts . 2-1 2.1 Part number of product . 2-1 2.2 Name and Function of Parts . 2

VQ4000

(FD) D side Filter regulator SMC AP: Auto-drain (INA-13-854DG) Blanking plate (MP3-1) 212.5 (191: MP) MP: Manual drain (INA-13-854G) Plate assembly (VVQ4000 60A-1) 106 17 Drain port 6 AP: 10 MP: 6 Rc 1/2 (Supply port: Po) 4-Rc 1/2 17.5 42 70.5 119 " 185 5(R1), 3(R2) port P0 SMC R2 R1 5 1 P 3 30 PE 18 18 2-Rc 1/8 (Pilot EXH port) 70 (91) 29 38 163 L n Dimensions Formula L1 = 25n + 63, L2

JXCx-OMT0061CN

A-4) 13 A (B-5) 7 A (A-5) 6 S B (B-6) 9 B (A-6) 8 3 (14.2) (2 ) 2 1 (8) (1 ) B1 A1 (14) (18) (17.7) 6 5 (3 ) 2 1 B6 A6 15 16 (11) (30.7) 15.2 [820m] (1) (2) -L A B-1 2 A A-1 1 B (B-2) 6 8 8m* B (A-2) 5 COM-A/COM B-3 3 A 10m* COM-B/ A-3 4 B 15m* (3) Shield C 20m* Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 * A (A-5) 6 B (B-6) * 9 B (A-6) 8 3 (14.2) (2 ) 2 1 ( (14) (1 )

NVEPA|VEFseies

O F , < F , Q r '=r, @ r,> r, Pressure Raies (P1 =Primary Pressure) (P2=Secondary Pressure) NVEP3l2O-2 NVEP314O-'r -04 Primary Pressure P1 = 45 PSIG (3 KSI/cmr) E t2 I { t r S F g t o o E 28 (r. a ( 1 ) E a E a NVEHtl4O-1 E t ^ *t 6 S (0.15) (0.s) t . 5 ( 0 1 ) F 5 (0.05) NVEE NVEP CONSTRUCTION DETAIL Flow Raie'lvpo: VEF212O (2 Pdts) NVEF:112O (3 Porb) Pressuro llrp: NVEP3I2O (3 Porb) l l

Electro-Pneumatic Valve NVEP/NVEF Series

O F , < F , Q r '=r, @ r,> r, Pressure Raies (P1 =Primary Pressure) (P2=Secondary Pressure) NVEP3l2O-2 NVEP314O-'r -04 Primary Pressure P1 = 45 PSIG (3 KSI/cmr) E t2 I { t r S F g t o o E 28 (r. a ( 1 ) E a E a NVEHtl4O-1 E t ^ *t 6 S (0.15) (0.s) t . 5 ( 0 1 ) F 5 (0.05) NVEE NVEP CONSTRUCTION DETAIL Flow Raie'lvpo: VEF212O (2 Pdts) NVEF:112O (3 Porb) Pressuro llrp: NVEP3I2O (3 Porb) l

CNG

2$1@2@4!7 With rubber bumper: CNGBN $6 $0 $7 #2 #1 #3 #6 #9 y #0 $0 @6 q @3 !0 !1 u #4 $5 !5 !4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!9@1!8@0#8@9@7 tw MLGC With air cushion: CNGBA %5 %1 ^0 %6 %8$8 %0%7$9%9 %4%2%3^2^1 %6$8 %8 CNG MNB CNA CNS Long stroke CLS Description Material Note Component Parts No. No.

AMH

160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , AMH250 1 2 3 8 1 2 , AMH350 3 4 1 2 3 4 , AMH450 1 1 1 1 AMH550 AMH650 3 4 1 2 , , 14-20-34 6 Micro Mist Separator with Prefilter Series AMH AMH850 Dimensions Accessory D: With auto-drain (N.O.) for AMD850 female thread Option T: With element service indicator Courtesy of Steven Engineering

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

5 6 7 8 9 1 1 2 3 4 5 6 7 8 9 Double Double Double Double Double Double Double SI unit SI unit Single Single Single Single Single Single Single Single Single Single Single SI unit output no.

AME

55 110 50 88 3.2 1 , , , 1 1 3 4 4.5 4.5 6 257 314 406 30 40 30 10 15 15 16 20 24 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 44 66 96 9 11 13 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AME550 AME650 AME850 1 2 1 2 1 2 1 Please refer to page 14-20-57 for Made to Order Specifications. 14-20-41

CNG

2$1@2@4!7 With rubber bumper: CNGBN $6 $0 $7 #2 #1 #3 #6 #9 y #0 $0 @6 q @3 !0 !1 u #4 $5 !5 !4 @5 #5 CL Long stroke CL1 @8@9 @6$3o$2!3r!6i!9@1!

IDX-OM-W034

IDFB55E, 75E) . 5 3 Chapter 6 References 6 1 Specifications . 6 1 6 2 Refrigerant with GWP reference . 6 2 6 3 Dimensions . 6 2 6 4 Electrical Circuit . 6 4 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 5 Chapter 7 Specification for Option K 7 1 Safety instructions . 7 1 7 2 Specifications . 7 1 Chapter 8 Specification for Option L 8 1 Safety instructions . 8 1 8

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

2 3 4 5 Case Cover Element Seal Bracket 1 2 1 2 1 One-touch fittings w Replacement Element Part No. e q Part no.