Compact End Lock Cylinder Series CBQ2

Series CBQ2 Allowable Kinetic Energy Allowable Rod End Lateral Load 0.5MPa 0.4MPa With rubber bumper With auto switch (lateral resistance) 200 100 100 50 50 40 30 Allowable lateral load W (N) 63 20 Load weight kg 50 10 63 40 32 10 5 4 3 50 5 2 40 1 0 10 20 30 40 50 60 70 80 90 100 32 Stroke St (mm) 1 50 100 200 500 300 Maximum speed mm/s (Mounting orientation: Horizontal) W

IP8001 Series

to 10 (832) Integrated time setting; -10 to 10 (833) Differentiation time setting; -10 to 10 Table 13 Amount of change when set value is increased/ decreased by 1 Set value is 0 or more Set value is less than 0 Prop. gain 10% 10% Integ. time 50% 10% Deffer. time 10% 10% 8: When automation calibration is performed, PID constant is automatically set.

CG1

69 (77) 69 (77) 71 (79) 78 (87) 90 (102) 90 (102) 108 (122) 108 (122) 8 10 12 16 20 20 25 30 13 17 17 19 27 27 32 41 24 29 18 22 22 30 35 35 40 40 15.5 35 40 40 50 58 58 71 71 M4 X 0.7 Depth 7 5 5.5 5.5 6 7 7 10 10 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 11 11 11 12 13 13 201 to 350 10 (12) 19.5 16.5 20 26 32 38 50 60 M5 X 0.8 Depth 7.5 301 to 400 10 (12) 19.5 27 32 32 37 37 M5 X 0.8 Depth 8 35.5

ChemicalThermo-con

acid) H2SO4: 96% or less p 50 to 140F (10 to 60C) Ozone p Note 2) 50 to 140F (10 to 60C) Ammonium hydroxide NH3: 5% or less NH3: 5% or less H2O2: 20% or less p Note 1) 2) 50 to 140F (10 to 60C) Ammonia hydrogen peroxide solution p Note 2) 50 to 140F (10 to 60C) Sodium hydroxide NaOH: 50% or less p Note 1) 50 to 140F (10 to 60C) Deionized water How to read the table: p: Useable c: Consult

ISO Standard Hydraulic Cylinder

3 @1 @3 @2 e o !8 @7 #0 !7 @6 r u #1 t @4 @5 #2 @0 y i !9 !0 q !1 w !

MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.

Compact Cylinder with Lock Series CLQ

(mm) With auto switch Without auto switch Bore size (mm) Stroke range (mm) A BP C D E F G H I J K L M N O OA OB P Q RA RB S T U V Z B A B 82 36 Rc 1/8 10 to 50 15.6 depth 12 14 depth 10.5 Rc 1/4 92 46 63 15 20 77 10.5 38 M10 x 1.5 103 7 17 8 60 9 M8 x 1.25 53 16 4.2 93 1.6 47.5 16.5 19 92 46 75, 100 96.5 43.5 10 to 50 19.6 depth 15.5 17.5 depth 13.5 Rc 3/8 Rc 1/8 106.5 53.5 80 21 25 98 12.5

Compact Cylinder with Solenoid Valve/

Minimum Stroke for Auto Switch Mounting (mm) D-M9 10 D-M9V 5 D-M9W 15 D-M9WV 10 D-A9 10 D-A9V 5 Number of auto switches mounted Bore size (mm) 32 1, 40 50 2, 63 1 10 5 15 15 10 10 2 1 The outline dimensions for 5 mm stroke will be the same as those for 10 mm stroke. 2 The outline dimensions for 10 mm stroke will be the same as those for 15 mm stroke. 7 Prior to Use Auto Switches Common Specifications

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

40 Contents Description P473010-1 P473020-1 P473030-1 P473040-1 P473050-1 19, 20, 21, 23 Seal kit 4 Compact Rotary Actuator Rack-and-Pinion Type Series CRQ2 With auto switch With auto switch Sizes 10, 15 Sizes 20, 30, 40 With cushion Sizes 20, 30, 40 With auto switch and cushion Sizes 20, 30, 40 5 Series CRQ2 Dimensions 3H9 effective depth 2 Sizes 10, 15 TA 0.6 30 BU 2-M5 x 0.8 through

Clamp Cylinder Series CK1

9 @0 t q @2 w @3 e @4 @1 !5 !4 !6 y !7 !0 i u !8 MK CKQ CLKQ o CK1 !3 CLK2 !1 !2 @1 @4 Component Parts No.

CJP

MB C95 CA1 CS1 Standard stroke (mm) Rod end thread With thread Without thread B 5, 10, 15, 20 5, 10, 15, 20, (25), 30 6 10, 15 CJP D 10 15 F CDJP D 10 15 F 90 S With Auto Switch Number of auto switches Action Air cylinder with auto switch S 2 1 Mounting Bore Size * 5 stroke: S type only With auto switch 6 10 15 6mm 10mm 15mm Symbol Mounting Standard B F L D T Basic Flange Foot Clevis Trunnion

Air Fittings Fitting Series For Special Environment

Weight (g) Effective orifice(mm 2) A D1 D2 L1 L2 KRY06-02S KRY06-01S 1 8 14.6 22.6 36.6 16.8 24.8 38.8 32.3 31.6 41.6 10 41 23 27 29 24.5 28.5 30.5 27 30 32 36 31 33 37 1 4 10 22 6 44.4 43 19 5.8 14 17 12 14 17 16.8 3 8 1 8 KRY06-03S 45.5 17.7 KRY08-01S KRY08-02S KRY08-03S KRY10-01S KRY10-02S KRY10-03S 1 4 3 8 1 8 1 4 3 8 47.5 49 51.5 52.5 54 8 19.2 12 25 20.5 17 23.7 10 17 28.5 23 28.4 1

3 Port Solenoid Valve Metal Seal Series VZ200 1

2 01 02 1 2 (Lead wire length) 300 With light/surge voltage suppressor Applicable code O.D. 3.5 to 7 Pg7 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) 83 75.8 53.5 01 02 1 2 M plug connector: VZ4 5-M(Z)23 300 15 10 10 With light/surge voltage suppressor (Lead wire length) 3-Rc1/8, 1/4 M5 x 0.8 Max.10 98 (Pilot EXH) M5 x 0.8 (Pilot EXH) 4-15-14 15 Series VZ400 Manifold Specifications

Support Guide/11-LEFG Series

100 100 LEH LEY -X5 10 10 11LEFS 11LEFS Suction flow rate: 30 L/min Suction flow rate: 30 L/min 11LEJS 1 1 0 0.1 0.6 0.5 0.4 0.3 0.2 0 0.1 0.6 0.5 0.4 0.3 0.2 25AParticle diameter [m] Particle diameter [m] LEC 11-LEFS32 Speed 500 mm/s 11-LEFS40 Speed 500 mm/s LEC S 10 10 LEC SS-T ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEC Y Motorless Suction flow rate: 0 L/min ISO Class 5

Manifold Specifications

Applicable blanking plate assembly DXT199-22-1A Applicable individual EXH spacer assembly DXT199-29-1A Type 21 How to Order VF VV5Z5 05 21 1 4(A), 2(B) port VFR Stations P, R port thread type VP4 02 2 stations 1(P) port NPT G Nil Rc Rc 1/4 20 VZS 20 stations 00F 00N 3/5(R) port NPTF 00T VFS Rc 1/4 Note) For more than 10 stations, supply air to both sides of P port and exhaust air from both

KR

(mm) Connection thread R 10 D1 Note) D2 Model L1 L2 FR soft nylon FR double layer KRK06-02S KRK06-01S 1 8 12 10 33 13 21 35 25 26 36 33 MS 20.5 24.5 26.5 22 26 28 24 27 29 33 27.5 29.5 33.5 10 18 36.5 35 1 4 19 3.4 14 17 12 14 17 6 12.8 6.9 KRK06-03S 37 19.7 3 8 1 8 Applicable tubing T KRK08-01S KRK08-02S KRK08-03S KRK10-01S KRK10-02S KRK10-03S 1 4 3 8 1 8 1 4 3 8 39 41 42 43.5 45 15.2 12

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Load weight Allowable moment MY2H/m3 MY2H/M3 MY2H/M1 MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 20 20 20 20 Load weight kg Moment Nm Moment Nm Moment Nm MY2H40 MY2H40 MY2H40 MY2H40 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 4 4 3 3 3 3 MY2H16 2 2 2 2 0.2 MY2H16 MY2H16 MY2H16 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300 400500 1000 1500 100

7

9 t q @1 w e @0!4 @3 y !6 o u !7 @2 CK1C (Clevis width 12.5) @4 i !2 !0 !1 !3 !5 Component Parts MK No.

Clean Gas Filter

SFB104-M5 0.1 q e t r w Max. flow rate line Inlet pressure Pressure drop MPa 0.3 MPa 0.01 0.1 MPa 0.7 MPa 0.001 0.5 MPa IN 0.0001 100 0.1 1 10 y Flow rate L/min (ANR) Description No.

EX500

L dimension L dimension No. 6 7 8 2 3 4 5 1 0 7 185.5 0 98 2 3 4 5 6 7 1 0 0 8 198 1 110.5 6 7 8 4 5 2 3 1 1 9 210.5 123 2 M12 input block (n) 6 7 8 3 4 5 2 2 10 223 135.5 3 L dimensions 6 7 8 9 5 4 3 11 235.5 4 148 9 10 8 7 6 4 12 248 5 160.5 Connector type For M (m + n = 2 to 8) 10 8 9 7 5 173 6 10 11 9 6 11 10 7 12 8 Connector type For T (n = 1 to 8) 1686 Decentralized Serial Wiring (GW