Process Valve Series VNA

Note 2)) 5 to 50C (Air operated type: 60C) Proof pressure Applicable pressure range Note) Flow direction should be from port 1(A) to port 2(B) for vacuum applications.

Digital Flow Switches Series PF2A

Operating: 0 to 50C, Stored: 10 to 60C (with no freezing and condensation) Resistance Operating or Stored: 35 to 85%RH (with no condensation) 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.

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Note 3) Solenoid valve: Max. 50C Note 4) Synthesized effective area with 2 position.

Water-cooledThermo-chiller

(at 50C) Refer to page 107 for the typical physical property values by circulating fluid.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Compact size (Width: 15 mm) Low power consumption: 1.8 W DC Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50C (No freezing.

Large Size Vacuum Module: Series ZR

ZR1-F-100 to 0.5 MPa 5 to 50C 30 m PVF Refer to page 949 and 952 regarding pressure switch for vacuum.

3

(PF2A7H: 0 to 50C) 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) Monitor unit 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) 2% F .S. (15 to 35C) 5% F .S. (0 to 50C) 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 1% F.S. (Fluid: Dry air) Analog output: 3% F.S. 1% F .S. (PF2A70, PF2A7H) 2% F .S. (PF2A71) 1% F.S. (Fluid: Dry air) Analog output: 5% F.S. Monitor unit 0.1% F.S.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Contact SMC for CE-compliant products. 1250 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in Series VFR3000 [Option] Standard Specifications Fluid Air 0.2 to 0.9 MPa 0.1 to 0.9 MPa 10 to 50C (No freezing. Refer to page 5.)

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Operate in an ambient temperature range between 0C and 50C. 3. Operate in an ambient humidity range between 35% to 85% (with no condensation).

ZR

Model ZR1-FX Vacuum to 0.5 MPa 5 to 50C 30 m PVF 0.1 kg Operating pressure range Operating temperature range Filtration efficiency Element Weight (With bracket) Note) If not operated within the specified range of pressure and temperature, trouble may be caused.

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CCVS10-U1 Option Specifications Combined valve Control valve Stop valve, Skip valve Specifications Throttle valve Flow control valve Small flow Large flow Small flow Large flow Timid flow Small flow Large flow 0 to 0.7 MPa 0 to 0.7 MPa 0.3 to 0.7 MPa Operating pressure 0.3 to 0.7 MPa External pilot pressure 1.05 MPa Proof pressure 5 to 50C Ambient & Fluid temperature Turbine

2/3 Port Valve

Normally closed Normally open VNA01 VNA02 VNA03 Valve Double acting Pressure range Lubrication Temperature Style External pilot air 5C to 50C(Air operated: 60C) Note 1) No freezing Note 2) Lubrication is not allowed in case of seal material EPR.

ITV

/C or less 2% F.S. 1 digit or less MPa: 0.001, kgf/cm2: 0.01, bar: 0.01, psi: 0.1, kPa: 1 0 to 50C (No condensation) IP65 ITV10: Approx. 250 g, ITV20: Approx. 350 g, ITV30: Approx. 645 g (without brackets) Accuracy Minimum unit Output pressure display Ambient and fluid temperature Enclosure Weight The above characteristics (specifications) are confined to the static state.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

(No condensation) 1%F.S. or less 25 10C 1.5% F.S. or less 0 to 50C 0.3% F.S. or less Repeatability Between external terminal and housing 1000V AC, 50/60Hz for 1 min.

Base Mounted Metal Seal/Rubber Seal Series VQ

Outlet pressure (MPa) Outlet pressure (MPa) Specifications Maximum operating pressure 0.8 MPa Set pressure range 0.05 to 0.7 MPa How to order manifold VV5Q11-14C6FUO-DG2 5 to 50C Ambient and fluid temp.

PEEK

Air, Water, Pure water, Diluent, Cleaning solvent 75 kPa to 0.2 MPa 1.1 mm 10 ms or less (at pneumatic pressure) Zero leakage, either external or internal (at water pressure) 0.3 MPa 0 to 50C 0 to 50C (with no condensation) 18 l Free IP40 or equivalent 20 g 12, 24 VDC 10% of rated voltage Class B Operating pressure range Orifice diameter Response time Leakage Proof pressure Note 2) Ambient

Digital Flow Switch Series PFA For Air Series PFW For Water

10l/min 5 to 50l/min 20 to 200l/min 50 to 500l/min Flow rate measurement range Minimum setting unit 1% of maximum flow rate l/min, CFM x 10Accumulated flow l/min, CFM x 10Real-time flow rate Display units Note 1) l, ft x 10Operating pressure range Withstand pressure Pressure loss 0 to 0.5MPa 1.0MPa 10kPa (at 200l/min) 30kPa (at 500l/min) 3kPa (at 50l/min) 3kPa (at 100l/min) 0 to 9l 0 to 50C

CV/MVGQ

Single acting, Single rod, Spring return/Spring extend Action Non-lube Type Air Fluid 1.05 MPa Proof pressure 0.7 MPa Maximum operating pressure 0.15 MPa Minimum operating pressure 10 to 50C (No freezing) Ambient and fluid temperature RE A B Rubber bumper Cushion Not required (Non-lube) Lubrication REC JIS Class 2 Thread tolerance + 1.0 0 Stroke length tolerance CX 10, 16 Applicable bore

CV/MVGQ

Single acting, Single rod, Spring return/Spring extend Action Non-lube Type Air Fluid 1.05 MPa Proof pressure 0.7 MPa Maximum operating pressure 0.15 MPa Minimum operating pressure 10 to 50C (No freezing) Ambient and fluid temperature RE A B Rubber bumper Cushion Not required (Non-lube) Lubrication REC JIS Class 2 Thread tolerance + 1.0 0 Stroke length tolerance CX 10, 16 Applicable bore

VQZ1000/2000/3000

Cylinder side pressure (P2) I N I N O UT O UT Specifications 0.8 MPa 0.15 MPa 5 to 50C 0.60 dm3/(sbar) 180 c.p.m Maximum operating pressure Minimum operating pressure Ambient and fluid temp.