20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC?010%
20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC?010%
20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC?010%
20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%
20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%
to 230 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VAC, Single phase 170 to 253 VAC0.9Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.2SSCNET III (High-speed optical communication)USB communication0 to 55 (No freezing)90 or less (No condensation)20 to 65 (No freezing)90 or less (No condensation)Between the housing and SG: 10 (500 VDC)800
to 230 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VACSingle phase 170 to 253 VAC2.6Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.2SSCNET III (High-speed optical communication)USB communication32 to 131F (0 to 55C) (No freezing)90 or less (No condensation)?
to 230 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VAC, Single phase 170 to 253 VAC0.9Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.2CC-Link communication (Ver. 1.10)CC-Link Ver. 1.10 compliant cable (Shielded 3-core twisted pair cable) 11 to 642.5 M4000.2 or more1 station occupied (Remote I/O 32 points/32 points)/(Remote register 4 words
to 230 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VAC, Single phase 170 to 253 VAC1.5Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.2SSCNET III (High-speed optical communication)USB communication0 to 55 (No freezing)90 or less (No condensation)20 to 65 (No freezing)90 or less (No condensation)Between the housing and SG: 10 (500 VDC)800
to 230 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VAC, Single phase 170 to 253 VAC1.5Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.2CC-Link communication (Ver. 1.10)CC-Link Ver. 1.10 compliant cable (Shielded 3-core twisted pair cable) 11 to 645 M1600.2 or more1 station occupied (Remote I/O 32 points/32 points)/(Remote register 4 words
to 230 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz)Three phase 170 to 253 VACSingle phase 170 to 253 VAC2.6Single phase 200 to 230 VAC (50/60 Hz)Single phase 170 to 253 VAC0.2CC-Link communication (Ver. 1.10)CC-Link Ver. 1.10 compliant cable (Shielded 3-core twisted pair cable) ?
20,000 (Refer to page 71 for limit according to work load and duty ratio.)o0.021650/20Ball screwLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)6517528725Non-magnetizing lock1977.924 VDC 010%
E-MY2B_E_A Heavy load Standard load Midium load Light load 1 10 50 100 1 0.25 0.49 0.98 1.96 2 20 75 200 2 0.49 0.74 1.47 2.94 3 30 100 300 3 0.74 0.98 1.96 3.92 4 40 125 400 4 0.98 1.23 2.45 4.90 5 50 150 500 5 1.23 1.47 2.94 5.88 6 75 200 600 6 1.47 1.96 3.92 7.84 7 100 250 700 7 1.72 2.45 4.90 9.80 8 300 300 800 8 1.96 2.94 5.88 11.76 9 500 500 900 9 2.21 3.92 7.84 15.68 10 1000 1000 1000 10 2.45
Table 2 Facility water system Circulating type Transient type Item Circulating fluid Filling of circulating fluid Transient fluid pH [25C] 6.5 to 8.2 6.0 to 8.0 6.8 to8.0 Electrical conductivity (mS/m) [25C] 80 or less 30 or less 40 or less Standard items Chloride ions (mg/L) 200 or less 50 or less 50 or less Sulfuric acid ions (mg/L) 200 or less 50 or less 50 or less Acid consumption [pH4.8
Allowable power supply fluctuation: 3 phase 200 VAC +/-10% (50Hz); 3 phase 200 VAC to 220V +/-10% (60Hz) 3 phase with different voltage (IDF190 / 240D-9-): AC220V, 240V, 380V, 400V, 415V, 440V+/-10% Power supply cable specification Prepare the power supply cables below. Power supply cable: 10AWG (5.5mm2 or greater), cable O.D.
100 200 Purge air flow rate L/min(ANR) 25 50 11 22 Inlet air pressure MPa Inlet air temperature oC Inlet air saturation temperature oC Ambient temperature oC *Note 1 *Note 1 -15 -20 *Note 2 Standard performance conditions *Note 3 0.7 25 25 25 1L/min (ANR) {In case of inlet air pressure 0.7 MPa} Dew point indicator purge air flow rate 1/4 3/8 Port size 0.43 (0.51) 0.66 (0.76) 0.43 (0.51)
Tubing for AD27-D: I.D. 2.5 (3/32") or larger, Length 5 m (200 inch) or shorter Tubing for AD37, 47(N)-D: I.D. 4 (3/16") or larger, Length 5 m (200 inch) or shorter Tubing for AD38, 48(N)-D: I.D. 6.5 (1/4") or larger, Length 5 m (200 inch) or shorter Air Source Warning (1) Use clean air.
Tubing for AD27-D: I.D. 2.5 (3/32") or larger, Length 5 m (200 inch) or shorter Tubing for AD37, 47(N)-D: I.D. 4 (3/16") or larger, Length 5 m (200 inch) or shorter Tubing for AD38, 48(N)-D: I.D. 6.5 (1/4") or larger, Length 5 m (200 inch) or shorter Air Source Warning (1) Use clean air.
Tubing for AD27-D: I.D. 2.5 (3/32") or larger, Length 5 m (200 inch) or shorter Tubing for AD37, 47(N)-D: I.D. 4 (3/16") or larger, Length 5 m (200 inch) or shorter Tubing for AD38, 48(N)-D: I.D. 6.5 (1/4") or larger, Length 5 m (200 inch) or shorter Air Source Warning (1) Use clean air.
kPa 90% -ISA3-F ISA3-G ISA3-H 1 m 1 m 1 m [sec] [sec] [sec] [mm] [mm] [mm] 3 m 3 m 3 m [sec] [sec] [sec] [mm] [mm] [mm] 5 m 5 m 5 m [sec] [sec] [sec] [mm] [mm] [mm] -18No.PS-OMR0001CN-J 2 () [()][] 1.5 F42.51 m3 m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -19No.PS-OMR0001CN-J 2 ISA3-() ISO1179-1 1 2 3 4 5