Slider Type/Ball Bushing Bearing

Specifications Switch rail CY1L Applicable Series Bore size 6 to 40 Bore size (mm) Applicable stroke (mm) 6 10 15 20 25 32 40 20 to 25 to 35 to CY3B CY3R CY1S CY1L CY1L CY1H CY1H CY1F CYP D-X Technical Data 1539

3 Port Air Operated Valve

) 36 35 31 25 (17.5) 16.5 (45) 26.2 15 (20.9) (Distance between ports) 2.8 (54.5) 1/8, 1/4 1(P), 3(R) port 4.5 1P 26.5 NO 3 3R M5 x 0.8 (Breathing hole) 16 20.4 53.7 01 02 A B For vacuum/VPA342V-1(-F) 1/8, 1/4 2(A) port 26.2 2 x 3.2 (For mounting) 21.5 NC 2A 3.4 (1.6) 20.4 16 65.2 (9) 2 x 3.2 (For mounting) 1/8 12(PA) port (Mounting groove for M5 thread) (5.4) 12 (35) 36 35 31 25 16.5 (17.5

CE

19 49 60 9 M10 x 1.5 Rc 1/4 64 89.5 35 19 For rod nut and accessory bracket, refer to page 10-12-20.

CJ2X/CUX/CQSX/CQ2X/CM2X

Standard Stroke Bore size (mm) Standard stroke (mm) Auto switch Bore size (mm) Standard stroke (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Nil Without auto switch (Built-in magnet) 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Rod end thread For the applicable auto switch model, refer to page 10-3-12.

MVGQ

60 38 160 88 185 140 15 166 18 21 J VF3000 100 84 66 30 112 40 224 55.5 56.5 62 M14 x 2 35 M14 x 2 M14 x 2 41 44 80 190 108 221 170 15 200 21 25 Note 1) It is possible to manufacture the intermediate strokes other than the standard strokes by means of installing a spacer.

CXT

38.5 9 (9.5) 31.5 35 6.5 10.5 9.5 13.5 8.5 (9) 13 (13.5) Long Stroke Bore size (mm) 32 40 38.5 42 38 41.5 18 24 18 24 10 13.5 10 13.5 9.5 (10) 17.5 (18) 31.5 35 7 10.5 15 21 34 37.5 10 13.5 18 24 35 38.5 13 (13.5) 23.5 (24) ( ): Denotes the values of D-A72. 8-27-11 12 Series CXT Operating Range (Dimensions) Bore size (mm) 12 Auto switch model 16 20 25 32 40 D-F7, D-F7V D-J79, D-J79C D-F7W

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

5.5 34 64 22 76 34 76 Mounting pattern e DB3 A3 5 35 70 23 82 35 82 5 40.5 99.5 28.5 111.5 40.5 111.5 -X These values are given as a guideline including the hysteresis and are not guaranteed.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

(N) Operating pressure (MPa) Cylinder bore size (mm) 8 Piston area (mm2) 0.2 10 Symbol Specifications 50 0.3 15 0.4 20 0.5 25 0.6 30 0.7 35 -X16 Heat treated metal stopper -X23 Axial piping port set screw -X42 Rust proof guide -X51 Adjusting nut length specifications Weight Standard Stroke For the clean room specifications, refer to Pneumatics Clean Series catalog.

EXxx-OMW0014CN

No.EX-OMW0014CN-A PROFINET SI / / EX245-SPN1A/2A/3A(SI ) EX245-DX1() EX245-DY1() EX245-LA1/LB1(IO-Link ) EX245-EA2-() 1. 11 1.1. 11 1.2. 12 2. 13 3. 14 3.1. 14 3.2. 16 4. 22 4.1. 22 4.2. 26 5. 30 5.1. 30 5.2. 34 6.SI 35 6.1. 35 6.2. 37 6.3. 39 6.4.LED 40 6.5. 43 7.EX245-DX1 46 7.1. 46 7.2. 47 7.3. 48 7.4. 48 7.5 LED 49 7.6. 50 8.EX245-DY1 51 8.1. 51 8.2. 52 8.3. 53 8.4. 53 8.5.LED

EXxx-OMU0020CN

SIEMENS PLC . 23 5. . 35 5.1. . 35 5.2. PROFINET . 39 5.3. . 43 6. SI EX245-SPN1 . 44 6.1. . 44 6.2. . 45 6.3. . 46 6.4. LED . 47 6.5. . 50 7. EX245-DX1 . 51 7.1. . 51 7.2. . 52 7.3. . 53 7.4. . 53 7.5. LED . 54 7.6. . 55 8. EX245-DY1 . 56 8.1. . 56 2 No.EX-OMU0020CN 8.2. . 57 8.3. . 58 8.4. . 58 8.5. LED . 59 8.6. . 60 9.

Digital Flow Switch

Nominal thread size Required torque Piping port size Width across flats of attachment Rc1/2, NPT1/2, Rc3/4, NPT3/4 28 to 30 Nm 1/2 30 mm 3/4 35 mm Piping for the One-touch fitting For the one-touch fitting, use tubing with a tube inside diameter of 9 mm or more.

PFxx-OMU0002

PF3A703H (For 3000 L/min) PF3A706H (For 6000 L/min) PF3A712H (For 12000 L/min) 74 No.PF-OMU0002-D Dimensions Symbol Models A B D E F H K L N PF3A703H 130 45 79.1 55.3 22.5 25 35 60 30 4 x M4 x 0.7 depth 7 PF3A706H 170 60 94.1 70.3 30 68 45 80 40 4 x M5 x 0.8 depth 8 PF3A712H 200 70 104.1 80.3 35 85 50 100 50 4 x M6 x 1.0 depth 9 75 No.PF-OMU0002-D Lead wire with M12 connector (ZS-37-A) Pin

Digital Flow Switch (Remote type monitor unit)

procedure of Initialize mode 21 Function selection mode 26 Default settings 26 F_1 Input procedure of the Set value of instantaneous output 27 F_2 Input procedure of the Set value of instantaneous output (Auto-preset) 28 F_3 Input procedure of the Set value of accumulated output 29 Key-lock function 31 Maintenance 32 Troubleshooting 33 Cross-reference for troubleshooting 33 Error indication 35

Digital Flow Switch (Manifold type)

When 5 minutes interval is selected, take into consideration the maximum number of times it is possible to write to the memory device (electronic part), which is 1 million times (In case of 24-hour communication, 5 minutes access cycle (1 million cycles) = 18.50 million = approx. 35 years).

HRX-OM-W002

HRR Series 5.5 Advanced setting mode 5-35 HRX-OM-W002 Chapter 5 Display and Setting of Various Functions Set value Contents Initial value OFF Alarm is not generated. WRN Operation of this product will continue when the alarm occurs. Setting for electric conductivity rise alarm 9. Press the [] key. Displays screen for setting value of electric conductivity rise alarm threshold.

Rotary Table

External stopper 35 Mounting position of external stopper 36 Maintenance and Inspection 36 Regular inspection 36 Replacement procedure of the seal kit Troubleshooting 42 -1- Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

JXCx-OMY0004

INP Byte2, bit6=ON Held Byte2, bit4-5=OFF Byte3, bit0-7=OFF External lock Unlock (4) Input Byte5, bit0-1: Movement Speed mode and Byte6-35:Numerical operation data. E.g.)

LECP6_C

CN5I/O .23 6.1 /.23 6.2 /(NPNPNP ).23 (1) I/O (NPNPNP ).23 (2) I/O .23 63 /.24 64 I/O .27 7 .28 71 .28 72 .31 73 .33 8 .34 81 .34 82 .34 83 .35 1 .35 2 (.35 3 .35 84 .36 85 .36 9 .37 91 .37 92 .38 10 .39 101 .39 102 I/O .39 1 .39 2 .40 3 .41 4 HOLD.42 5 .42 2 - 6 .42 7 .43 11 .44 111 [5m ].44 112 [820m].44 113 [5m ].45 114 [820m] .45 115 I/O .46 116 .46 117 .47 12. .48 12.1 .48 12.2 .49 13

Fieldbus system (CC-Link compliant)

Specifications 35 Specifications 35 Dimensions 36 Output Unit Summary of Product Parts 37 Mounting and Installation 38 Installation 38 Wiring 39 Specifications 42 Specifications 42 Dimensions 42 -1No.EX-OMI0001-I Input Unit Summary of Product Parts 43 Mounting and Installation 44 Installation 44 Wiring 46 Specifications 50 Specifications 50 Dimensions 50 Maintenance 51 Troubleshooting 52

Vacuum Unit Ejector / Vacuum Pump System

KQ2P06 Model and Dimensions Symbol Applicable size d A L D Weight (g) Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4 18 35 8.5 1 Orange 09 5/16 20.5 39 10 2 Orange When existing product is used, please be careful with the interchangeability between existing product in the table below and ZK2A.