11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

1122Series MXP/MXPJ6 Air slide table 6, 10, 12, 16 How to Order Clean series 11 Vacuum suction type MXP 11 12 15 M9N MXP 22 12 15 M9N Copper, fluorine and silicon-free + low particle generation Number of auto switches Nil s n 2 pcs. 1 pc. n pcs. 22 Vacuum suction type Bore size Stroke mm Type of auto switch 6 10 12 16 5, 10 10, 20 15, 25 20, 30 Nil Without auto switch Refer to the table

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket (Option) B C A INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model Port size Rc 4 1 63 63 80 85 90 100 141 164.5 170 180 230 251 15 15 15 20 22 22 8 3 , , 8 3 4 1 2 1 Bracket dimensions E D C B A Model Port size 4 3 F 345 419.2

PSE550/300

ZSM Dimensions PF2 2 x 3.5 through IF Indicator light 24.3 37 27 Data 4.8 4.4 10.7 7.3 37 25 9 3000 15 11.7 10.4 2-M3 x 0.5 depth 4 With bracket A 37 27 40.9 68 25 38.5 4.2 11.6 69.5 7 20 1.6 A View ZS-30-A bracket 16-3-35 4 Controller Series PSE300 How to Order Input/Output specifications Unit specifications 0 1 2 3 4 5 NPN2 output + 1-5 V output NPN2 output + 4-20 mA output NPN2 output

Switches

("L" and "+" open) ("L" and "+" shorted) Light enters Light enters Light blocked Light blocked Lighted indicator light (Red) Lighted indicator light (Red) Light ON Light ON Light Off Light Off Time chart ON ON Output Transistor Output Transistor OFF OFF Operate Operate Load 1 (Relay) Load 1 (Relay) Return Return H H Load 2 Load 2 L L 319

Microspeed Cylinder: Double Acting/Single Rod Series CM2X ø 20, ø 25, ø 32, ø 40 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

UZ Without auto switch L 40 150 CM2X With auto switch CDM2X C73 Number of auto switches L 40 150 2 pcs. 1 pc.

Switches Solid State Switch Connection and Examples

("L" and "+" shorted) ("L" and "+" open) Light enters Light enters Light blocked Light blocked Lighted indicator light (Red) Lighted indicator light (Red) Light ON Light ON Light Off Light Off Time chart ON ON Output Transistor Output Transistor OFF OFF Operate Operate Load 1 (Relay) Load 1 (Relay) Return Return H H Load 2 Load 2 L L 319

VQZ100V-OMT0001

15 No.VQZ100V-OMT0001 No. () 1ISO VG 32 R ? ? ?

AMPSeries

Particle density for particle of 0.3m or larger is less than 3.5 particles/l Since it is possible to release exhaust air from pneumatic equipment directly into a clean room, piping to exhaust ducts is unnecessary.

MHx-OMY0001

&WEB -14- 3. 5mm B B B A A () A B 0 A B A mm B Nm A B MHM-16D1 2 10 6 1.5 5 MHM-25D1 3 14 8 5.2 5 MHM-32D1 3 14 8 5.2 5 MHM-50D1 5 24 17 42 5 -15- D(mm) L(mm) MHM-16D1 14 25 MHM-25D1 19 37 MHM-32D1 19 43 MHM-50D1 30 63 4. 2 1 n /WEB Best Pneumatics m () 0.5 ( ) 3 (NPN) 3 (PNP) IC 2 3 (NPN) IC 3 (PNP) 2 PLC 2 3 (PNP) 3 (NPN) IC (2 ) 2 1 0.5mM9NW 1m M M9NWM 3m L M9NWL 5m

ZISE30A.eng

Danger: Maintenance Switch ON At normal output Switch OFF M3x5 L M3x5 L M3x5 L Time [s] How to reset the product after a power cut or forcible de-energizing The setting of the product will be retained as it was before a power cut or de-energizing.

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

Precision Clean Regulator

min (ANR) Flow rate L/min (ANR) SRP1101-01 Conditions/Inlet pressure: 0.5 MPa SRP1-01 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure Characteristics (Representative value) Fluid: Air Initial

sResponse timeHysteresisPower supply voltageResistancePF2A710Air, Nitrogen0.5 to 10.5 l/min0.5 to 10.5 l/min1 to 10 l/min0.1 l/min0.1 l/pulseReal-time flow rateAccumulated flow0 to 50C?5% F.S. or less?1% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)150 mA or less250 g1/8, 1/4Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?