IIIIIIIIII

REGULATOR TYPE Constant Bleed, Relieving WETTED MATERIALS Polysulfone, Silicone, Stainless steel SUPPLY CONSUMPTION See Graph MAX SUPPLY 35 PSI (242 kPa) TEMPERATURE RANGE 40 150 F (4 66 C) EFFECT OF SUPPLY VARIATION < 0.02 PSI (0.14 kPa) per 1 PSI (6.89 kPa) supply change when dead-ended REPEATABILITY < +/0.05 PSI (.35 kPa) DRIFT < .03 PSI (.21 kPa) after 24 hours RECOMMENDED FILTRATION

Vacuum

(station 4) Noter Order lett to right (station 1-10) facing tension bolt & filter cover 52 IIIZM $eri Manifold Dimensions inch (mm NZZM05-T068 ) t n: station L1 1 .73 @4\ 2.36 (60) 2.99 (76) 3.62 (92) 4.2s (108) 4.88 (124) 5,51 (140) 6.14 (156) 6.77 (172\ L2 2.20 (56) 2.83 (72\ 3.46 (88) 4.09 (104) 4.72 (1201 s.35 (136) 5.98 (1s2) 6.61 (168) 7.24 (18r'.

Stainless Steel 316

Note 1) P Model Weight (g) W L1 L2 P M1 M2 (mm) 4 6 8 10 12 KQGU04-00 KQGU06-00 KQGU08-00 KQGU10-00 KQGU12-00 4.2 10.6 21.2 41 16.8 10.6 18 17 35 L2 M1 10.6 13 26 42.9 17 13 18.8 17.8 54 L1 25.6 15 30 47.7 18.7 15 20.9 19.9 75 18 40 36 52.8 20.5 18 23 22 114 M2 N 57.4 20.8 41.6 57.8 21.9 21 24.8 23.8 175 Note 1) D is maximum diameter.

Compact Cylinder: Standard Type Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 2

Bore size (mm) Standard stroke (mm) Minimum Operating Pressure (MPa) 20, 25 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Bore size (mm) 12 16 20 25 32 40 50 63 80 100 0.07 0.05 Pneumatic (Non-lube) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 0.18 0.10 Air-hydro 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 50, 63 80, 100 Manufacture of Intermediate Stroke Spacer is installed in the standard

48

CN5 parallel I/O connector CN4 serial I/O connector 150 132 141 CN3 encoder connector CN2 motor power connector CN1 power supply connector 4.6 for body mounting b) DIN rail mounting (LECP6llD-l) (11.5) Refer to page 14 for L dimension and part number of DIN rail. (81.7) 35 66 1 31 64.2 35 167.3 (When locking DIN rail) 173.2 (When removing DIN rail) 150 132 (91.7) 15 Controller (Step data

Step Motor Controller (Servo / 24 VDC)

Setting Data Entry . 35 7.1 Step data . 35 7.2 Basic parameter . 38 7.3 Return to origin parameter . 40 8.

VM

x 53 18 x 28 x 87 18 x 30 x 91 26 x 35 x 94 23 x 40 x 115 30 x 40 x 57 VA VM VR VH VHS Roller lever Adjustable roller lever Adjustable rod lever P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Dual pressure is available only on external pilot. 5-6-3 Mechanical

Compact Cylinder: Standard Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

-XC6 -XC8 -XC9 -XC10 -XC11 Adjustable stroke cylinder/Adjustable extension type Air-hydro type (mm) Adjustable stroke cylinder/Adjustable retraction type Bore size 20, 25 32, 40 50, 63, 80, 100 Standard stroke Dual stroke cylinder/Double rod 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Dual stroke cylinder

OMU0023

Minimum value for the LAT3-10: -10 m) Minimum value in ABS operation: 0 35 - Note 2: Refer to the following examples for how to set the pushing speed. For "Pushing Speed" use 32768 as base value, and add speed in [mm/s]. If no value or a value equal to or less than 32768 is input, the pushing operation will not be performed, even if a thrust setting value has been input.

OMR0031

Incorrect Parameter input Modify the parameters and test the operation. 9.3 Basic parameter setup (P.35) Moved normally, but stopped working Check for the possibility of momentary voltage drop due to an inadequate power supply capacity, or that the power supply is an in-rush current limited type. 3.

ZQ-OM01301

ZQ-OM01301-A Maximum vacuum release flow rate Vacuum release flow rates in product specifications and according to the V port size [L/min (ANR) ] Supply pressure error V Port [MPa] ZQ05A ZQ07A ZQ10A ZQ000A Size Common Individual Common Individual Common Individual Common Individual PD PD PD PD PD PD PD PD 3.2 0.1 16 14 11 23 0.2 26 23 19 38 0.3 39 31 35 28 29 22 52 43 45 39 47 41 38 35 66

PSxx-OMU0005CN

No.PS-OMU0005CN-C // ZSE20B(F) ISE20B 2 8 10 11 15 15 17 20 [] 23 24 3 25 27 29 29 29 F0 31 F1 OUT1 32 F1 OUT2 35 F3 37 F4 38 F5 FUNC 40 F6 42 F10 43 F11 49 F80 50 F81 51 F82 53 F90 54 F96 56 F97 57 F98 59 F99 61 62 66 66 67 76 76 79 -1No.PS-OMU0005CN-C (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

PSxx-OMS0006CN

No.PS-OMS0006CN-G / / ZSE20(F) ISE20 2 8 10 11 14 14 16 18 [] 20 21 3 22 24 26 26 26 F0 28 F1 OUT1 29 F3 32 F4 33 F6 35 F10 36 F11 41 F80 42 F81 43 F82 45 F90 46 F98 48 F99 49 50 54 54 55 62 62 64 -1No.PS-OMS0006CN-G *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

Digital Gap Checker ( compatible)

series Table of Contents Before Use Safety Instructions 2 Features 7 Model Indication and How to Order 8 Summary of Product parts 14 Specification 15 About this product Specifications (ISA3) 15 Specifications (Regulator) 17 Specifications (2 port solenoid valve) 17 Characteristics graph 18 Dimensions 21 Mounting and Installation 27 Piping 27 Installation 30 Installation Wiring 35

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Dimensions L A LA Attached from top W C PA MM Note 1) M F HB HA Note 2) Attached from bottom: MD R Body B (mm) Note 1) Note 2) B C F HA HB L LA MM MD M PA R W A Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 16 35 6.5 5.5 16.5 23 57 25 M4 x 0.7 M3 4 25 6 36 18 36 6.5 5.5 17 23.5 66 30 M4 x 0.7 M3 4 27 6 37 20 46 8.0 5.5 21 28.5 70 30 M5 x 0.8 M4 5 36 7 47 22.5 60 9.5 6.0 27.5 36 80 35 M6 x 1.0

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

SB RA AA Counter bore depth 9 (mounting hole) 6.4 AB 3 35 35 RA 5 VA, depth VB 8 NA B RB RB XA, depth XB 8h9 0 -0.036 2-UA, thread depth UB (mounting threads) Q 4.5 20 20 FX FY FZ (Open DO) (Closed DC) WA, depth 2 4-M4 x 0.7, thread depth 8 Attachment mounting threads CB CA M5 x 0.8 (finger opening port) Open EO Closed EC 9 L J M5 x 0.8 (finger closing port) G I 2 (mm) RB 25 28 I 6 7 Model

e-Rodless Actuator

M2 M3 m2 m3 16 25 16 25 5 4 3.5 18 16 14 E-MY2C 13 14 10 35 35 30 7 6 7 15 13 13 E-MY2H 28 26 26 32 30 30 The above values are the maximum allowable values for moment and load weight. Refer to each graph regarding the maximum allowable moment and maximum load weight for a particular slide table speed.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

head plug) M5 x 0.8 (Port) (WW) GB PP XX XX G Centralized piping Centralized piping 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring) Y Bore size (mm) 16 20 J M5 x 0.8 M6 x 1 MM M4 x 0.7 M5 x 0.8 A B 6.0 7.5 C 3.5 4.5 CH 25 26 G 13.5 12.5 GA 8.5 GB 16.2 20.0 H 52 58 K 10 12 L 110 130 LD 3.6 4.8 LH 38 39 LL 35

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Example) D-A90L Contact protection box OUT () Brown [Red] Reed switch CD-P11 OUT () Blue [Black] CD-P12 Auto Switch Weights D-A93(V) (g) D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V LED Type Brown [Red] Contact protection box OUT (+) Brown [Red] Resistor Lead wire length 0.5m 7 7 6 7 8 8 Reed switch Zener diode Lead wire length 3m 35 35 30 35 41 41 CD-P11 OUT () Blue [Black] CD-P12 Blue [Black]

Stopper Cylinder Adjustable Mounting Height Type Series RSG

B 35 40.5 QA 6 8 QB 13 16 QV 33 38.5 A 47 58 Bore size (mm) 40 50 21 Adjustable Mounting Height Type Series RSG Rod End Configuration Lever Type with Integrated Shock Absorber Variable energy absorbing type/Flange mounting These drawings (2 items) show the piston rod extended.