Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/4, Piping Entry Direction: Bottom Side, Output Specification: E [1 PNP Outputs + Analog (1 to 5 V)], Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Panel

CY1F

T Note1) EB LL Concentrated piping on right (CY1F10 to 25R--) KA KB HW EW GD GC 2-P (Hexagon socket head plug) Hexagon socket head bolt For adjustment bolt fixing ES 2-P (Piping port) EY HA EH KC GB KH H GB GA G GA HB KW N N Adjustment bolt A Z + Stroke Concentrated piping on left (CY1F10 to 25L--) KA KB EW 2-P Hexagon socket head bolt For adjustment bolt fixing HW ES (Piping port) 2-P (Hexagon

VCB

Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5 83 66 50 99 50 44 59 22 1/8 VCB21 M4 12.8 18 28 12.5 8.5 31

IDX-OM-U022

4 P 5 X4 PRR COM1 () X0 6 THR X1 THS2 THS1 CM L X2 OLR N PRS2 PRS3 MC1,2 X3 EDV PE P P THR THS1,2 24V TB1,2 T V V FM1,2 SWL PRR PRS1 PRS2 PRS3 PLC GFCI EDV IDFA100F150F 6 6 6.4 IDX-OM-U022 6.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Construction VHS20/30 VHS40/40-06/50 y i u w w t t r q IN OUT OUT IN q e o EXH. EXH. VM Component Parts No.

REC

If supply pressure is other than P = 0.5 MPa, please figure out a max. stroke, using proportional calculation.

The ISE2 series is a compact, pressure switch (for positive pressure) and can be integrated with ZX or ZR vacuum systems. The ISE2 series pressure switch has a quick response time of 10mS and the plug connector option makes wiring easy and simple. PRESSURE SWITCH, ISE1-6. 3 SCREEN HI PRECISION DIG PRESS SWITCH. 116.00000 lb. N59.

MLGC

B76 B73 I.C. 5V P P P P P P P P P P P P P P P P P 3 wire (Equiv.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

DA H V R T VW PW ! CV !

Micro-Mist Separator with Prefilter Series AMH

---t;F=f=='Tjt IN Bracket (Option) N ...'---Ht-t---t-+-H I--i IN o I w c.

Booster Regulator Series VBA1110 to 4200 1

(t) is given for 10 l tank by the graph. Then, the charging time (T) for a 100 l tank, T = t x = 49 x = 49 (s). V 10 10 10 T = t x = 110 x = 110 (s). V 10 10 10 T = t x = 2.4 x = 24 (s).

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

Thermo-con/Rack Mount Type

Option symbol P High-Pressure Pump Mounted P HECR Applicable model HECR002-A5-P HECR004-A5-P HECR006-A5-P HECR008-A5-P HECR010-A2-P HECR008-W5-P HECR012-W2-P High-pressure pump mounted Possible to choose a high-pressure pump in accordance with users piping resistance.

C95Series

l. 2 pes , ~~~ t~ _ ql _ ~fqe) -25 70 75 95 120 125 130 !i 1 pc. 10 0 DF!

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

D20Port Connection port on 2 sides Port (Nominal size) 10 15 20 30 Auto switch Series Variations MHR2 P. 12-5-4 to P. 12-5-17 2 Finger MDHR2 Rotary actuated air gripper MHR3 P. 12-5-18 to P. 12-5-26 3 Finger MDHR3 12-5-3 4 2 Finger Rotary Actuated Air Gripper Series MHR2/MDHR2 Size: 10, 15, 20, 30 How to Order MHR 2 10 R Without auto switch With auto switch (Built-in magnet) MDHR 2 10 R M9N

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

VB U X PW VA H NL HB HA: T groove for hex. bolt XAH7depth XL DB 2-P GB GA GC 6+0.05depth 6 o PB K J G (Plug) 30 S PA + Stroke C + Stroke FA FB SB SA FC B + Stroke A + Stroke AA + Stroke 60 Turntable angle detection switch 2-P E (mm) Bore size (mm) FB FC G GA GB GC H HA HB J K L MM ML NN NL OA B C DA FA Standard stroke (mm) 63 80 100 77 96.5 116 20 25 30 10 12 15 39 45.5 55.5 103 121.5 145

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

PA300/500/700

56.9 55.9 25 24 18.5 12 (P port) Rc 1/8,1/4 A B (A port) Rc 1/8,1/4 Base mounted: VPA344V12 65.6 39 12 30 (PA port) Rc 1/8 2(A) NO 26.5 PA 35 43 3(R) 1(P) NC (R port) Rc 1/8,1/4 39.2 Switch mark (Mounting hole) 24.5 26.7 56.9 55.9 25 24 18.5 12 (P port) Rc 1/8,1/4 5-5-16 5 3 Port Air Operated Valve Series VPA300/500/700 Dimensions A B Body ported: VPA54231 83.9 26.1 Rc 1/8 3.5 NO NC (PA

E,R.L.

Exr 27N-4O (40pm), 2NB '||oL: O.der ol assembly (Erample) OO' NAF + NAFI + iIAL Port Atlachment modl Air entry Port sire Applicable 0 6 % N P T t o I N P T Description Location s MF +NAq +a +M! NAF +6+ NAR NAC50?