Compact

A B W A B W A B W 12 6.2 6.2 3.8 6.2 6.2 1.8 6.2 6.2 5.8 6.2 6.2 3.8 16 6.7 6.7 3.3 6.7 6.7 1.3 6.7 6.7 5.3 6.7 6.7 3.3 20 7.5 10 7.5 10 7.5 10 2 7.5 10 25 8 12 8 12 8 12 8 12 Auto Switch Mounting Height U [mm] Auto switch model Bore size D-M9V, D-M9WV, D-M9AV U 12 19.5 16 21 20 23 25 24.5 W A B A Operating Range [mm] Auto switch model Applicable bore size 12 16 20 25 D-M9m(V)/M9mW

LG1H

Nil T Nil W Motor specification G R Y Matsushita Electric Industrial Co., Ltd.

Modular F.R.L. Unit

e Drain cock with barb fitting: 6 x 4 nylon tube W AC25 to 60 q w Note 3) Name plate, caution plate for bowl, and pressure gauge in imperial units (PSI, F) q w Z AC10 to 60 w q e When more than one specification is required, indicate in ascending alphanumeric order.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

For connector cable of M8 connector, refer to page 90. 25 Series SYJ5000 Construction 2 position single 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t rw 5 (R1) 3 (R2) 1

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

N.O. 1 (P) 3 (R) 1 (P) 3 (R) q e t r q e t r SY SYJ VK A A VZ u u VT VT P R P R VP w w VG y y VP Component Parts Replacement Parts VQ Description Body Piston plate End cover Piston Spool valve ass'y Description Sub-plate Pilot valve Note White White White Note Zinc die cast Parts No.

Serial Network

U, D)-SSL1 Y VQ2000/4000/5000 EX123 (U, D)-SSL2 Y IP53 or NEMA12 comes as optional.

CXS

9 from the chart above CXSM32-PS CXSL15APS CXSL20APS CXSL25APS CXSL32APS 8-28-21 21 Series CXSJ Construction: Axial Piping CXSJ6P, CXSJ10P e q t w r u y i o Component Parts No.

CXS

8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o MX MTS MY CY !3 y !1 e q !3 y !1 q @7 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CXSJM20 to 32 CXSJL20 to 32 CX @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !

Air Cylinder Series MB

E1 L1 R1 E1 L1 MM NDH10 NX U1 NDH10 NZ A A1 R1 U1 MM NX 32 40 50, 63 80 100 125 32 40 50, 63 80 100 125 20 22 28 40 40 46 30 40 50 65 65 I-03M I-04M I-05M I-08M I-10M I-12M Y-03M Y-04M Y-05M Y-08M Y-10M Y-12M +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 0.10 0.30

Manifold Specifications

VQ7 C4 C6 VZ3000-50A-1Manifold block assembly q (a) Bolt (Both sides) EVS For D side, With D-sub connector and P/R port with One-touch fitting for 8 SUP/EXH block assembly VZ3000-51A-1D w D side For U side, With D-sub connector and P/R port with One-touch fitting for 8 For D side, set with w VFN SUP/EXH block assembly VZ3000-51A-1U e DIN rail End block assembly VZ3000-52A-2D r VZ3000-52A-

VXD21/22/23

Option Stainless steel Standard Brass BC6 Brass BC6 NBR Standard Brass BC6 Brass BC6 NBR Option Stainless steel 10A to 25A 15A to 25A Body Body q q 32A to 50A 32A to 50A Stainless steel Stainless steel 10A to 25A 32A to 50A 15A to 25A 32A to 50A Bonnet Bonnet w w FKM/EPDM Stainless steel, FKM Stainless steel, EPDM FKM/EPDM Stainless steel, FKM Stainless steel, EPDM Stainless steel, Brass

SJ3A6

F1 Release pressure side filter y t r q e u w !

High Vacuum L Type Valve

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

10

1 u w e t y i o !2 No.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

Payload W (kg) 9-14-7 Series ML1C Basic Type +0.06 +0.01 AA depth BB 4-V depth W 4-S through, counterbore T, depth U +0.06 +0.01 CC depth DD B + Stroke Manual override rod A + Stroke 3-Rc FF Actuating port Actuating port 3-Rc FF Brake releasing port 2-Rc FF Actuating port 5 depth 5 +0.06 +0.01 5 depth 5 2-Rc FF Actuating port +0.06 +0.01 4-Y depth Z P + Stroke Bottom Side Piping Port Size

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Payload W (kg) 9-14-7 8 Series ML1C Basic Type +0.06 +0.01 AA depth BB 4-V depth W 4-S through, counterbore T, depth U +0.06 +0.01 CC depth DD B + Stroke Manual override rod A + Stroke 3-Rc FF Actuating port Actuating port 3-Rc FF Brake releasing port 2-Rc FF Actuating port 5 depth 5 +0.06 +0.01 5 depth 5 2-Rc FF Actuating port +0.06 +0.01 4-Y depth Z P + Stroke Bottom Side Piping Port Size

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

e r t y u i o !

S070

DC 0.35 W DC 0.1 W DC (at holding) with power saving circuit Note 1) VZ VS VFN Note 1) With the 0.1 W DC specification, keep the vibration/impact within10/50 m/s2. 0.35 W DC at inrush (20 ms) and 0.1 W DC at holding.

Multistage Ejector Series ZL112.212

Rc1/2 G1/2(3) Nil F N T 1/2-14 NPT 1/2-14 NPTF P Note 1) W/ unit switching function is not permitted to sell for the domestic use in Japan, because the new Weight and Measure Act has been implemented since October ,99.

3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 For details about certified products conforming to international standards, visit us at www.smcworld.com.

SY1 4, SY1 4A only 1 2 1 2 4-3-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) i q y e r w V100 SY SYJ VK VZ VT VP A R P !1 o u t !0 VG VP S070 VQ VKF Part no. Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !