SMC Corporation of America
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(REFRIGERANT) IDFC60-23 W R 0001 (2018 4 ) W R 0001 2017 2018 2019 2020 V W X Y A Z 1 2 3 4 o P Q R o 1 Z 12 IDFC60/70/80/90 Series 1-4 IDX-OM-W095 1.3 HFC 1-4 IDFC60/70/80/90 Series 1-5 IDX-OM-W095 1.4 / 1 1.5 () IDFC60/70/80/90 Series 1-6 IDX-OM-W095 2 2.1 IN OUT (ONOFF ) 6-4 6-4 L N PE 3-5 IDFC60/70/80/90 Series 2-1 IDX-OM-W095 () IDFC60/70/80/90 Series 2-2 IDX-OM-W095 3

2 w y r !0 e PF2A Number Parts Material 1 New PFA Body PF3W 2 New PFA Sensor 3 Super PFA Tube LFE 4 PPS Housing A 5 PPS Housing B PF2D PF2D 6 PPS Housing C 7 POM Bushing IF 8 PPS Cap 9 FKM Gasket !1 q t i 10 FKM O-ring PF2D540 o !0 u !0 !2ywr e 11 Stainless steel 304 Thread 12 PVC Lead wire !

Motor output [W]/Size [mm] 100/40 200/60 Motor type AC servo motor (100/200 VAC) Electric specifications Encoder Motor type S2, S3: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7: Absolute 18-bit encoder (Resolution: 262144 p/rev) Power consumption [W] Note 7) Horizontal 65 80 Vertical 165 235 Standby power consumption when operating [W] Note 8) Horizontal 2 2 Vertical

7. * The seal kit includes 2 cushion seals, 1 rod seal, 1 piston seal, and 2 tube gaskets. 1.7-27 Series MBlQ Basic/(B) G G Cushion valve W V Port 2-Rc(PT)P MM D E MB Effective thread 2 X 4-J lC lB MA A K F N N S + Stroke H ZZ + Stroke (mm) Stroke range Width across flats Bore (mm) Effective thread length A D Ee11 F N G P MA S MB V J W K H ZZ MM lC lB 32 40 50 63 80 100 22 30 35 35 40 40

(Refer to page 338.) 348 Compact Guide Cylinder Series MGQ Bore Size 32 to 100: MGQM, MGQL 4 x YY depth YL X W + Stroke Z 4 x MM depth ML 4 x NN through 2 x P DB DA R H V T PW GB GA 2 L F C + Stroke G TB TA S Q K J B + Stroke E MGJ A + Stroke MGP MGQM, MGQL Common Dimensions (mm) P PW Bore size (mm) 32 40 50 63 80 100 Standard stroke (mm) B MGQ C DA F G GA GB H J K L MM ML NN Q R S TN TF

DC (17 mA), 0.95 W DC (40 mA) Note 3) Power consumption (Current) 12 VDC 0.4 W DC (34 mA), 0.95 W DC (80 mA) Note 3) Note 1) Use dry air to prevent condensation when operating at low temperatures.

Nil T Nil W Motor specification G R Y Matsushita Electric Industrial Co., Ltd.

Material Aluminum die-casted Note Platinum silver q Description Sub-plate Platinum silver Solenoid assembly Common with Series VZ 000 1 5 Thread type Nil: Rc F : G N: NPT T : NPTF u Aluminum die-casted DXT192-14-1P Piston plate Body DXT170-CEpoxy/Stainless steel Resin Resin Black i w e Piston Spool valve NBR 13 x 11 x 1 O-ring o r Aluminum, HNBR t Resin End cover y Stainless steel Spool

8 w e q !1 !0 !6 CL MLGC r CNA !2 !3 t !

Real-time switch output Hysteresis mode ON Flow rate conversion YES OFF P-1 P-2 Normal condition {0C, 101.3 kPa, Dry air} or standard condition (ANR) {20C, 101.3 kPa, 65% RH} can be selected.

P.506 P.509 KR KA KQG2 KG KFG2 MS KKA Series TL/TIL TD/TID TH/TIH TLM/TILM KP Super PFA FEP Modified PTFE PFA Material Chemical resistance LQ 260C 260C 200C 260C Heat resistance Flexibility MQR Ion elution T T Internal smoothness Air, Water, Inert gas Chemicals, Deionized water Chemicals, Deionized water Fluid IDK 4 to 19 4 to 12 4 to 12 2 to 25 Tubing O.D.

+ Stroke AA D across flats 2-EE (NPTF) C 4-FB (Hole) KK EA MM BA CJ1 B R E CJP CJ2 F W J G TF CM2 WF LF + Stroke UF A ZB + Stroke CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB MM KK E A AA B BA C D EA EE F W FB G J R TF UF WF Y P ZB LF Bore size (in) 150

+ Stroke AA D across flats 2-EE (NPTF) C 4-FB (Hole) KK EA MM BA CJ1 B R E CJP CJ2 F W J G TF CM2 WF LF + Stroke UF A ZB + Stroke CG1 MB LF ZB P Y WF UF TF R J G FB W F EE EA D C BA B AA A KK MM E Bore size (in) 150 (1.5") 3 5/8 4 3/4 2.36 1.71 1 3 3/8 2 3/4 1.43 1.1 1.26 5/16 5/8 3/8 3/8 0.3 9/16 3/8 1 1/8 1 1/8 2.02 3/4 7/16-20 5/8 2 MB1 200 (2") 3 5/8 4 3/4 2.4 1.71 1 4 1/8 3 3/8 1.84

(21 mA) 1 W (42 mA) 1.5 W (63 mA) 1 (P) 3 (R) DC VKF Grommet Plug-in, L plug connector, M plug connector (With light/surge voltage suppressor) Electrical entry Normally open VQZ (A) 2 Note 1) Based on JIS B 8374-1993.

Note 6) ( ) values insides denote the air passage for normally open type. 4-12-8 3 Port Solenoid Valve Series VQ100 Construction q e r t u w V100 SY SYJ VK y VZ i VT VP R A P VG o VP S070 VQ VKF VQZ (For N.C. valve) VZ Component Parts VS Description Material Resin Stainless steel Stainless steel, Resin Stainless steel NBR Carbon steel NBR No. q w e r t y u i Solenoid coil Body Fixed iron

Note 6) ( ) values insides denote the air passage for normally open type. 4-12-8 9 3 Port Solenoid Valve Series VQ100 Construction q e r t u w V100 SY SYJ VK y VZ i VT VP R A P VG o VP S070 VQ VKF VQZ (For N.C. valve) VZ Component Parts VS Description Material Resin Stainless steel Stainless steel, Resin Stainless steel NBR Carbon steel NBR No. q w e r t y u i Solenoid coil Body Fixed iron

T he pump may stop due to unstable operation w ith discharge flow less than the minimum discharge flow . C ircuit(1 ) C ircuit(2 ) Pilot valve set K T PA 5 3 8 NBR diaphragm set K T PA 3 3 2 PT F E diaphragm set K T PA 3 3 1 S w itching valve assembly set K T PA 3 3 6 A ctuator parts set K T PA 3 3 7 4 . Maintenance 3 .

5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Component Parts MB No. q w e r t y u i o !0 !1 No.

5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts MB No. q w e r t y u i o !0 !1 No.