Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: D [Panel Mount Adapter + Front Protection Cover, (ZS-46-D)], Operation Manual: w/o Operation Manual, w/o Calibration

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

Dimensions/20 to 100 Basic/CG1YB GA GB 2-P (Port size) (Rc, NPT, G) 2-TC Section TA/TB Width across flats B1 H1 MM 0 -0.05 I 0 -0.05 TD E D E AL A TA TB 4-TC K F F H TE TF TG NA S + Stroke ZZ + Stroke KA C 0.1 8-J NA Section TA/TB (mm) Bore size (mm) 20 25 32 40 50 63 TC TDH9 TE TF TG M5 x 0.8 4 0.5 5.5 +0.08 0 8 +0.08 0 M6 x 0.75 5 1 6.5 10 +0.08 0 M8 x 1.0 5.5 1 7.5 12 +0.08 0 6 1.25 8.5

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Safety Speed Control Valve (SSC Valve) Series ASS

D L2 L3 L4 L5 L6 L7 L8 P d h T L1 Model Model ASS10 ASS100 ASS110 2 10 5 20 9 5 20 52 14 4 17 50 XT14-82-3-1 1 8 ASS30 ASS300 ASS310 3.2 12 6 30 12 6 26 73 23 5 16.5 63 XT14-105-5-1 1 4 3 8 , ASS500 ASS500 2.3 14 7 35 13 6 38 99 27 6 30.5 90 XT14-89-2-1 1 2 3 4 , ASS600 ASS600 3.2 14 7 65 14 6 46 116 31 6 26 112 XT14-85-2-1 3 4 1 , AS Meter-in Control Type Meter-out Control Type ASP Mounting

Air cylinder

L 100mm, or stroke 1 2 1 7 5 4 6 2 6 5 7 3 L L Fig. 14 Position for application of grease Table 9 Amount of grease units: g Stroke 40 50 63 80 100 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 50st added 1 1 1.5 2 3 28 3-2-4. Mounting of seals 1) Rod seal, Cushion seal (Fig.14, ) Pay attention to the mounting direction of the seal.

ARJ310

One-touch fitting ARJ310-01 ARJ310-N01 ARJ310F-01-04 ARJ310F-01-06 ARJ310F-N01-03 ARJ310F-N01-07 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 R 1/8, M5 x 0.8 NPT 1/8, M5 x 0.8 Note) M5 x 0.8 female thread is cut inside the pipe.

Precision Clean Regulator

SRP1-M5 SRP1-01 Pressure gauge part no.

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Connector Type: S (M12 Connector Type), Bracket: A5 [Bracket E for M12 Connector Type (ZS-46-A5)]

MHL2

D(Finger closing port) M5 x 0.8 (Finger closing port) M5 x 0.8 20Auto switch mounting groove (4 locations) 4-M6 x 1 (Piston rod and rack screw) Width across flats 10 (4 locations) Closed E 4-M5 x 0.8 through Open F (Thread for mounting attachment) (mm) A B C D E F G H 40 70 90 J 98 152 192 Model MHL2-16D MHL2-16D1 MHL2-16D2 45 75 95 60 90 110 28 58 78 68 110 130 98 170 210 128 200 240 26

Digital Flow Switch Series PFA For Air Series PFW For Water

P P 1 to 10 PFA30m P P P 5 to 50 P P P 10 to 100 31m P P P 20 to 200 P P P 50 to 500 P P P P 150 to 3000 P P P P 300 to 6000 P P P P 6000 to 12000 Series variations For Water Flow rate Remote type Output specification Port size (Rc, NPT, G) Integrated measurement display type Display unit Sensor unit Switch output 3/8 1/2 3/4 range l/min PFW31m 30m 32m PFW704 720 740 PFW504 520 540 P P

CJP

Refer to p.0-39 to 0-46 for Safety Instructions and common precautions. CM2 C85 Construction (Disassembly is not possible.) CG1 Piping Caution Panel mounting MB q Use a dedicated hose nipple. On the panel mounting style, use the CJ-5H-4 or CJ-5H-6, a dedicated hose nipple (with a fixed restriction) that is provided.

Guide Table Series MGF ø40, ø63, ø100 1

Non-rotating accuracy Built-in T-slots Non-rotating accuracy Bore size (mm) 40 63 100 0.08 T-slots are provided on 3 faces of the body (except port face), allowing mounting for various brackets.

DOC1001322

P.5-13 (14) Startup operation status display Displays the status of operation settings at startup P.5-14 (15) Anti-freezing status display Displays the status of anti-freezing settings. P.5-14 (16) Warming up status display Displays the status of the warm-up settings. P.5-14 Pump operation continuation status display Displays the status of pump operation continuation setting.

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

Multistage Ejector Series ZL112.212

Rc1/2 G1/2(3) Nil F N T 1/2-14 NPT 1/2-14 NPTF P Note 1) W/ unit switching function is not permitted to sell for the domestic use in Japan, because the new Weight and Measure Act has been implemented since October ,99.

Series: 25A-ISE20, Rated Pressure Range: B (-0.1 TO 1 Mpa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Series: 25A-ISE20, Rated Pressure Range: -0.1 TO 1 Mpa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -

Multistage Ejector (N)ZL Series

Standard (N)ZL212 40 V 54 125 Label 188 61 P Port exhaust (N)ZL212P V Vacuum pressure gauge Exhaust with silencer Exhaust port 1 25 With vacuum pressure gauge (N)ZL212-G P V Exhaust with silencer Vacuum adapter 1/8 7 With vacuum adapter (N)ZL212-GN P V Vacuum pressure switch Exhaust with silencer With digital vacuum pressure switch (N)ZL212-E P V RESETSET Approx. 500 Section A (L: approx.

Guide Table Series MGF ø40, ø63, ø100 Low-profile compact cylinder utilizes a large concentric guiding sleeve to provide excellent eccentric load resistance.  Mounting height greatly reduced  Built-in non-rotating mechanism Internal guide pin prevents

Grease pack part no.: GR-L-010 (10g) MGT D-X Individual -X 415 Series MGF Dimensions: 40 MGF40 120 4 x M8 x 1.25 through 100 100 120 90 9.5 8 46 + Stroke 36.5 + Stroke 7.5 18.5 2 x Rc, NPT, G 1/8 Breathing hole for guide (with element) 38 When the cylinder is extended Port for extending cylinder Port for retracting cylinder 114 4 x M8 x 1.25 through M5: T-slot for hexagon bolt K 3.5 40 100

VZM400

3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !