Electric Actuator/Slider Type

m 500 500 500 L2 0 0 0 0 0 5 10 15 20 0 10 20 30 40 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] 800 800 800 600 600 600 L3 400 400 400 Mer m 200 200 200 0 0 0 0 0 10 20 30 40 50 60 0 10 20 30 40 5 10 15 20 Work load [kg] Work load [kg] Work load [kg] 1,500 1,500 1,500 1,000 1,000 1,000 500 500 500 Mep m 0 0 00 0 5 10 15 20 0 4 2 6 8 10 10 20 30 L4 Work load [kg] Work load

Battery-less

4 8 12 16 20 0 1 2 3 6 4 5 L8 Work load m [kg] Work load m [kg] Work load m [kg] Calculation of Guide Load Factor Mounting orientation 1.

Fluoropolymer Piping Equipment

28 16.5 4.4 LQ1B2E-M3/16" 2.9 LQ1B23-M 6 1/4" 22 3.6 LQ1B2F-M 1/8" 1.8 LQ1B24-M 4 2.6 TLM TILM LQ1B3A-M 3/8" 1/4" 19 LQ1B2F-M 3 1.8 5.8 25 LQ1B3B-M 1/4" 3.6 LQ1B31-M 10 1/4" 19 7.4 TD TID 5 20 9 18 17 36.5 23 8 LQ1B3C-M 3/8" 3/8" 21 27 5.8 LQ1B32-M 8 5.5 25 LQ1B3D-M 1/4" 3.6 LQ1B3F-M 3/8" 1/8" 18.4 29 21.9 4.4 4.4 LQ1B33-M 6 3.6 TH TIH 5 9 18 36.5 8 LQ1B34-M 10 3/8" 21 27 7.4 20 17 23 LQ1B4A-M

LJ1H

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 20 40 60 Transfer load m (kg) 600 L2 400 Mer m 200 L2 Mer 0 20 40 60 m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 20 21 Courtesy of Steven

Auto Switch Guide

D-Y69A/Y69B/Y7PV* D-Y7G/Y7H D-M5N/M5P/M5B D-S991/S992/S99V1/S99V2 D-S9P1/S9P2/S9PV1/S9PV2 D-T991/T992/T99V1/T99V2 D-S791/S792 D-T791/T792 D-S7P1/S7P2 D-T791C/T792C 10-20-27 Grommet 10-20-28 Connector 10-20-29 Band 10-20-30 Terminal conduit 10-20-31 10-20-32 Grommet 10-20-33 Rail 10-20-34 Connector 10-20-35 Grommet Tie-rod 10-20-36 Terminal conduit 10-20-37 10-20-40 10-20-38 10-20-41 Grommet

Smooth Cylinder/Low Speed Cylinder

D C Clevis Pin (For CM2E) H B (mm) C D d H B Applicable bore size (mm) 20 25, 32 40 Part no. SN-020B SN-032B SN-040B Material: Carbon steel 26 30 25.5 M20 x 1.5 8 Dd9 d 32 37 31.5 M26 x 1.5 8 41 47.3 40.5 M32 x 2.0 10 m m t t L L1 (mm) Trunnion Nut Applicable bore size (mm) 20, 25 32, 40 Applicable retaining ring part no. Dd9 d L L1 m t Part no.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

style: CQ2F/CDQ2F RQ A Without auto switch B A FT FV FX FD FZ B With auto switch Bore size (mm) MU 5 st 5 st 10 st 5 st 10 st 5 st 10 st 10 st 20 st 20 st 20 st 20 st 32 40 50 56 62 76 5.5 5.5 6.6 28 50 60 38 65 72 89 60 33 70 43 8 8 9 45 54 67 D34.5 66.5 44.5 66.5 39.5 76.5 49.5 56.5 68.5 40.5 78.5 50.5 88.5 50.5 98.5 60.5 -X L L1 M Bore size (mm) 5 st 10 st 20 st 5 st 10 st 20 st 2032

Table of Contents

ZS-10-5 A-50 1 pc. 0.6 m 30 3 m 50 5 m Specifications Model ZSP1-B ZSP1-S Fluid Air Operating pressure range 20 to 101 kPa Applicable adsorption nozzle dia. 0.3 to 0.7 (Refer to Graph (1) on page 16-7-3.) 0.5 to 1.2 (Refer to Graph (2) on page 16-7-3.)

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

M B For 2 to 10 stations: Both sides Special combination 20 20 stations 20 For 20 stations Note) 25 type is able to use with individual SUP spacer and individual EXH spacer assembly. Refer to page 3-3-14.

Table of Contents

20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , Misc.

ISO Cylinder

GKM8-16 8 16 32 8 16 14 23 M8 x 1.25 42 25 GKM10-20 10 20 40 10 20 18 27 M10 x 1.25 52 Bore size Part no. b1 b3 dH7 d6 d7 h l l3 d3 a 8 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 10 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 20 KJ8D 12 9 8 24 16 36 16 13 M8 x 1.25 14 25 KJ10D 14 10.5 10 28 19 43 20 15 M10 x 1.25

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

12 11.5 22 22 34 18 1/4 (R1, R2 port) 31.5 63 M plug connector (M): 10-SYJ7143-M01 02 DIN Terminal (D): 10-SYJ7143-D01 02 M8 connector (WO): 10-SYJ7143-WO01 02 L plug connector (L): 10-SYJ7143-L01 02 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 91 104.2 MAX.10 57.5[64.5] 83.5 72.2 42.1 62 M8 x 1 57.1 44.5 (Lead wire length) 68.6[75.6] Approx. 300 20 20 20 20 Pg7 95.1[97.3

Table of Contents

12 V Lead wire length symbols: 0.5 m Nil (Example) R73C 3 m L (Example) R73CL 5 m Z (Example) R73CZ None N (Example) R73CN 11-2-20 20 Series CRB2BWU Rotary Actuator with Angle Adjuster Vane Style Construction (Same switch units are used for both single and double vane type.)

smcmaintenancepartslist

Pressure Control Equipment Industrial Filters Port size Port size FN1 FN4 Symbol 10 20 Rc1 Rc2 Applicable model Specifications FN1 FN1101 FN1102 FN1112 FN4102 65 x 250L 65 x 500L Model Element dimension Material Construction Stainless steel 304 Element Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Nominal filtration rating Differential

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Fig. a 50 40 30 20 m Work load m [kg] m LEYG25M 10 5 4 3 2 Fig. b 1 50 40 20 30 10 5 Transfer speed [m/min] 747 LEYG Series AC Servo Motor * These graphs show the work load when the external guide is used together. When using the LEYG alone, refer to pages 746 and 747.

ZP

64.5 77 50 151.5 74.5 N S U F GN GS 20 25 23 J K ZP T U 10 58 35 23 20 96 45 51 30 106 55 40 142 65 77 50 152 75 32 23.5 10 B5 B01 N01 T01 06 08 N6 U6 94.5 44.5 20 104.5 54.5 30 114.5 64.5 50 159.5 84.5 75 50 40 32 A14 4 M14 x 1 19 4 12 M8 x 1.25 10 95.5 45.5 33 50 20 105.5 55.5 30 115.5 65.5 50 160.5 85.5 75 50 Dimensions Per Vacuum Inlet: Female Thread Model L M N P Vacuum inlet direction

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

12 V Lead wire length symbols: 0.5 m Nil (Example) R73C 3 m L (Example) R73CL 5 m Z (Example) R73CZ None N (Example) R73CN 11-2-20 20 Series CRB2BWU Rotary Actuator with Angle Adjuster Vane Style Construction (Same switch units are used for both single and double vane type.)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

12 V Lead wire length symbols: 0.5 m Nil (Example) R73C 3 m L (Example) R73CL 5 m Z (Example) R73CZ None N (Example) R73CN 11-2-20 20 Series CRB2BWU Rotary Actuator with Angle Adjuster Vane Style Construction (Same switch units are used for both single and double vane type.)

MGP

With Air Cushion Horizontal Mounting Ball Bushing 19 l = 50mm V = 200m/s 20 l =100mm V = 200m/s MGPL16 to 25 MGPL16 to 25 10 10 25 25 20 25 20 25 5 5 20 Load weight m (kg) Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 16 16 16 16 1 20 50 76 75 100 200 1 20 50 76 75 100 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 30 30 50, 63 20 20 50, 63 50, 63 Load weight m (kg)

MG

) Load weight m (kg) 80 100 80 10 10 80 5 10 20 29 30 50 49 300 200 100 5 10 20 29 30 50 49 300 200 100 Stroke (mm) Stroke (mm) 8-19-16 Compact Guide Cylinder Series MGP Horizontal Mounting (Ball bushing bearing) (19) l = 50 mm, V = 400 m/s (20) l = 100 mm, V = 400 m/s MGPL12 to 25 5 MGPL12 to 25 5 25 25 25 25 25 25 MX Load weight m (kg) Load weight m (kg) MTS 20 20 20 20 20 20 MY 16 16 16