HRX-OM-X027 Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-X027 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.
Micromist separator AMD900, 1000, 901 Model Connect (Flange) 2B 2B/3B/4B 400 A 280 B 6B C 550 D 150 E 270 F 823 G 3 H 797 J 620 AMF801 AMF901 445 12B 570 300 520 1093 3 867 AMF800/900/1000 Mounting Caution q Verify the direction of the flow of the compressed air and the "e" mark that indicates the inlet of the product before connecting.
INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.
INSTALLATION A B c D Installation Transmission oin & Feed-back lever Fig. 1 SINGLE.ACTING ACTUATOR OPERATION ACTUATOR SIGNAL RANGE INSTALLATION STYLE (REFFIG. 1) OUT 1 OUT2 Direct ? 3-15 osi A used ptugged 1i2 Snlit t) 3-15 nsi rl plugged USEQ 1/2 Solil B Reverse _z 3-15 osi USEd plugged 1/2 Solil B 3-15 osi A plugged useo 1/2 Snlit D Fig.
Example: LEFS16B-100B-R1C917 1 D T 7 C Compatible actuators Electric Actuator/Rod LEY Series Electric Actuator/Guide Rod LEYG Series Electric Actuator/Slider LEF Series Electric Slide Table LES/LESH Series Electric Rotary Table LER Series Electric Actuator/Guide Rod Slider LEL Series Electric Actuator/Miniature LEPY/LEPS Series Electric Gripper LEH Series Electric Actuator/Low-Profile Slider
C: Modified errors in text. D: Contents revised in several places. E: Modified errors in text. F: Contents revised in several places.
Class B or equivalent (130C) Note) Coil insulation type Note) Based on JIS C 4003 How to Order 1 L 02 0 1 1 4 VS C Thread type Direct operated/Metal seal solenoid valve Electrical entry Nil Rc NPT NPTF Option 4, 5 port valve N Symbol Electrical entry Electrical entry position C T U D T Sub-plate Conduit Type of actuation Conduit with terminal Sub-plate Body size: 1/8 standard F Single
D-A9, M9, M9W, M9A auto switches are shipped together (not assembled).
Note Data 16 CJ-L016B CJ-F016B CJ-T016B T-bracket is used with double clevis (D). 1. For Series CJ2X, 0.1 Nl/min is the values at maximum in terms of its construction and there is internal leakage (ANR). Foot bracket Flange bracket T-bracket BJ2-010 Common for the types of D-C7/C8 and D-H7 BJ2-016 10-3-7
After washing the element, make sure the base seal is properly mounted. 500 A Vertical Suction Filter FHIA Series Dimensions Differential pressure indicator 16 B (34) F OUT Removal dimension K H F OUT D E C H Differential pressure indication switch FH FH 62 HOW (65) F IN 4 x I OUT A J G (mm) A B C D E F G H I J K Model Weight (kg) FHIA-04 FHIA-06 FHIA-08 FHIA-10 FHIA-12 FHIA-16 FHIA-20 FHIA
VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.
To booster lube From booster lube To booster lube From booster lube A B 63 63 80 85 90 100 C Port size Rc INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model 1 4 3 8 15 15 15 20 22 22 141 164.5 170 180 230 251 , , 1 4 3 8 1 2 B C D E F Port size Rc Part no. A 3 4 , 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 1 1 3 4 ALBA90-10 ALBA90-20 14-13-19
NPN 1 output ISE30A-l01-N-ML Digital pressure PNP 1 output ISE30A-l01-P-ML NPN 1 output/ Voltage output ISE30A-l01-C-ML switch Note 3) NPN 1 output/ Current output ISE30A-l01-D-ML Note 1) This is an assembly of the bracket and resin panel nut. Note 2) l in part numbers for a round type pressure gauge indicates a type of connection thread.
Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE
D FH FH V (Element removal dimension) HOW L M 4 x J A (mm) A B C D E F G H I J K L M N O P Q R Model FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1/2B M10 x 1.5 Thread depth 22 M10 x 1.5 Thread depth 22 1B 150 75 80 164 112 40 40 52.4 26.2 22.2 47.6 16.5 6 16.5 3/4B 1B M12 x 1.75 Thread depth 23 M12 x 1.75 Thread depth 23 1 1/2B 200 110 95 186
Z (Example) F9BZ D-F9BA is available only as "L". Auto switches marked with a "" symbol are produced upon receipt of order. Note 1) Take note of hysteresis with 2 color indication type switches. Note 2) Refer to pages 53 through 65 for detailed auto switch specifications. Cylinder Bore Size MHS 2 D 50 32 to 63 Y59A Number of auto switches Nil S 2 pcs. 1 pc.
C 10 100 PF2A521 D 20 200 PF2A551 E 50 500 Analogue output A B Voltage output 1 V 5 V Current output 4 mA 20 mA Rated flow range [L/min] Model Min.
When actually mounting an auto switch, adjust the position after confirming the operating state of the auto switch. 95 Guide table10-MGF Dimensions 10-MGF40/63/100 4-N V D C D C E F H A + Stroke B + Stroke GB GA T X PP (Rc, NPT, G): Relief port 2-P(Rc, NPT, G) Port for extension Port for retraction When the cylinder is extended KA: T-slot for hexagon bolt 4-M K KB KC 6-K (6 positions) 9 9
Model Model Model Port size R(PT) Effective area (mm2) Weight (g) Dimensions (mm) Weight Effective area Port size Model Dimensions (mm) R(PT) (mm2) (g) AN200-02 35 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233 74 60 820 263 86 70 A B D A B D 1 4 1 4 AN202-02 35 16 64 22 19 33 84 28 24 47 95 34 24 AN300-03 60 3 8 AN302-03 60 3 8 AN402-04 90 1 2 AN400