39

19 19 19 Weight kg 0.5 0.6 0.7 Weight kg 0.5 0.6 0.7 NAAMS code ACA206M ACA207M ACA208M NAAMS code ACA216M ACA217M ACA218M A B C D E F G H I A B C D E F G H I Part no.

Micro-Mist Separator with Prefilter Series AMH

---Ht-t---t-+-H I--i IN o I w c.

2/3 Port Valve for Various

Table(2) Rated Voltage-Electrical Entry-Electrical Option PAX Table(1) Connection Size and Applicable Model Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G C D, T G, C T PB S L, Z S L, Z S Note ) Connection Applicable model VXP2130-02 VXP2130-03,VXP2140-03 VXP2130-04,VXP2140-04 VXP2150-06

IR1000/2000/3000

Combination Catalog CAT.E5G-C for types of attachments.)

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Terminal no. 1 5 2 Power supply cable 1 2 3 4 5 Brown White Blue Black Gray 1 2 3 4 5 3 4 3 4 Plug connector pin arrangement Reverse key Socket connector pin arrangement Connections 200 EX9-AC002-4 40.7 44.7 M12 M12 6.6 Core wire color Terminal no.

Manifold Specifications

6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 3-3-92 Series VZ Made to Order Specifications: Please contact SMC for detailed specifications, dimensions, and delivery. 6.

Precision Regulator Series IR1000/2000/3000

1 ARM Diaphragm (B) e w r y Exhaust Bleed w ARP Diaphragm (C) SUP(1) OUT(2) SUP(1) OUT(2) OUT(2) SUP(1) Exhaust Valve IR u !0 !0 !2 t r !

Precision Regulator

Set point 0.5 0.6 0.200 0.5 0.4 0.4 0.3 0.3 0.198 0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 1000 0 200 400 600 800 Flow rate (L/min (ANR)) Supply pressure P1 (MPa) Relief flow rate (L/min (ANR)) 817 IR1000/2000/3000 Series IR3000 Series The operating conditions or external disturbance may affect each of the characteristics.

CEx-OML0058

50 40 40 100 100 300 300 200 400 500 200 400 500 D o e s t h e m o u n t e d l o a d / P i s t o n s p e e d ( /) e x c e e d t h e l o a d g i v e n i n P i s t o n s p e e d ( /) t h e d i a g r a m ? H o r i z o n t a l m o u n t i n g V e r t i c a l m o u n t i n g S e l e c t i o n ..

80

Body material/Port size/Orifice diameter Voltage/Electrical entry Size/Valve type Size Valve type Body material Orifice diameter Port size Symbol Symbol Symbol Electrical entry Voltage A B C D E F 1.0 A Grommet 24 VDC M5 1.6 Resin (PPS) With bracket B 100 VAC Single unit N.C. 1.0 Size 1 (VDW1) 1 3.2 One-touch fitting C 110 VAC 1.6 D 200 VAC 1.0 4 One-touch fitting 1.6 E 230 VAC Z Other voltages

LEC-OM038xx

200 mm/s mm/s USB cable A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 Communication cable PC PC is prepared by customer) Refer to 8CN2 TB/PC Power supply connector(P.23) for usage.

MU

Snap ring Type C 8 for axis Type C 10 for axis Type C 10 for axis Type C 14 for axis m 1.5 1.25 1.25 1.75 t 0.9 1.15 1.15 1.15 Part no.

Process Pump

Symbol C[dm3/(sbar)] b Cv N.C.

MU

Snap ring Type C 8 for axis Type C 10 for axis Type C 10 for axis Type C 14 for axis m 1.5 1.25 1.25 1.75 t 0.9 1.15 1.15 1.15 Part no.

VXP21/22/23

Table(2) Rated Voltage-Electrical Entry-Electrical Option PAX Table(1) Connection Size and Applicable Model Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G C D, T G, C T PB S L, Z S L, Z S Note ) Connection Applicable model VXP2130-02 VXP2130-03,VXP2140-03 VXP2130-04,VXP2140-04 VXP2150-06

Compact Rotary Actuator Series CRQ2

Positioning pin hole Counter-clockwise A port 5 Adjustment bolt A (For counter-clockwise rotation end adjustment) 95 22 .5 ge an Adjustment bolt B t r (For clockwise rotation end adjustment) en m e s st wi ju ck ad lo d -c B port en er Clockwise nt on Cl u o ti 0 o ad C ta se ck 19 ro wi ju wi k c st lo s C ge e m ro With Adjustment Bolt en an ta t r ti o n n r an e n d ge tio Size Adjustment

PSE530/200

SET Proceed to the auto shift mode. 16-3-15 15 Series PSE530/200 Operation 3: Special Setting 3 Auto shift Refer to C Auto shift function on page 16-3-17 for details.

CXT

Long Stroke Stroke range (mm) Y X Z Bore size (mm) 12 50, 75, 100 32 7.5 7.5 16 50, 75, 100 32 7.5 7.5 20 75, 100, 125, 150, 175, 200 41 9 9 25 75, 100, 125, 150, 175, 200, 250, 300 44 11 11 8-27-8 9 Platform Cylinder Series CXT Dimensions: 32, 40 (N) X + Stroke S + Stroke H 4-M8 x 1.25 4-8.7 through, counterbore 14 depth 8 HP Depth 12 HG 12 Back side 4-M10 x 1.5 depth 15 (N) T PA T MX d

Clean Room Rodless Cylinder Series CYP ø15, ø32

Nil L R S a b h g d c f e Operating direction Left Right Note) Plugs are installed in ports other than those indicated for the model.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard stroke -X Bore size (mm) Standard stroke (mm) Piping port location 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h 20Nil Note 1) Please consult