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. -35No.D-S-OMG0006-C Specification Specifications Specifications for sensor unit Model D-M9K D-F7K D-Y7K Mounting Direct mount (round groove) Rail mounting Direct mount (square groove) Applicable amplifier unit D-RNK, D-RPK Impact resistance 980 m/s2 Insulation resistance 50 M or more under the test voltage 500 VDC (between case and cable) Withstand voltage 1000 VAC 1min (between case and

63 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 21 37 63 111 177 280 502 1 N 23 42 71 123 195 306 537 mm 4 4 6 8 8 12 16 g 58 96 134 265 345 515 952 1) 1625 L=20mm 3263 L=30mm 0.5MPa MHS3 16D MHS320D MHS325D MHS332D MHS340D MHS350D MHS363D MHS380D MHS3100D MHS3125D MHS3mm 16 20 25 32 40 50 63 80 100 125 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 30 14 25 42 74 118 187 335 500

The vacuum aspiration fluence shows the fluence immediately before piping in the actuator. 5 - 3.How to Order 11LEJS 40 A 500 S2 1 10 9 8 7 4 5 3 2 6 *1 (2) Motor type (3) Lead [mm] (1) Size 40 LEJS40 LEJS63 Output [W] Actuator size Compatible controller Type 63 16 A 20 AC servo motor (incremental encoder) S2 10 8 B LECSA-S1 40 100 (5) Motor option AC servo motor (incremental encoder) S3

I/O LEC-CN5-* 1 1 PLC 3 DC24V CN5 CN4 CN3 1 2 LE-C*-*-* LE-C*-*-S 120.3 120.3 mm mm CN2 200 200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 CN1 50 200 50 200 3 3 <> AWG20 (0.5mm 2) 3 DC24V USB (A-miniB type) USB LEC-W2 3m :LEC-T1-3JG* 1 2 1.2 http://www.smcworld.com/ 3 UL,UL1310Class2 7 USB LAN 16 - 5. 1 2 CN4 5.1 3 ,5.2 4 LECPA 5.3(1) 5.3(2)

Move Speed Position Accel PushingF T riggerL V PushingSp Moving F Area1 Area2 In posn mm/s2 mm/s mm mm/s2 mm/s mm mm mm 0 Absolute 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 Absolute 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 Absolute 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 6.

100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 Communication cable PC PC is prepared by customer) Refer to 8CN2 TB/PC Power supply connector(P.23) for usage.

CN1IF (CONT) 19 - (LEC)(LEC) 5.4 CN2PC/TB (LEC)(LEC-T1-3*G*)(LEC-W2) CN2SW OFF RWw(n+1)b0 ON(1) (LEC) (LEC)(LEC-T1-3*G*)(LEC-W2) (1) CN2 (3m) (2) (USB ) 120.3 120.3 mm mm 200 200 mm/s mm/s USB (A-miniB type) 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 () 9.CN2TB/PC () 20 - .CN4 6.1 1 EMG+ EMG 2 EMGEMG 3 24V 5 4 3 2 1 () 4 0V 5 FG FG (LEC)(0V)

100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2CN Communication cable PC PC is prepared by customer) Refer to 8CN2TB/PC Power supply connector for usage.

Assembly and disassembly of the SI unit -24No.EX-OMN0011-F Specifications Specifications General specifications Item Specifications Ambient temperature -10 to +50 oC Ambient humidity 35 to 85%RH (No condensate) Ambient temperature for storage -20 to +60 oC Withstand voltage 500 VAC applied for 1 minute Insulation resistance 500 VDC, 10 M or more Operating atmosphere No corrosive gas Enclosure

Assembly and disassembly of the SI unit -30No.EX-OMO0030-E Specifications Specifications General specifications Item Specifications Ambient temperature -10 to +50 oC Ambient humidity 35 to 85%RH (No condensate) Ambient temperature for storage -20 to +60 oC Withstand voltage 500 VAC applied for 1 minute Insulation resistance 500 VDC, 10 M or more Operating atmosphere No corrosive gas Enclosure

PSE530 PSE531 PSE532 PSE533 Rated pressure range 0 to 1 MPa 0 to -101 kPa 0 to 101 kPa -101 to 101 kPa Extension analog output range -0.1 to 0 MPa 10.1 to 0 kPa -10.1 to 0 kPa Withstand pressure 1.5 MPa 500 kPa Applicable Air, inert gases and incombustible gases Power supply voltage 12 to 24 VDC10%, ripple (p-p) 10% or less (Protected against inverse connection) Current consumption 15 mA

Assembly and disassembly of the SI unit -31No.EX-OMW0016-A Specification Specifications General specifications Item Specifications Ambient temperature -10 to +50 oC Ambient humidity 35 to 85%RH (No condensate) Ambient temperature for storage -20 to +60 oC Withstand voltage 500 VAC applied for 1 minute Insulation resistance 500 VDC, 10 M or more Operating atmosphere No corrosive gas Enclosure

Current leakage 100 A or less at 24 VDC 0.8 mA or less Operating time 1 ms or less Indication light Operating position: The Red LED turns ON Optimum operating position: The Green LED turns ON Electrical entry Grommet Lead wire Vinyl sheath cable 2.6, 0.15 mm2, 2-wire (D-M9BW(V)), 3-wire (D-M9NW(V),D-M9PW(V)) Impact proof 1000 m/s2 Insulation resistance 50 M or more under the test voltage 500

PSE540(A) PSE541(A) PSE543(A) Rated pressure range 0 to 1 MPa 0 to -101 kPa -100 to 100 kPa Extension analog output range -0.1 to 0 MPa 10.1 to 0 kPa Withstand pressure 1.5 MPa 500 kPa Applicable Air, inert gases and incombustible gases Power supply voltage 12 to 24 VDC10%, ripple (p-p) 10% or less (Protected against inverse connection) Current consumption 15 mA or less Analog output: 1 to

Enclosure IP40 Operating humidity Operation, Storage: 35 to 85% RH (No condensation) Environmental Withstand voltage 1000 VAC for 1 minute between terminals and housing resistance Insulation 50M or more between terminals and housing resistance (with 500 VDC megger) Temperature characteristics +/2%F.S.

excess voltage (up to 26.4V) Hysteresis Hysteresis mode: Variable Window comparator mode: Variable Switch output NPN or PNP open collector output 2 outputs Max. load current 80 mA Max. applied voltage 30 VDC (at NPN output) Residual voltage 1 V or less (at 80 mA load current) Response time (including sensor response time) 100 ms. or less, Chattering-proof function working, Response time is 500

degC Fig. 6-1 Cooling capacity 2) Heating capacity Fluid: water Fluid: water 1000 2000 900 Ambient 35C 1800 Ambient 30C 800 1600 Ambient 25C Heating capacity W Heating capacity W 700 1400 600 Ambient 20C 1200 500 Ambient 15C 1000 400 800 300 Ambient 15C 600 200 400 100 0 200 10 15 20 25 30 35 40 45 50 10 15 20 25 30 35 40 45 50 Circulating fluid temperature degC Fluid temperature degC Fig

. -11No.EX-OMI0001-I Common Specifications EX510 series common specifications Item Specification Rated voltage 24 VDC 1 Allowable instantaneous electrical stop 1 msec. or less Enclosure IP20 Applicable standard UL/CSA, CE marked Withstand voltage 500 VAC 1 minute (between FG and external terminal block) Insulation resistance 10 M or more (500 VDC is given between FG and external terminal

VAC, 1 minute Insulation resistance Between case and AC line: 500 VDC, 50Mor more Ambient temperature 0 to + 50 (No freezing) Ambient humidity 35% to 85%RH (no dew condensation) Noise resistance Square wave noise by noise simulator (pulse width: 1s) Between power terminals: 2000V, input line: 600V Vibration proof Durable to 10 Hz to 55 Hz and amplitude of 0.75 mm in X, Y and Z directions