Common Supply Regulator

Structural Drawing and Replacement Parts 10 7. Assembly of Optional Parts 11 8. Operation and Adjustment 12-13 9. Trouble Shooting 14-15 10. How to Replace the Components 16-21 10-1. Diaphragm Assembly Replacement 16 10-2. Valve Guide Assembly and Valve Assembly Replacement 17 10-3. Square Embedded Type Pressure Gauge Replacement 18 10-4.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

0.4 MPa setting (Ex.)10-ARP30-02BG 0.005 to 0.4 MPa Set pressure range Note1) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.005 to 0.2 MPa 0.6 MPa setting (Ex.)10-ARP30-02BG-3 0.008 to 0.6 MPa Within 0.2% F.S.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

0.4 MPa setting (Ex.)10-ARP30-02BG 0.005 to 0.4 MPa Set pressure range Note1) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.005 to 0.2 MPa 0.6 MPa setting (Ex.)10-ARP30-02BG-3 0.008 to 0.6 MPa Within 0.2% F.S.

Digital Gap Checker ( compatible)

Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Current consumption 25 mA or less Protection Polarity protection Switch output Select from NPN or PNP open collector output Max. load current 10 mA Max. applied voltage 30.0 V Residual voltage 1 V or less (at 10 mA) Short circuit protection Provided 2-screen (3-screen display available: sub display, 4 digits x 2) Main display

SJ3A6

Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 5% to +10% 12 VDC: 6% to +10% PS port 2(B) Vacuum pad port Flow Characteristics Response Time Flow Characteristics (When restrictor is fully open) 2(B)3/5(E) 1(P)2(B) b 0.19 Cv 0.05 C [dm3/(sbar)] 0.40 b 0.18 Cv 0.10 C [dm3/(sbar)] 0.24 Valve model Fluid passage 2(B) Port size M5 Valve model Response time ms (at 0.5 MPa) SJ3A6-ll-l

AW-B 10- Series 21- Filter Regulator AW K-B 10- Series Filter Regulator with 21- Backflow Function

Model Option 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS AW62P-270AS Note 2) Set nut AR23P-260S AR33P-260S AR43P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Standard Pressure gauge Note 4) Round type Note 3) 10: G49-4-01, 21: G49-4-01-MS-X3 0.02 to 0.2 MPa setting Note 1) Assembly of a bracket

Series 10-, 21- AF-A Air Filter

Note 8) : For pipe thread type: NPT only 1069 A Air Filter 1021-AF-A Standard Specifications Model 10-/21-AF20-A 10-/21-AF30-A 10-/21-AF40-A 1 10-/21-AF60-A 10-/21-AF40-06-A 10-/21-AF50-A Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa 5 to 60C (No freezing) Ambient & fluid temperature 5 m Nominal filtration rating 1600

Angle Seat Valve

Orifice diameter [mm] Port size Valve type Orifice diameter [mm] Port size Valve type Orifice diameter [mm] Port size Valve type N.C. 1/4 to 1 10, 15, 20, 25 10, 15, 20, 25, 35, 40, 50 N.C./N.O. 1/4 to 50A 10 to 12 N.C.

DOC1020530

Target position: 100.000[mm] (=10 [m] = 186A0h) Target speed: 100[r/min] (=10 [0.01r/min] = 2710h) Acceleration time constant: 100 [ms] (= 64h) Deceleration time constant: 100 [ms] (= 64h) The setup value is as follows.

Refrigerated Air Dryer

GD Breaker Capacity and Sensitivity Current Sensitivity current IDFB4E to 37E IDFB55E, 75E Model Breaker capacity 10 A 30 mA Maximum operating pressure: 240 psi (1.6 MPa) 10 A 30 mA Replacement Parts Configuration Replacement part no.

Angle Seat Valve /

/N.O. 1/4 to 50A 10 to 12 N.C.

Fluoropolymer Piping Equipment

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 Symbol B A Inch sizes Basic size With reducer 03 05 07 11 13 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" Note 1) Applicable fittings: LQ2 Note 2) For details of the applicable tubing sizes, refer to page 945.

S Couplers

/O.D. mm Symbol Symbol Symbol 01 02 03 04 N01 N02 N03 N04 07 09 11 13 06 08 10 12 07 09 11 13 6 8 10 12 1/4" 5/16" 3/8" 1/2" R, Rc1/8 R, Rc1/4 R, Rc3/8 R, Rc1/2 NPT1/8 NPT1/4 NPT3/8 NPT1/2 50 60 65 80 85 110 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Metric size The figures in ( ) indicate the internal diameter of the applicable hose.

212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

Process Valve

: E) In the case of EZ or TZ, the length is longer by 10 mm.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

RLQ

YB-03 32, 40 80 9 6.5 10 18 50 d2 d1 YB-05 50, 63 120 11 6.5 12 22 60 L UT C UA (mm) Part No.

Series VS

VSS8-6 VSS8-8 VSS8-10 VSS8-6 VSS8-8 VSS8-10 Description Description VSS8-10 VSS8-8 VSS8-8 VSS8-10 VSS8-6 VSS8-6 VSS8-10 VSS8-8 VSS8-6 1.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

Table of Contents

Series SV2000 for EX120 Dedicated Output Serial Wiring. 6 7 8 10 10 10 10 10 10 10 11 11 11 11 11 11 12 12 13 13 13 15 16 16 17 19 20 21 21 23 23 24 24 24 24 24 25 26 27 27 30 30 31 32 33 34 35 36 37 37 39 40 40 41 42 44 45 45 50 50 51 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com