PFMV5

PF2A ZS-36-A1 ZS-36-A2 ZS-36-A3 ZS-36-A4 ZS-36-A5 2 L-type brackets, 2 mounting screws M3 x 15L For 1 station (for single unit) For 2 stations 2 L-type brackets, 2 mounting screws M3 x 25L PF2W For 3 stations 2 L-type brackets, 2 mounting screws M3 x 35L For 4 stations 2 L-type brackets, 2 mounting screws M3 x 45L PF2D For 5 stations 2 L-type brackets, 2 mounting screws M3 x 55L IF 951

AFF_17A

AMD Micro mist separator Nominal ltration rating: 0.01 m Oil mist density at outlet: 0.1 mg/m3 Body size Symbol Flow capacity 70D 7 m3/min (ANR) 80D 11 m3/min (ANR) 90D 14.5 m3/min (ANR) Option Symbol Symbol Description Max. operating pressure [MPa] Nil Auto drain 1.0 H Auto drain 1.6 J Drain guide 1.6 Main line lter 1 2 Thread type Port size L Options H and J cannot be selected simultaneously

IDX-OM-M050

M3 tightening torque: 0.63 to 1Nm. Do not touch equipment other than the terminal block during wiring. 3. Put back the front panel. [Remote control] Voltage is applied to the terminal block. Be sure to turn off the switch with lamp before wiring. 1) Disconnect the wires from no. 5 and 6 of the terminal block and mount the external switch.

IDX-OM-M051

M3 tightening torque: 0.63 to 1Nm. Do not touch equipment other than the terminal block during wiring. 3. Put back the front panel. [Remote operation] Voltage is applied to the terminal block. Be sure to turn off the switch with lamp before wiring. 1) Disconnect the wires from no. 5 and 6 of the terminal block and mount the external switch.

IDX-OM-U022

M3 6.5mm 1.25mm 2 M3 6.5mm 1.25mm 2 IDFA100F150F 1 6 1.3 IDX-OM-U022 2. 2.1 45 45 45 IDFA100F150F 2 1 2.1 IDX-OM-U022 2. 2.2 2.2.1 (1) (85%) () B C 245050 () 2000m ) (2) IDFA100F150F 2 2 2.2 IDX-OM-U022 2. 2.2.2 P.6-3 6.3 IDF-AB501 14 1 1 1 4 5 2 3 1 600mm 600mm 600mm 600mm 600mm 1 IDFA100F150F 2 3 2.2 IDX-OM-U022 2. 2.2.3 60 60 .

Digital Pressure Switch

Description Part number Remarks Bracket A ZS-38-A1 Mounting screw (M3 x 5L, 2 pcs.) Bracket B ZS-38-A2 Mounting screw (M3 x 5L, 2 pcs.) Bracket C ZS-38-A3 Mounting screw (M3 x 5L, 2 pcs.) Panel mount adapter ZS-27-C Mounting screw (M3 x 8L, 2 pcs.) Panel mount adapter + Front protective cover ZS-27-D Mounting screw (M3 x 8L, 2 pcs.)

PSxx-OMR0001CN

m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -19No.PS-OMR0001CN-J 2 ISA3-() ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 C(4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -20No.PS-OMR0001CN-J 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5

PSxx-OMT0001CN

m5 m GH641 m3 m5 m 200 kPa ISA3-F ISA3-G 1 m3 m5 m 1 m3 m5 m [mm] [mm] 9 0 10010 ISA3-H 1 m3 m5 m [mm] 29 0 30030 -20No.PS-OMT0001CN-E 2 ISA3-() ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 C(4 ) C(6 ) F(G ) H 13 13.6 19 ISA-14() -21No.PS-OMT0001CN-E 2 ISA3-(DIN ) ISO1179-1 1 2 3 4 5 6 L1 38 76 114 152 190 228 L2 62.5 125 162.5 200 237.5 275 L3 73 135.5 173 210.5 248 285.5

EX260-SMJ_eng

M3 hexagon screw Tightening torque 0.6 Nm Terminating resistor Valve manifold : Thread size: M3 x 30 Troubleshooting The following instructions must be followed during maintenance: Turn off the power supply. Stop the air supply, exhaust the residual pressure and verify that the air is released before performing maintenance. Otherwise an injury can result.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Prefix it to the part nos. of the solenoid valve, etc. 39 Series SYJ700 Combinations of Solenoid Valve, Manifold Gasket and Manifold Base Blanking Plate Assembly Body ported (Type SYJ72) Base mounted (Type SYJ74) Model no.: SYJ700-10-2A (In common for body ported type and base mounted type) Round head combination screw M3 x 8, Matt nickel plated Round head combination screw M3 x 31, Matt

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

Without auto switch With auto switch C H OA Bore (mm) Standard stroke (mm) A 29 29 35 39 I K L D N M OB Q RA RB T E Inch Inch 5.4 5.4 7 10 Inch #8-32UNC #8-32UNC 1/4-20UNC 1/4-20UNC A 34 34 45 49 B 22 22 26 29 B 27 27 36 39 Metric 6 8 7 12 Metric M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 Metric M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 #8-32UNC #8-32UNC #10-32UNF

Compact Electro-pneumatic Regulator Series ITV0000

radius 80 3.4 13 4.5 6 Series ITV0 Dimensions Single unit for manifolds 56 50 PWR ERR M8 x 1 Cable connection threads 15 15 9 84 86 3.7 Breathing hole Note) (M3 x 0.5) OUT OUT port (4, 5/32") 8 2 5 18.5 Note) When used under the conditions equivalent to IP65, use the regulator after piping a fitting/tube into a breathing hole.

Miniature Guide Rod Cylinder Series MGJ

x 0.5 depth 5 2-1.2 (Guide air release) 9 + Stroke 5 [ 6.7] 20.5 20.5 20.5 3 5 28 29 9 2 [Auto switch] 2-M3 x 0.5 (port size) 6.1 + Stroke 8.4 6 9 12 14.5 10 2-M3 x 0.5 through 2-4.3 through Counterbore 8 depth 0.5 25 + Stroke 8 5 19 + Stroke 10.5 + Stroke [ 24.5] 4-M4 x 0.7 depth 5 2-2 through (Guide air release) 6 [ 6.7] 5 32 23 11 23 33 23 3 6 [Auto switch] 2-M3 x 0.5 (Bore size) 8.6

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

x 0.5 When not equipped with bracket, the M3 threads at both ends (4 positions) can be used for other purposes. (16.3) 11.5 7.7 7.7 11.5 5 22.5 40 7.5 L dimensions n (stations) Dimensions 3 4 6 8 2 9 5 7 10 52.5 L1 70 105 140 35 157.5 87.5 122.5 175 62.5 L2 80 115 150 45 167.5 97.5 132.5 185 69.5 L3 87 122 157 52 174.5 104.5 139.5 192 3 stns. x 1 2 stns. x 2 3 stns. x 2 2 stns. + 3 stns

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

The smoothness of the surface and closeness of the oxidize layer can effect (increase/decrease) this. 7 Ultimate pressure Ultimate pressure is P=Q/S, where the sum of mass flow rates for outgassing (Qg) and leakage (Ql) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, QlS shown as above, and the ultimate pressure of the pump itself.

Compact

A LEC SS-T LEC Y Model Screw size Maximum tightening torque [Nm] A [mm] L [mm] LEMBl M5 3 5.5 24.5 LEMC25 LEMH25 M3 0.6 3.4 23.7 2. Never hit at the stroke end except during return to origin. (Except when the LECP2 controller is used.) Internal stopper can be broken.

JA/JAH/JB/JS

force (N) Allowable eccentricity U (mm) Model Applicable bore size (mm) Pneumatic cylinder: 1 MPa or less Rotating angle Operating pressure Basic style Flange style Foot style Hydraulic cylinder: 3.5 MPa or less Standard/Thread nominal size JA6-3-050 JA10-4-070 JA15-5-080 JA15-6-100 JA20-8-125 JA30-10-125 JA40-14-150 JA63-18-150 JA80-22-150 JA100-26-150 JA140-30-150 JA160-36-150 0.5 6 M3

Dedicated Controller

T-brackets T-nuts Model LC1-1-L5 (Weight: 16.0g) Model LC1-1-L3 (Weight: 15.5g) M (Weight: 10.0g) M5 M3 17.5 17.5 17.5 7.5 18 12 11 Model M 20 7.5 7.5 21 LC1-1-N3 M3 x 0.5 29 30 LC1-1-N5 M5 x 0.8 Controller Connectors These are connectors 'all halfpitch type' used for CN1 (control input/output) and CN2 (general purpose input/output).

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 10 10 ISO Class 5 30 L/min (ANR) 1000 1000 ISO Class 4 ISO Class 4 90 L/min (ANR) 100 100 50 L/min (ANR) 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter [m] Particle

Cylinder

I ' . 0.040 6 7 11 17 8 M3 x O.5 I. 16.5 10.5 6 B M10 X1.0 9 3 7 3 , 065 '10 . , jj:!'