DOC1023126

(Unit: %) H 150 100 Sets the position loop P constant. *Please perform the actuator operation after changing this parameter setting under the responsibility of the user. Position loop P constant A 150 100 1 to 200 B 150 100 C 90 100 H 130 140 Sets the speed loop P constant.

HEC-OM-R008

Keep the fluid level between H and L of the level indicator.

Stainless Steel Heat

Operating air pressure Air discharge if no drainage 6 l (ANR) each time 0.3MPa 10 l (ANR each time 0.5MPa 14 l (ANR) each time 0.7MPa Operation cycle: 1 cycle/min. Operation time: 2 sec./min. Motor operated auto drain is packed together with main unit.

Heavy Duty Stopper Cylinder

B FT GA 2 x P D QA Head side pressure port (When piping on flange side) Rod side pressure port (When piping on flange side) 2 x P QB W WB E GB A (mm) Circumscribed circle O QA Stroke A B CD CT CZ D E FT FX FZ GA GB H L N 212.5 LANote 5) Model RS2H50 RS2H63 RS2H80 30 84.5 20 8 36 32 64 20 73 93 16 16 128 85 44 26 9 14 depth 5 10 30 234.5 90 20 10 45 40 77 25 90 114 24 24 144.5 103 53 31 11

Thermo-chiller Series HRZ Fluorinated Fluid Type

/humidity Note 1) HRZ002-L HRZ004-L HRZ008-L HRZ001-H HRZ002-H HRZ004-H HRZ008-H HRZ002-W HRZ008-W Water-cooled refrigeration R404A (HFC) PID control Temperature: 10 to 35C, Humidity: 30 to 70%RH 20 to 40C: FluorinertTM FC-3283/GALDEN HT135 20 to 90C: FluorinertTM FC-40/GALDEN HT200 FluorinertTM FC-3283/GALDEN HT135 FluorinertTM FC-40/GALDEN HT200 Circulating fluid Note 2) Temp. range setting

ASx-OMZ0085

Construction ASB Series 12 - ASB-D Series 13 - ASB-BD Series 14 - ASB-*H Series 15 - S Revision history A : Added the construction of ASB-BD series Corrected the component contents of ASB-D series B : Added the ASB-*H series 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change

PSxx-OMU0008CN

() No.1 ON ON OFF Yes No.2 No OFF ON No.1 OFF No.3 No.4 No.5 () No.6 No.7 -68No.PS-OMU0008CN-D No.8 No.9 No.9 No.10 No.11 No.12 No.13 No.14 No.15 No.16 No.17 [Er13] No.18 No.19 -69No.PS-OMU0008CN-D No.

Suction Guard (Produced upon receipt of order) FHG Series

Body mounting dimension AC AC Window for removal H AD Window for removal H AD Body mounting dimension Body mounting dimension Element Element FH FH (mm) adjustment range A B C D F G H I L M S U V r AC AD AG 1 2 3 4 5 Standard T dimension Port size (Nominal size) T dimension HOW 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 215 215 215 265 265 265 325 325

High Vacuum L Type Valve

Parts Replacement Procedure 14 1 XL-OMS0001-B Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

High Vacuum L Type Valve

Parts Replacement Procedure 14 1 XL-OMV0017 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

CEx-OMQ0013

No.1 OFF ON P2 No.2 OFF ON P3 No.3 OFF ON P4 No.4 OFF ON P5 P6 P7 P8 7 8 1 2 3 4 5 6 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 50 13 14 15 16 9 10 11 12 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 51 F : 2019 1 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +

MH-OMY0004

L H L H 1) 2) 3) 6 3. 4. , , 5. 6. 1) 2), 2 7. 8. () 9. / 2-3. 1. 2. 3. 4. 5. 7 1) 2), Nm MHY2-10D M3x0.5 0.59 MHY2-16D MHY2-20D M4x0.7 1.4 MHY2-25D M5x0.8 2.8 6.

Title not found

Typ. 1 5 16 H-6 11 T-6-L6-6 IM6-L6-6-L6 Page 3 Distributed by Power Aire, Inc. www.poweraire.com sales@poweraire.com Tube to Tube Fittings Distributed by Power Aire, Inc.

ZP

32 40 50 ZP50U 53 7 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 0.8 0.8 0.8 1 3 3 3.5 4 4 4.5 6.5 7.5 Put in the symbol for material at the end of model no.

Turntable Cylinder Series MGT

18.5 23.5 Proper mounting positions (mm) a b 14 18 17 c 20 24 23 d D-A9 type D-F9 type D-F9 W type 2 6 5 8 12 11 In order that adjacent switches do not misoperate, they should be set within 1mm of the proper mounting positions indicated in the table above.

IN20267

Table 6-4 Seal Cap Part Numbers 14 - IN20267 Summary of Product Elements 7. Figure 7-1 MPC Product Elements Drawing N o .

MGQ

MGQM, MGQL Common Dimensions Bore size (mm) Standard stroke (mm) B Z G NN F MM ML DA L R C H K Q X GA GB J P PW S T TA TB V W YY YL 32 40 50 63 80 100 1/8 1/8 1/4 1/4 3/8 3/8 16 17 17 19 21 25 51 51 59 72 92 112 12.5 14 14 16.5 19 23 114 96 48 112 80 100 8 8 10 10 16 16 20 20 25 25 30 35 16 16 20 20 25 30 38 38 44 44 56 62 37.5 44 44 49 56.5 66 26 26 30 36.5 46.5 56.5 30 30 40 50 60 80 47.5

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

18.5 23.5 Proper Mounting Position (mm) a b 14 18 17 c 20 24 23 d D-A9 type D-M9 type D-F9 W type 2 6 5 8 12 11 In order that adjacent switches do not misoperate, they should be set within 1 mm of the proper mounting positions indicated in the table above.

Digital Flow Switch (Remote type monitor unit)

[July 2018] H: Contents revised in several places. [March 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011-2022 SMC Corporation All Rights Reserved No.PF-OMN0012-H

XL-OMV0002

B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52 77 29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154 55