VNC

VN5-A3CA VN5-A3CB VN6-A3CA VN6-A3CB VN7-A3CA VN7-A3CB VN3-A3CA VN3-A3CB VN4-A3CA VN4-A3CB VN4-12CA VN4-12CB NBR VN1-A3CA VN1-A3CB VN2-A3CA Plate ass'y Valve material e FKM NBR VN2-A3CB VN2-12CA VN2-12CB Valve material t Valve cover AS568-010 AS568-011 AS568-012 (32A to 50A are O-ring.) i Pilot solenoid valve SF4--23 FKM VO301-00T-X302 (Refer to page 17-4-29 for part no.)

7

Description Material Qty Note 18 19 20 21 22 23 24 25 26 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 Rod cover Tube cover Piston Piston rod Bushing Cushion valve Speed controller valve Clevis bushing Coil scraper Rod seal Piston seal Tube gasket Magnet Switch mounting rod Chromated Hard anodized Chromated 1 1 1 1 1 1 2 1 1 1 1 1 1 2 2 4 1 2 2 1 1 1 1 2 Phosphor bronze NBR NBR NBR Carbon

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

16 37.8 23 6 18 12 0.02 0.02 0.05 112211221122MHZ2-16D 5 15 67.3 8 11 38 16 6.5 23.6 30 13 30.6 24 42.5 24.5 7.5 22 15 0.02 0.02 0.05 MHZ2-20D 8 18 84.8 10 16.8 50 18.6 7.5 27.6 35 15 42 30 52.8 29 9.5 32 20 0.02 0.02 0.05 MHZ2-25D 102.7 63 33.6 52 63.6 11 25 10 12 22 36.5 36 30 40 22 21.8 10 20 0.02 0.02 0.05 U V W X Y Z AA AB AC AD AE AF AG AH AJ AK Model 1122+0.043 0 +0.043 0 +0.052 0

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

0.8 M6 x 1 P M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 PA M3 x 0.5 M3 x 0.5 M3 x 0.5 M5 x 0.8 Q S SD SF SU UU WA WB WC WD M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 WE WF XA XB XC YA YB YC Size 3.5 16 50.5 10.8 24.4 9.4 25 9.5 2H9 2 4.8 20 22.5 2H9 2 11 2H9 2 1 3.5 18 56 13.4 26.2 11.3 28 10 2H9 2 5.3 21 24.5 2H9 2 11.5 2H9 2 2 3.5 20.5 60 15.2 31 11.8 30.5 12 2H9 2 5.3 25 27 2H9 2 13.5 2H9 2 3 4.5 23

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

2.5 2.5 6 E 5 2 x M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3 2 x M3 x 0.5 (Plug: M-3P) 170.05 6 (fitting seat surface dimension) M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port A 2 x M3 x 0.5 A 5 5.5 3.2 J 2.4 Z Section AA 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL 11-/22-MXPJ6-10 4 x M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Auto switches / Proper mounting position for stroke end detection Electrical entry direction: Inward Electrical entry direction: Outward B D C A (mm) D-Z73 D-Y59A,D-Y59B A B C D Bore size D 0.5 4 0.5 3 5 5 C 16.5 23 34 46 46.5 56 6 20.5 27 38 50 50.5 60 -1 2.5 -1 1.5 3.5 3.5 32 15 21.5 32.5 44.5 45 54.5 4.5 8 4.5 7 8.5 9 10 15 20 25 Note 1) The above mentioned values are indicated as a guide

3 Port Air Operated Valve VPA3145/3165/3185 Series

C[dm3/(sbar)] C[dm3/(sbar)] 1(IN), 2(OUT) 3(EXH) b Cv b Cv 19 0.43 5.5 18 0.47 5.4 23 0.32 6.2 42 0.39 5.8 28 0.36 7.6 26 0.35 7.0 1.0 3 8 1 2 3 4 VPA3145 3 4 SYA SYJA Port size Effective area (mm2) Valve model Weight (kg) 12(INOUT) 23(OUTEXH) 1(IN), 2(OUT) 3(EXH) VZA 3 4 1 230 280 280 310 310 330 570 650 650 670 650 670 2 2 1.5 VPA3165 11 4 VFA 11 4 11 4 11 2 VFRA VPA3185 2.3 VPA4 SYJA Dimensions

High Vacuum Angle Valve

Secure the lead wire of the switch so that it has sufficient slack, without any excessive force applied to it. 23 XL Series Specific Product Precautions 4 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Since this will make it impossible to satisfy the specifications, operate with adjustment within the range of maximum values. 11-5-23 23 Series MSUB Dimensions These drawings indicate the condition when the B port is pressurized.

RSH

Stroke (mm) MTS Standard stroke Bore size (mm) 20 15 CC 32 20 50 30 63 30 80 40 Weight (kg) Bore size (mm) Action Weight Rod end configuration 20 0.41 Double acting 32 0.75 Lever with built-in shock absorber 50 Single acting 2.03 63 3.56 Double acting with spring 80 6.33 Applicable Auto Switch Model Model Electrical entry/Function Auto Switch Page Reed switch D-Z7l/Z80 Grommet (In-line) 5.3-23

ML2B

BB 30 35 40 AA 106 133 164 B 220 280 340 C 206 264 322 D 42 51 59 E 138 168 204 F 93.5 107.5 130.5 II 16 19 23 I 76.5 91 110 Model ML2B25 ML2B32 ML2B40 MM 16 21.5 24.5 MA M5 x 0.8 M6 x 1 M8 x 1.25 NN 22 26 37.5 LC 9.5 12 12 LB 9.5 16 15 LD 5.5 6.5 8.5 MC M5 x 0.8 M6 x 1 M8 x 1.25 PA Rc 1/8 Rc 1/8 Rc 1/4 MD 9 11 14 KK 15 16 17.5 ND 5.6 6.8 8.6 MB M6 x 1 M8 x 1.25 M10 x 1.5 LL 28 30.5 37.5

MQQ

CE1 CE2 20, 25 (Non-integrated type) ML2B +0.058 0 0.040 0.076 9 hole H10 Shaft d9 25 C J G5-S CV CI MVGQ CC +0.2 +0.1 14 10 RB S + Stroke 19 30 H Z + Stroke 9 J ZZ + Stroke D-X 20Bore size (mm) S CI Z H ZZ Data 20 24 97.5 168 40.5 177 25 30 102.5 177 44.5 186 10-5-23 23 Series MQM Accessory Bracket Dimensions Mounting nut Rod end nut d d C C B H B H Material: Carbon steel Material: Carbon

CQS

For details, refer to pages 7-9-23 and 7-9-21. 7-4-45

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

arc on each side for high rigidity and high precision (zero clearance) MImproved moment resistance Improved Dynamic Allowable Moment 4-row circular arc Steel ball rotation center Work load [kg] (Overhang: 300 mm) Size Moment direction High rigidity guide LEKFS LEFS Rail guide (Rolling contact surface) 7.5 (10% increase) 6.8 25 Pitching (Mep) 32 18 (35% increase) 13.3 40 37 (61% increase) 23

Environment

Description Material Note 21 Belt 2 Ball screw (shaft) Alloy steel 22 Bearing stopper Aluminum alloy 3 Ball screw nut Resin/Alloy steel 23 Parallel pin Stainless steel 4 Piston Aluminum alloy 24 Scraper Nylon 5 Piston rod Stainless steel Hard chrome plating 25 Retaining ring Steel for spring Nickel plating 6 Rod cover Aluminum alloy 26 Motor 7 Housing Aluminum alloy 27 Lube-retainer Felt

IN20267

Studio 5000 Setup . 23 13. EDS file Rockwell Studio 5000. 23 13.1. Adding a device to Ethernet Rockwell Studio 5000 . 24 13.2. Setpoint . 27 14. Example: Convert the Position to Counts . 27 14.1. Example: Pseudo Code for 100mm MPC mm . 27 14.2. Ladder Logic Example . 27 14.3. LabVIEW Example . 28 14.4. Web Pages . 29 15. System Page . 29 15.1. Diagnostics Page . 30 15.2.

Digital Gap Checker

With 2 tapping screws (3 x 8) 16 ISA3 Series Dimensions ISA3-mm (Bracket mounting) 2 1 3 1.8 L1 (23) 7 (41.1) 38 (33.3) 4 77 15 66 H 25.6 11 5.5 When centralized lead wire is used. 17 Pin no.

KN Series Nozzles for Blowing

D L1 VMG KN KN 861 KN Series Nozzle for One-touch fitting/KN (mm) Model Nozzle size D Applicable fitting size d L1 A Weight (g) KN-Q06-100 KN-Q06-150 KN-Q06-200 KN-Q08-150 KN-Q08-200 KN-Q10-200 KN-Q10-250 KN-Q12-250 KN-Q12-300 5 5 5 9 9 16 16 23 23 18 18 18 20.5 20.5 22 22 24 24 35 35 35 39 39 43 43 45.5 45.5 6 6 6 8 8 10 10 12 12 1 1.5 2 1.5 2 2 2.5 2.5 3 D 10 A Connecting products with

Bag Filter

Weak alkali-based cleaning fluid, Industrial water (Vessel material: Stainless steel) Oil-based coolant, Cutting oil (Vessel material: Carbon steel) Cover Case Legs Seal Stainless steel 304 [FGFS/L] Stainless steel 304 Note 6) Material Carbon steel NBR or FKM Note 2) [FGFC/R] Carbon steel 100(4B)JIS10KFF Rc2 150(6B)JIS10KFF Port size Internal volume Weight Pressure gauge Note 4) Note 3) 23

Compressed Air Preparation Filter

Dimensions [mm] Auto drain (1.0 MPa) Auto drain (1.6 MPa) Drain guide B C D E F G Bracket related dimensions Model Port size A H I J K L M N O P AFF70D, AM70D, AMD70D 1, 1 1/2 391.5 379.5 382 31.5 144 136 68 23 40 124 82 48.4 90 18 9 16 10 2.6 AFF80D, AM80D, AMD80D 1 1/2 404 392 394.5 38 170 160 80 23 40 148 93.5 58.5 110 22 11 20 12 3.2 AFF90D, AM90D, AMD90D 1 1/2, 2 470 458 460.5 38 170