AS

1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" -X214 Restrictor (Without check valve) 04 4 06 6 08 8 10 10 12 12 With One-touch ttings Example) AS2002F-04A-X214 10Clean Series Example) 10-AS2002F-04A 1 For selecting applicable tubing O.D., refer to the Model shown above. 2 Use 1/8" tubing. 1 Fluorine grease is used. 2 The cleanliness class (ISO class) is 5.

ASP

Metric size Inch size 06 08 10 12 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Universal Port size Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 With One-touch

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

ZP

(mm) 02 04 2 4 Nil -X19 With lock ring Without lock ring (10 or larger) 1 2 10 to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 N S NBR Silicon rubber 13 13 ZM 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 50 50 20 or large are manufactured upon receipt

21- AF-A 10- Series Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size Option a Mounting Nil Without mounting option B Note 3) With bracket + r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVC How to Order Valves (Single Type) LVC LVA LVC 2 0 06 S LVH Option Body class Nil None LVD 1 With flow rate adjustment Body class Orifice dia. Symbol 2 With bypass ø4 2 2 Valve type LQ2

Symbol Symbol Nil 2 3 4 6 5 Application Ports A & B same size N PPS PFA Ammonium hydroxide compatible Metric sizes 03 04 06 08 10 12 19 25 3 4 6 8 10 12 19 25 Pilot port thread type Refer to the applicable tubing table to the left. Different diameter tubings can be selected within the same body class.

Integral Fitting Type (Hyper Fittings) Series LVD How to Order LVC LVA LVD 1 0 03 S LVH Body class Option LVD Orifice dia. Body class Nil None Symbol 1 Valve type 1 1 ø2 With flow rate adjustment LVQ 2 2 2 ø4 With bypass 0 N.C. 3 3 With flow rate adjus

M5 x 0.8 Nil 2 Port B (OUT) different dia. size Inch sizes Symbol Nil Application Ports A & B same size 03 05 07 11 13 19 1/8 3/16 1/4 3/8 1/2 3/4 Different diameter tubings can be selected within the same body class.

Clean Regulator SRH Series

Port size SRP SRH3000 URJF 1/4 SRH4000 URJF 3/8 Piping port size Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 With metal gasket seal fitting With metal gasket seal fitting Symbol 01 02 03 04 A2 A3 X210 EPDM seals SRF With relief port fittings (Applicable tube O.D.: 4) X211 X216 ITV Machined relief port M5 thread Knob operation product with reduced torque X233 IC X234 Aluminum body ITVH Note) The pressure

AWM20 to AWM40

Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 4) H Mounting Without mounting option With bracket With set nut a + Without auto drain Float type auto drain (N.C.)

AWM20 to AWM40

Example) AWM30-03BE-1N AWD 30 03 BE q w e r t Body size Description Symbol 30 40 20 Nil N Note 1) F Note 2) Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 4) H Mounting Without mounting option With bracket With set nut a + Without auto drain Float type auto drain (N.C.)

Process Valve Series VNA

B (9.5) B (12.7) B (19.1) B (25.4) B (31.8) B (38.1) B (50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 3 8 1 2 3 4 10A 15A 20A 25A 32A 40A 50A 1 1 1 2 1 4 1 2 364 Series VNB Process Valve 2 Port Valve For Flow Control A wide variety of applicable fluids [Option] Proper selection with body and sealing materials permits application with a wide variety

ZP

(mm) 02 04 2 4 Nil -X19 With lock ring Without lock ring (10 or larger) 1 2 10 to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 ZM N S NBR Silicon rubber 13 13 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 20 or large are manufactured upon receipt of order

Size: 100 (M5 Standard), Control Range: FSM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Tube Size: 04 (ø4)

Size: 100 (M5 Standard), Control Range: FC (50 to 150 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Tube Size: 04 (ø4), Push lock: A (Push-lock)

Size: 100 (M5 Standard), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Tube Size: 04 (ø4), Push lock: A (Push-lock)

Size: 100 (M5 Standard), Control Range: FSC (50 to 150 mm/s), Indicator Window Direction: 1 (180°), Tube Size: 04 (ø4)

Size: 100 (M5 Standard), Control Range: FSM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Tube Size: 04 (ø4), Push lock: A (Push-lock)

.: 04 (ø4), Port Size/Applicable Tube: M5 Thread (M5X0.8)

.: 04 (ø4), Port Size/Applicable Tube: M5 Thread (M5X0.8)

.: 04 (ø4), Port Size/Applicable Tube: M5 Thread (M5X0.8)