Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY Light weight & compact Series XMA with KF(NW) flange Model Weight kg A mm B mm Conductance l/s XMA-16 5 0.33 40 103 XMA-25 XMA-40 XMA-50 14 0.61 50 113 B 45 1.40 65 158 80 2.00 70 170 A 160 XMA-63 XMA-80 3.60 196 88 200 6.20 90 235 : Common to all series.
Z Y X S NN NB NA MM LZ LY LX LT LH LC LA H F D C B A Bore size (mm) 10 16 90 [91] 7 5 46 M8 x 1 9.5 12.5 M4 x 0.7 32 16.5 24 1.6 9 4.5 38 28 8 4 14 12 15 91 [92] 9 6 47 M10 x 1 9.5 12.5 M5 x 0.8 42 25 33 2.3 14 5.5 46 28 8 5 20 18 15 Rod Side Flange Style (F) CVJ5F Rod extended/retracted when energized M5 x 0.8 M5 x 0.8 53.5 [54.5] M5 x 0.8 Manual override 28 [34.5] Width across flats B1
LG RD 11 Xmmm Plate SD OP 21 LG 14 SD Plate Note 4) CN1 EM1 Forced stop 8 Servo ON SON 4 Reset RES 3 Forward rotation stroke end LSP 6 Reverse rotation stroke end LSN 7 10 m or less CNP1 Note 1) PE Note 1) For preventing electric shock, be sure to connect the driver circuit power supply connector (CNP1),s protective earth (PE) terminal to the control panel,s protective earth (PE).
Bracket ISA-14 DIN rail ISA-5-m L Stations Part no.
Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2016 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing UR printing UR 11030SZ Printed in Japan. D-G
21 29 14 21 29 11.5 18.5 26 Note 1) Cannot be used with gases.
Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series RoHS Specifications Compact, solid, and safe design The case and cover have undergone testing in which they were subjected 100,000 times to impacts equivalent 1.5 times the rated pressure (confirming to MIL standard).
Accessory None Bracket (Available M5 type only) Nil B 14-11-17 Series GS40 Precautions Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Wiring Mounting and Piping Warning Caution 1.
SET 20 VY1 + G P.SET PPA AL 14-11-19
AD Accessory (Option) GD Applicable model HAW2 HAW7 HAW22 HAW37 HAW55 HAW75 HAW110 Screw flange (With companion flange) HAWF-141 HAWF-142 HAWF-200 HAWF-200 Auto drain AD402-04 AD600-06 AD600-10 Model Selection (Flow Capacity l/min (ANR)) JIS Symbol Model HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 50C 2000 6000 12000 12000 12000 18000 1000 70C 100C 180C Inlet air temperature
Ported Type Series 52-SY7000 Dimensions 2-position single L plug connector (L) 52-SY7120-L-02 (-F2) In case with foot bracket 52-SY7120-L-02-(F1) 29.4 20 2 x M4 x 0.7 Threads depth 6.5 (For bracket mounting) 57 24.5 7 46 5.5 19.8 28 38 79.2 Manual override Insulation: Black () 14.7 B 13.6 40 A Insulation: Red (+) 2 x 4.2 (Mounting holes for manifold) 20 2 x 1/4" {A (4), B (2) port} 42 (14
Regulating spring Piston O-ring Adapter Hexagon socket head cap screw Port 14-7-4
Dimensions (mm) Weight (g) Effective area (mm2) Recommended flow (m3/min (ANR)) Port size R Model A B C 1 8 1 4 3 8 1 2 3 4 1 1 1 14 64 22 18 ANA1-01 ANA1-02 ANA1-03 ANA1-04 ANA1-06 ANA1-10 ANA1-12 ANA1-14 ANA1-20 4 37 16 10 15 35 60 90 160 280 450 610 0.8 or less 1.2 or less 2.7 or less 4.5 or less 7.0 or less 12.0 or less 20.0 or less 32.0 or less 45.0 or less 84 25 21 98 30 24 111 46
Operating Parameters Status Gas Operating pressure Proof pressure Burst pressure Ambient and operating temperature Cv Vacuum to 250 psig (1.7 MPa) Vacuum to 125 psig (0.9 MPa) 1000 psig (6.9 MPa) 8000 psig (55.2 MPa) 14 to 160F (10 to 71C) (No freezing) 1) 0.29 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max 15 in. (0.4 m) Option: 10 in. (0.25 m), 7 in. (0.18 m), 5 in
Model (Hexagon width across flats) ASR ASQ (Hexagon width across flats) AS23 1FE-01-04SK 12.7 17.5 9.3 13.1 24.9 4 9.3 26 30.9 AS23 1FE-01-06SK 13.5 22.9 R 1/8 10.9 12 12 14 44.9 26.9 49.9 48 6 11.6 27 36.3 14.2 53 AS23 1FE-01-08SK 18.5 28.2 12.9 16.2 30.9 8 15.2 29 40.8 AS23 1FE-02-04SK 16 21.9 10.9 16.2 30.6 4 10.4 36 39.6 AS23 1FE-02-06SK 17 25.2 18.4 34 6 12.8 37 42.1 R 1/4 14 14 41.2
13 14 14 17 14 16 15 18 Reed switch Without indicator light RB 8 7 5.5 6.5 6.5 J 2-color indication 2-color indication Water resistant 3.5 3.5 5 5 5 Grommet (In-line) D-F5BAL DSolid state switch D-F5NTL D-G5NTL D-Y69A/Y7PV/Y69B D-Y7NWV/Y7PWV/Y7BWV With timer 4 4 4.5 4.5 4.5 -X Grommet (Perpendicular) 2-color indication 20With pre-wire connector is also available in solid state auto switches
Fittings & Tubing Air Cylinders Rotary Actuators 57 54 60 120 120 A C 45 14 14 3 x M4 x 0.7 thread depth 8 25 25 M5 x 0.8 M5 x 0.8 13 M5 x 0.8 Finger closing port P.C.D.36 (Mounting thread) Finger closing port Finger opening port M5 x 0.8 Finger opening port 44 14h9 0 -0.043 18 1.5 55.5 +0.02 +0 3 x 4 depth 8 9 2 (A, B, C common view) 28.5 37 12 (60) 10 21 M5 x 0.8 thread depth 5 Vacuum suction
Find the value of M1 max at 300 mm/s in Graph (1). 2a =M1/M1 max =1.47/14 =0.105 M1 L1 M3 = m x g x L2 = 3 x 9.8 x 0.04 = 1.176 [Nm] m x g Investigate M3. M3 Find the value of M3 max at 300 mm/s in Graph (3). 2b = M3/M3 max = 1.176/14 = 0.084 L2 m x g 3.
9 2A 2A 13 2 (Lead wire length) (Mounting hole for manifold) 2 x 3.2 2 x 3.2 16 [14] M5: M5 x 0.8 [01: 1/8] [14] M5: M5 x 0.8 [01: 1/8] (Mounting hole for manifold) Manual override (Non-locking) 300 2 x M2.5 x 0.45 (Mounting screw) (Mounting screw) Applicable cable O.D: 3.5 to 7 Pg7 (Mounting hole) 3 4 2 x 3.5 63.4 57.9 (Mounting hole) (Bleed hole) 50.4 (P, A, R port) 2 x M5 x 0.8 24 21
Unused Lead wire assy U side 6 stations (14 stations) Pin Confirm an insertion of the lead wire assembly after the insertion of pin by light pulling of the lead wire. (n) 4. Mount the end plate !2 and !3 and tighten the bolt !1. 7 stations (15 stations) (2) (1) Stations Note 1) Be careful that the packing and the O-ring do not fall out of the groove.