5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Double Double Double Double Double Double Double Single Single Single Single Single Single Single Single Single Single SI unit SI unit A B A B A B A B A B A B A B A B A B A B A A A A B A A B A 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 0 1 2 3 7 8 4 5 9 11 6 10 11 Mixed wiring is available as an option. Use the manifold specification sheet to specify this.

Air Cylinder Series MB

8 !4 !1 !6 !3 r !5 u q y e t !2 w i A A' Cylinder tube sectional view A-A !

ZP

Flat with ribs F: M5 x 0.8 F: M6 x 1 F: M8 x 1.25 F: Rc Y 1 8 Model A 1.2 2.6 4.8 7 9 ZPT20 U C ZPT25 U C ZPT32 U C 1.6 0.8 20 23 1.7 14 23 6 8 6.2 23 29 29 4 28 5 8 8 12 12 25 1.8 M4 x 0.7 1 14.5 23.5 23.5 29.5 29.5 4.5 32 35 2.3 Deep 2.5 M5 x 0.8 1 8 B C D E G D E G D E G D E G F: M5 x 0.8 F: M6 x 1 F: M8 x 1.25 F: Rc Y Model A ZPT25D 25 28 20 5 29 8 6 29 8 8 35 12 6.2 35 12 10 b c d e

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

(mm) G GP H HB HG HP A HS HT HA D FB FA d EA EB B C Model CY1S6 CDY1S6 CY1S10 CDY1S10 6.5 3 17 7.6 6 32 27 8 5 4 8 26 8 19 8 4 18 12 7.5 6 5 40 34 12 10 3 6.5 10 12 33 14 25.5 PA J x K LD (N) PB PW Q S ta tb TT T QW W Z L Model CY1S6 CDY1S6 M4 x 0.7 x 6.5 40 3.5 10 25 25 50 52 16 42 10 16 46 68 CY1S10 CDY1S10 M5 x 0.8 x 9.5 45 4.3 9.5 25 38 60 60 24 47 12.5 20.5 0.5 1.0 58 80 PA

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Stations Black White 8 station (18 stations) A side coil B side coil Black White 9 station (19 stations) A side coil Note) When there are 10 or fewer manifold block assemblies, and more are added to make a total of 11 or more, a supply/exhaust block assembly must also be added.

VFS

. 3 8 10 stations 10 Base type 01T, 10: 2 to 10 stations Base type 01C, 01F: 2 to 8 stations Symbol Porting specifications (A, B) Passage Symbol R1, R2 P 1 Side 2 Bottom Common Common Caution Option When using an exhaust cleaner, mount it downwards.

Free Mount Cylinder Series CU

0.5 8 8 4 2 20 4 (1.5) 0 10 10 6 MU 5.5 (3) 1.5 25 3.5 11 11 7 4.5 32 6.5 (4) 2.5 12.5 12.5 8.5 Single Acting, Spring Extend (mm) D-A9, D-A9V D-M9, D-M9W D-M9V, D-M9WV A B W Bore size (mm) Stroke A B W A B W 4.5 0.5 (3) -1.5 (1) -6.5 (-4) -2 (0.5) -7 (-4.5) -4 (-1.5) -9 (-6.5) -5.5 (-3) -10.5 (-8) -6.5 (-4) -11.5 (-9) 5.5 2.5 6 All stroke 5.5 10.5 1.5 14.5 14.5 7.5 12.5 8 13 10 15 11 16

AC Servo Motor Driver (CC-Link Type ）

for group a. 14 8 14.

0.4

P=17.5 1 2 3 4 5 6 7 8 n: Stations 53 Silencer cover Blanking plug (For One-touch fitting) L Dimensions 04 06 08 10 Applicable fittings size d 4 6 8 10 A A L D Model KQ2PKQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 16 18 20.5 22 32 35 39 43 6 8 10 12 It is inserted into an unused cylinder port and SUP/EXH ports.

SQ1000/2000

A 1 () Station 1 SOL. A Station 2 14 () SOL. A Station 3 2 () 1 SOL. A Station 4 14 15 () 2 15 SOL. A 3 3 () Station 5 16 SOL. B 4 16 () 17 5 SOL. A 4 () 18 6 Station 6 SOL. B 19 17 () 7 20 SOL. A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

VFR

Porting specifications (A, B) EA, EB P Symbol 03 04 Symbol 3 8 02 2 stations 1 2 1 2 1 Side 2 Bottom 10 10 stations M Mixed Common Common For bottom ported: Rc 3/8 only.

Air Cylinder Series CA2

B A B A B A B A B A B A B A B A B A B 40 50 63 80 100 6 4 4 1 0.5 0.5 1 7 2.5 4.5 12 10 0 0 4 0 1.5 9 8 3.5 6 4 3.5 1.5 1 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 3 8.5 7.5 6 5 4.5 2.5 3 9 4.5 6.5 14 12.5 1.5 2 8 3.5 5.5 13 11.5 5.5 12 10 9.5 7.5 7 6 6.5 12.5 8 10 17.5 16 4 4.5 10.5 6 8 15.5 14 9 13.5 12.5 11 10 9.5 7.5 8 14 9.5 11.5 19 17.5 6.5 7 13 8.5 10.5 18 16.5 10.5 Note) Adjust the

LEC-OM02704CN

)10 9 14 15 14 (7) ([C][6]) [C][6] [0][1][F][F] 0 8 (16)10 (8) ([C][7]) [C][7] [0][1][F][F] 020 8 (16)10 (9) ([C][8]) [C][8] [0][1][F][F] 020 8 (16)10 (10)(DWELL)([C][A]) [C][A] [0][1][F][F] (DWELL) 020 8 (16)10 (11)([C][B]) [C][B] [0][1][F][F] 03 8 (16)10 (12)([9][0]) [9][0] [0][0] EMGLSPLSN OFF ON/OFF 1EA5 4 [0][3] (DO) 1EA5 4 [1][0] EMGLSPLSN 1EA5 4 [1][3] 1EA5 4 14 16 14

CJ2

Material: Iron CD (cd) 3.3 5 U 8 10 R 5 8 NB 18.5 23.5 NA 12.5 12.5 MM M4 x 0.7 M5 x 0.8 CB 14 20 CA 17 20 KA 4.2 5.2 BB 12 18.3 H 28 28 BA 15 18.3 GA 8 8 A 15 15 CX 3.2 6.5 Bore size (mm) 10 16 Dimensions by Stroke Applicable bore (mm) Part no.

Basic type / Direct mount type Series CY3B/CY3R

A @1 #7 #8 #9 !

CA2

B A B A B A B A B A B A B Hs Hs Hs Hs Ht Hs Ht Hs Hw Hs Hw 3.5 1.5 6.5 4.5 0 0 0.5 0 2 0 4 2 11.5 9.5 40 37 38.5 69 81 69 71.5 31.5 81.5 38 31.5 73 3.5 1.5 6.5 4.5 0 0 0.5 0 2 0 4 2 11.5 9.5 50 42 42 77 86.5 77 76.5 35.5 86.5 42 35.5 78.5 6 5 9 2.5 1.5 3 2 8 4.5 3.5 6.5 5.5 14 13 63 49 46.5 91 93.5 91 83.5 43 93.5 47 43 85.5 9.5 7.5 4.5 12.5 6 4 6.5 4.5 8 6 10 8 17.5 15.5 80 107 57.5 53.5

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

8 !1 !3 q u t y u o A !9 r e @0 !0 !2 !5 !6 !4 i A w A-A Component Parts No. Description Material Note No.

CJ2

D-C7 D-C8 D-C73C D-C80C D-H7 D-H7C D-H7W D-H7BAL D-H7F D-A7/A8 D-A79W Bore B A B A B A B A B A 2 (8.5) B 2 (0.5) A 1 (7.5) B 1 (0) A 6 0 0.5 0 0.5 3 3.5 3 3.5 3.5 4 3.5 4 7.5 8 7.5 8 0.5 1 0.5 1 10 16 2.5 3 2.5 3 1.5 2 1.5 2 ( ) in the table: In case of double rod style, series CJ2W.

5 Port Solenoid Valve

C6: 6 (SMC) C8: 8 (SMC) C10: 10 (SMC) N7: 1/4" (SMC) N9: 5/16" (SMC) N11: 3/8" (SMC) (11) (47.7) [Communication connector D-sub] (76.8) (External pilot specification) BUS OUT BUS P 1 P 1 P 1 2 B 2 B 2 B 2 B 2 B 2 B 2 B 82.7 76.7 76.7 63.8 (60.3) BUS IN 11.6 13.5 37.6 36.1 4 A 4 A 4 A 4 A E 4 A 4 A A PWR 3/5 E E 3/5 3/5 PWR 12 53.2 (10) (Pitch) P = 20.5 21.2 53.2 (14.7) One-touch fitting [

KJ

25.5 33 26 32 32.5 32 34 36 37.5 37 39 41 42 43 44.5 46.5 46.5 48 50 4 9 4 9 10 8 10 19 32 11 19 32 25 25 32 58 27 35 61 15 22.5 14.5 20.5 20.5 18 20.5 24.5 26.5 22 26 28 24 27 29 33 27.5 29.5 33.5 2.3 2.5 2.3 2.8 3.6 2.3 15.5 15.5 8 10 8 10 10 16.5 16.5 9.6 1 8 1 8 10-32 UNF 5 32 10.4 16 17 1 8 3 16 1 8 11.4 16.5 18 10-32 UNF 11.11 Connection thread 1 8 K 1 4 13.2 17 10 19 1 4 14.29